Indexer Control Board CEDB-1013 aka 2-VC-15252 for DNS 80A Track

A number of flow errors at the Indexer module of a DNS 80A track have been traced back to failures in the Indexer Control Board – part numbers CEDB-1013,  2-VC-15252 or 2-VC-1524-1. 2-VC-15254-1  GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

Example alarms that have been resolved include:

CODE 1-01-0210 [station 1 – unit 1 (indexer) – code 0210]:                                        Faulty Indexer Horizontal Axis Operation

CODE 1-01-0220 [station 1 – unit 1 (indexer) – code 0220]:                                         Faulty Indexer Horizontal Axis Origin Return

If you are experiencing this or similar flow alarms on your DNS equipment, contact GetSpares.com today for the right solution!

Indexer Control Board CEDB-1013 for DNS 80A

Indexer Control Board CEDB-1013 for DNS 80A

ETEC/ATEQ/AMAT LTS TCB Video Generator Board 8007-0011

The Video Generator (VG) board is an integral part of ETEC laser beam lithography tools. Common symptoms of a failed board include:

  • “No signal detected at PAQ AD” (Pattern Acquisition Adjust)
  • “VG not responding”
  • Tool will not pass a system restart

GetSpares.com has proven capability to restore failed VGs to full function.  Contact them today for replacement/repair solutions.

Bottom view of ETEC Video Generator board 8007-0011

Bottom view of ETEC Video Generator board 8007-0011

Top view of ETEC Video Generator board 8007-0011

Top view of ETEC Video Generator board 8007-0011

KLA-Tencor 8100, 8250, 8300, 8450 series Critical Dimensions – Scanning Electron Microscope (CD-SEM): imaging malfunctions result of failed Column Control Chassis II (CCC2) part number 720-06884-002

KLA-Tencor Critical Dimensions Scanning Electron Microscope (CD-SEM) models 8100, 8250, 8300, 8450 can suffer from imaging malfunctions as the result of a failed Column Control Chassis II (CCC2) unit – part number 720-06884-002.  The observed failure mechanism is usually a ripple distortion effect along one or more view axes (see below images for clear examples). GetSpares maintains fully operational KLA SEMs in their warehouse, as well as the ability to repair these critical electronics.  This means parts sent in for repair get fully tested in a functional tool before being sent out – so you can be assured of top quality service.  Contact GetSpares today for replacement/repair solutions!

Front view of KLA 8100 SEM

Front view of KLA 8100 SEM

Side view of KLA 8100 SEM

Side view of KLA 8100 SEM

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

KLA 8100 SEM imaging: malfunctioning CCCP2 720-06884-002

KLA 8100 SEM imaging
Top – electron gun image of wafer site with funcitonal CCC2.
Bottom Left/Right – same site shown when CCC2 malfunctions and causes ripple distortion in image.

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

Leybold UL-500 Error Codes during Boot – EF, EH, FH, AH, BH, CH – 20061966

These are common error codes for the Leybold Ultratest UL-500 Helium Leak Detector used to test chamber conditions in many semiconductor processing equipment.  Failure on part 20061966.  Good news!  It can be repaired.  Contact info@comvolt.com.

ER1:CHECK ERROR E.O 92H:
Error within the internal V.24 connection.
ER1:CHECK ERROR ID 93H:
Error within the internal V.24 connection.

ER1:TIME OUT IDENT 95H:

Error within the internal V.24 connection.

ER1:TIME OUT INIT 96H:

Error within the internal V.24 connection.

ER1:DSR INACTIV INIT 97H:

Error within the internal V.24 connection.

ER1:DSR INACTIV 98H:

Error within the internal V.24 connection.

ER1:TIME OUT ECHO O 9AH:

Error within the internal V.24 connection.

ER1:ACIA-OVERRUN 9BH:

Error within the internal V.24 connection.

ER1:DSR AKTIV 9CH:

Error within the internal V.24 connection.

ER1:PARITY-ERROR 9EH:

Error within the internal V.24 connection.

ER1:DATA LOST 9FH:

Error within the internal V.24 connection.

leybold_UL500_cabinet

 

KLA-Tencor 277266 Timing Generator for Surfscan Systems S6100, S6120, S6220, S6420

The electronic circuit board 277266 Timing Generator goes into KLA-Tencor Surfscan systems S6100, S6120, S6220, and S6420.  The board is integral to the tool, which provides high precision defect inspection for silicon wafers.  GetSpares.com maintains fully functional Surfscan systems on their warehouse floor – that means good parts for sale, or good test environments for repaired parts.  If your tool is down, contact GetSpares.com today for replacement/repair solutions.

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6120

KLA-Tencor Surfscan S6120

 

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Bottom view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Bake Temperature Control Errors on DNS 80A and 80B – Heater Controllers EEBH-6011, EEBH-0011

If you are experiencing “Bake Temperature Error”, “Bake Temperature Incomplete” or other general failures with the bake units in a DNS 80A or 80B tracks, the Heater Controllers EEBH-6011 or EEBH-0011 have likely failed.  Not to fear, GetSpares.com maintains DNS tracks and parts.  These parts are available for sale when in stock, but can also be repaired if shipped to the GetSpares facility.  If you see a error screens as pictured below, contact GetSpares today!

Code 01-XX-201: Bake Temperature Error, DNS80A

Code 01-XX-201: Bake Temperature Error, DNS80A

Code 01-XX-301: Bake Temperature Incomplete, DNS80A

Code 01-XX-301: Bake Temperature Incomplete, DNS80A

Font view: EEBH-6011 Heater Controller, DNS80A

Font view: EEBH-6011 Heater Controller, DNS80A

Top view: EEBH-6011 Heater Controller, DNS80A

Top view: EEBH-6011 Heater Controller, DNS80A

Heater controller EEBH-0011 for DNS80B

Heater controller EEBH-0011 for DNS80B

DNS80B Spin Board EESC-0012 2-vc-191195 Board Connections and Schematics

Here is a cheat sheet we use to identify where and what each connection on the DNS80 spin boards are connected to.   This specific unit has connections for SC2, SCN5, SCN3, SN4, SCN6, SCN8, SCN10, SCN12 and SCN13 on the EESC-0012 spin board.

DNS80B_spin_board

 

 

 

 

 

 

 

 

 

 

 

 

 

Connector Board Description Where does it go ?
SCN2 EESC-0012 Spin Board A Board A Input 1-30, Output 1-8, 24V, 12V, GND External Alarm IFC
SCN3 EESC-0012 Spin Board A Inputs 1-38. Outputs 1-7, but there are really 32 serparate outputs Mech I/O to Spin mechanical section IFC Board
SCN4 EESC-0012 Spin Board A Inputs 1-8. 4 Inputs for M3 control. 4 outputs for M3. SCN4A Cup Section
SCN5 EESC-0012 Spin Board B Inputs 1-32, Outputs 1-24, 24V, 12V, GND Spin Chemical IFC
SCN6 EESC-0012 Spin Board B Only has one input and output AC power supply interface
SCN8 EESC-0012 Spin Board B Inputs 1-12, Outputs 1-8 Not Connected
SCN10 EESC-0012 Spin Board C TXA, RXA, RS232 AC power supply interface
SCN11 No Connector
SCN12 EESC-0012 Spin Board C BUS1+ , BUS1- RS485 to Chemical Temperature Controller, AKA “Thermostatic Control Unit”
SCN13 EESC-0012 Spin Board C BUS2+ , BUS2- TXB2, RXB2 Not Connected

EESC-0012_spinboardA1

 

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardA2

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardA3

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardA4

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardA5

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardA6

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardA7

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardB1

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardB2

 

 

 

 

 

 

 

 

 

EESC-0012_spinboardC1

 

DNS 60/80 A/B EEMP-0021X3, EEMP-0013 LCD Monitors – Color and Monochrome

DNS part numbers EEMP-0021X3 and EEMP-0013 are LCD monitors that can be used in either the 60A, 60B, 80A, or 80B tracks, depending on the track configuration.

DNS_Monitor_60A_60B_80A_80B

Monitor installed in DNS 80B

DNS_Monitor_60A_60B_80A_80B

Monitor installed in DNS 80B, telescoped out

These can fail or malfunction if installed in a tool not configured for that exact part number.  EEMP-0021X3 is a full color display, whereas EEMP-0013 is a monochrome display.

DNS_Monitor_60A_60B_80A_80B_EEMP-0013

DNS EEMP-0013 Monochrome LCD monitor installed in 80B

DNS_Monitor_60A_60B_80A_80B_EEMP-0021X3

DNS EEMP-0021X3 Color LCD monitor installed in 80B

 

A known symptom of color vs. monochrome incompatibility is loss of directional sync on the monitor.  The screen image will continuously and uncontrollably “roll” like the images in a slot machine.  Another failure symptom is no image at all, but this is less likely a compatibility issue as opposed to general circuit failure.  In either case, GetSpares.com maintains a fully operational DNS 80B track and parts, as well as the capability to repair and test parts.  If your DNS LCD monitor is failing, contact GetSpares for quality repair/replacement solutions.

GaSonics L3510 EOP Pressure Controller 903-1598

PCB 903-1598 controlls the gas pressure valves for GaSonics L3510 chamber during the End Of Process (EOP).  This board is known to fail, causing deficient to zero throttle valve control during EOP.  If you’re experiencing these or similar symptoms, contact GetSpares.com for replacement/repair solutions.  GetSpares maintains fully operational L3510 tools, which means fully operational test environments for all relevant parts.  Rest assured that the part you receive from GetSpares will be fully functional.

GaSonics L3510 EOP Pressure Controller 903-1598 PCB

GaSonics L3510 EOP Pressure Controller 903-1598 PCB

Example Code: How to 3D Print Your Own Stand-off’s for Electronics

Often times in electronic assemblies, printed circuit boards (PCB) are spatially separated from one another through the use of stand-offs.  These stand-offs are usually quite prone to breaking, especially if you’re replacing/repairing/generally manipulating the PCBs attached to them.

Finding a stand-off that perfectly matches the original equipment manufacturer (OEM) stand-off can be a real pain, if even possible.  Luckily, with the advent of 3D printers, you can print your own stand-offs to your own specs!

There is an array of software packages available for designing models to be printed by 3D printers.  We like OpenSCAD because it’s:

  • free
  • precise
  • easy-to-use (even with very limited programming experience)
  • PARAMETRIC MODELS

OpenSCAD allows the user to “script” their model to precise dimensions and positioning, as opposed to popular GUI software where the user “draws” the model with the computer mouse.  GUIs are fantastic for artistic models (e.g. miniature sculpture), but not so great for scientific/mechanical/structural objects like stand-offs, where the dimensions of every minor feature to the model make or break its usefulness.

Did we mention that OpenSCAD models are parametric? That means that you can define models according to variables rather than fixed numbers.

For example:  you want a small box to hold your keys.  This box (imperfect cube) only needs to be about 75 mm wide,  25 mm deep, and 50 mm tall (roughly 3 x 1 x 2 inches).  You write some code like  “…cube([75,25,50]);….”  along with some other stuff and that results in a box that’s the best size for holding your keys.

But you really like that box, and you wish you had one just like it, except bigger, to hold your shoes.  So you go write new code  “…cube([300,125,125]);…”.  But then you want another box to hold your silverware.  So you go write more code with those dimensions.

Well how about instead, you have one code file (e.g. box.scad) that begins by declaring some variables:

x = ;  y = ;  z = ;  …and then your line “cube([x,y,z]);”…

Now, you can simply open “box.scad” and change the numbers for x=, y=, z= at the beginning, and the code will automatically generate the box to those dimensions.

Obviously this isn’t the best example – it’s not hard to type “cube([##,##,##]);” multiple times.  But if you’re familiar with OpenSCAD (or any other programming), you know that the code is much more than one simple cube line.  The model you’re generating likely passes x,y,z dimensions into several functions/modules to render the final piece.  It’d be a total pain to hunt down all the functions that use the dimensions you want to change and manually alter them.  So that’s why we define those variables at the beginning and pass them into all our functions.  Then you can simply change the variables at the top of the code anytime you want to reuse it for a slightly different size.

BACK TO THE STAND-OFF

We promised some example code.  So here it is, albeit extremely simple:

r = 5; h = 20; thickness = 2;

difference(){

cylinder(r=r,h=h);

cylinder(r=r-thickness,h=h);

}

 

Simple stand-off generated from the above code in OpenSCAD

Simple stand-off generated from the above code in OpenSCAD

If you download OpenSCAD, you can copy-paste this code right into the editor to make a simple stand-off.  Note that simply changing the numbers for radius, height, and thickness is all that’s needed to scale this stand-off to your liking.

There are a ton of resources out there on the internet to assist you in learning 3D modeling.  But, if you need a specific model and lack the time/will to design it yourself, email info@comvolt.com for any inquiries!