This is a reference video for a functioning Prometrix / Tencor OmniMap RS35. This video was taken after a rebuilt/repair on 36-0004 / 54-0005/ 54-0389 (Current Source), 54-0014 / 36-0014 (DVM card) and 36-0042 (Analog Power Supply). Note that all units from https://getspares.com/ will have a full function test in OEM tool before shipping. This in-tool verification applies to parts sent in for repair or going out as new to you. If you have an interesting issue or problem with your Prometrics, please contact us for help and send us a picture or video for future searchers.
Category Archives: Metrology
KLA Tencor Prometrix UV1280 UV1050 Aligner Initialization
The following video shows the timing of the flat aligner movement an wafer want initialization during a power on sequence.
Depending on your error and timing of the fault, this video can help us determine what part may be faulty before sending it in for repair.
– from UV1250-UV1280 – PCB Stage Driver F2 Rev. F – 36-0287 54-0287 RevAG ,36-0294 – Turret Servo Driver 54-0294 – Servo Driver , 51-0175 H-2 Aligner – Motor Controller ,54-0384 PC interface card to talk to measurement board – PCIF ,PCB Measurement Control Board 54-0317 36-0317 , 54-0317REV2,PCB-8809A-B4 Com/Processor board from front card cage. – Ziatech Processor Board
If you have any questions or want to post videos or troubleshooting tips for this tool, contact us at info@comvolt.com. If you are looking for parts, https://www.getspares.com is a great place to start!
Prometrix RS-75 Simple Power on Sequence and Resistance Measurement
These videos server as a baseline for Prometrix RS-75 tool operation and troubleshooting. These runs use the standard test resistance modules also seen on RS35, RS55 and VP10e tools. Some boards that customers have problems with are the 36-0325 and 52-0616 controller and ME box.
When communicating issues and problems with your tool timestamps of these videos can help us understand the issues you are having. Take a look or send us pictures or videos of your specific issue.
Another Sample of Failed Semiconductor Fab Electonics and Happy Endings
GetSpares | CESP-002 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 05/02/2019 | Repaired/shipped | |
GetSpares | TESP-002A2 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 05/02/2019 | Custom solution/shipped | |
GetSpares | PCS4900/DELL Therma-Wave Single board computer | Opti-probe 2600-2690 3260-3290 Thermawave/KLA Inspection | 05/02/2019 | Repaired/shipped | |
GetSpares | CESB-1011 DNS Spin control board. Station Controller DNS | 80A DNS Photolithograpy | 04/17/2019 | Repaired/shipped | |
GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface | L3510 Novellus/Gasonics RIE/Plasma | 04/12/2019 | Repaired/shipped | |
GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface | L3510 Novellus/Gasonics RIE/Plasma | 04/12/2019 | Custom solution/shipped | |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/11/2019 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/11/2019 | Custom solution/shipped | |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/01/2019 | Repaired/shipped | |
GetSpares | CESP-0002 2-VC-42102 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 03/28/2019 | Repaired/shipped | |
GetSpares | CESP-0002 2-VC-42102 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 03/28/2019 | Custom solution/shipped | |
GetSpares | 36-0201 54-0219 Prometrix H2 Interface PCB for UV1050/UV1250 | UV1050 Tencor/KLA Inspection | 12/14/2018 | Repaired/shipped | |
GetSpares | 36-0294 Prometrix Turret Servo Driver 54-0294 | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Custom solution/shipped | |
GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
GetSpares | 36-0294 Prometrix Turret Servo Driver 54-0294 | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
GetSpares | VLT 2800 DanFoss drive water pump in chillers | ASML chiller Neslab Chiller | 10/05/2018 | Repaired/shipped | |
GetSpares | EST0220C05WNXE1 SMC Smart Terminal | INR-497-001B SMC Water Chiller | 09/10/2018 | Repaired/shipped | |
GetSpares | PS500 2-39-55593 DNS Battery backed power supply | 80B DNS Photolithograpy | 07/15/2018 | Repaired/shipped | |
GetSpares | EEBH-0011X1 DNS heater control bake unit | 80B DNS Photolithograpy | 06/28/2018 | Repaired/shipped | |
GetSpares | 780-14091-000 KLA CD Sem Column Aligner | 8100 8100XP 8100XPR 8250 8300 8450 KLA SEM | 06/05/2018 | Custom solution/shipped | |
GetSpares | VLT 2800 DanFoss drive water pump in chillers | ASML chiller Neslab Chiller | 05/23/2018 | Custom solution/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB | RS55 Prometrix/KLA Wafer Resistivity | 02/04/2016 | Repaired/shipped |
Recent Board Failures in a 6″/8″ Semiconductor Fab
GetSpares
INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
01/04/2019
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Custom solution/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
For Sale/ Stock
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped
GetSpares
2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
12/04/2018
Repaired/shipped
GetSpares
Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
01/09/2019
Repaired/shipped
GetSpares
2-39-51930 2-39-61074 UT3-F1AE /DSS1-A
DNS
LCD Gold Version
SK200
DNS
Photolithograpy
12/21/2018
Custom solution/shipped
GetSpares
2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
12/21/2018
Custom solution/shipped
GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Custom solution/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped
GetSpares
INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
11/27/2018
Repaired/shipped
GetSpares
AG09
Hamamatsu
50V power supply for HgXe light.
80B
DNS
Photolithograpy
11/13/2018
Repaired/shipped
GetSpares
54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
12/14/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped
GetSpares
EESA-001 AU3575N233 2-39-48133
DNS
servo amp
80B
DNS
Photolithograpy
12/08/2018
Repaired/shipped
GetSpares
16498-01
Gasonics
Display Driver
L3510
Novellus/Gasonics
RIE/Plasma
11/27/2018
Repaired/shipped
GetSpares
2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
11/28/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
10/18/2018
For Sale/ Stock
GetSpares
2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
11/02/2018
Repaired/shipped
GetSpares
L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
10/04/2018
Repaired/shipped
GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
11/13/2018
Repaired/shipped
GetSpares
EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/16/2018
Repaired/shipped
GetSpares
EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/16/2018
Repaired/shipped
GetSpares
EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
10/04/2018
Repaired/shipped
GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
10/15/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
10/12/2018
Repaired/shipped
GetSpares
2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/20/2018
Repaired/shipped
GetSpares
EEYC-0011 2-VC-20626
DNS
20 slot – Cage for all the slave cards in front of track
80B
DNS
Photolithograpy
08/15/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
09/24/2018
Custom solution/shipped
GetSpares
2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
09/13/2018
Repaired/shipped
GetSpares
EESC-0012 2-VC-19115 Spin Slave
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
09/12/2018
Repaired/shipped
GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
09/05/2018
Repaired/shipped
GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
09/05/2018
Repaired/shipped
GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
05/15/2018
Repaired/shipped
GetSpares
BU504XII 2-XZ-10840
OMRON
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018
Repaired/shipped
GetSpares
001-4130-03
Brooks
Brooks ACE VCE Controller
LAM and others
Brooks
Robots
05/23/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/17/2018
Repaired/shipped
GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
08/09/2018
Repaired/shipped
GetSpares
EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
08/21/2018
Repaired/shipped
GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
08/09/2018
Repaired/shipped
More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/06/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
07/13/2018 | Repaired/shipped |
GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
08/01/2018 | Custom solution/shipped |
GetSpares | 36-0287 54-0287 RevAG Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
08/01/2018 | For Sale/ Stock |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/01/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/24/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/24/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/19/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
07/13/2018 | Repaired/shipped |
GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
07/02/2018 | Repaired/shipped |
GetSpares | BU504XII 2-XZ-10840 OMRON Battery backed power supply |
80B DNS Photolithograpy |
07/15/2018 | Repaired/shipped |
GetSpares | PS500 2-39-55593 DNS Battery backed power supply |
80B DNS Photolithograpy |
07/15/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/21/2018 | Repaired/shipped |
GetSpares | L6599-01 Hamamatsu L6599-01 Lamp House for EEW |
SK200 DNS Photolithograpy |
07/11/2018 | Repaired/shipped |
GetSpares | EEBH-0011X1 DNS heater control bake unit |
80B DNS Photolithograpy |
06/28/2018 | Repaired/shipped |
GetSpares | EEBH-0011 DNS heater control bake unit |
80B DNS Photolithograpy |
06/19/2018 | Repaired/shipped |
GetSpares | 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit |
80B DNS Photolithograpy |
09/06/2017 | Repaired/shipped |
GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | 54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB |
RS35 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | EEYC-001 DNS Cage for all the slave cards in front of track |
80B DNS Photolithograpy |
07/02/2018 | Custom solution/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/02/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/13/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/13/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/21/2018 | Repaired/shipped |
GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
06/19/2018 | Repaired/shipped |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
GetSpares | 36-0325 Prometrix controller that slides in from right horizontally. |
RS75 Prometrix/KLA Wafer Resistivity |
05/04/2018 | Repaired/shipped |
GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
06/06/2018 | Repaired/shipped |
GetSpares | 95-3155 Gasonics Cluster Misc Controller With AC power detect J6 |
PEP3510 Novellus/Gasonics RIE/Plasma |
07/28/2016 | Repaired/shipped |
GetSpares | 567-5101 HV Supply Hitachi Hv supply for electron gun |
Unknown CD SEM Hitachi SEM |
05/22/2018 | For Sale/ Stock |
GetSpares | LSMUT_TF Comvolt Just an HV timer. |
SMBUS_ASMU1 Comvolt lab tester |
05/15/2018 | Custom solution/shipped |
GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
06/01/2018 | Repaired/shipped |
GetSpares | 001-4130-03 Brooks Brooks ACE VCE Controller |
LAM and others Brooks Robots |
05/23/2018 | Repaired/shipped |
GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/23/2018 | For Sale/ Stock |
GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/23/2018 | Repaired/shipped |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped |
GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/21/2018 | For Sale/ Stock |
GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
05/15/2018 | Repaired/shipped |
GetSpares | 810-025368-001 Lam Research Simple relay board. located in top left of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
10/21/2015 | For Sale/ Stock |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/27/2018 | For Sale/ Stock |
GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
03/27/2018 | Repaired/shipped |
GetSpares | CESB-2012 DNS Spin Board |
80A DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
04/14/2018 | Repaired/shipped |
GetSpares | EEJA-001A DNS 6-axis controller based on the note on this unit. |
80B DNS Photolithograpy |
04/06/2018 | Repaired/shipped |
GetSpares | EESA-001 AU3575N223 DNS servo amp |
80B DNS Photolithograpy |
10/25/2017 | For Sale/ Stock |
GetSpares | D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 |
SK200 DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
GetSpares | D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 |
SK200 DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
GetSpares | 95-0541Misc Controller Gasonics |
PEP3510 Novellus/Gasonics RIE/Plasma |
10/27/2016 | Repaired/shipped |
GetSpares | 1-139-023 IDI Communications Card |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
GetSpares | 1-139-022 IDI Pump Controller |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Custom solution/shipped |
GetSpares | 810-025370—1 Lam Research Large rectangular board that controls and displays status leds |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
GetSpares | 810-025369-002 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
GetSpares | 810-025369-002 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
04/10/2018 | Repaired/shipped |
GetSpares | 375039 Tencor Data Processing Board |
AIT2 KLA Inspection |
04/05/2018 | Custom solution/shipped |
GetSpares | 810-025369-001 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/03/2018 | Repaired/shipped |
GetSpares | 810-025370—1 Lam Research Large rectangular board that controls and displays status leds |
Lam-TCU_2080 Lam Chiller |
04/03/2018 | Repaired/shipped |
GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
04/03/2018 | Repaired/shipped |
GetSpares | Super Vexta UDX5107 Vexta 5 axis driver |
80A DNS Photolithograpy |
03/29/2018 | Repaired/shipped |
GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
03/22/2018 | Repaired/shipped |
GetSpares | 3510N45E10 Tamagawa Tamagawa Motor AC servo |
80B DNS Photolithograpy |
03/19/2018 | Repaired/shipped |
GetSpares | 373583 Tencor ANALOG BOARD |
AIT2 KLA Inspection |
06/22/2016 | Repaired/shipped |
GetSpares | SQV175-1433-2 Prometrix Power Supply |
6220 KLA Inspection |
02/28/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/29/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/29/2018 | Repaired/shipped |
GetSpares | 0100-02016 0100-20066 AMAT Analog Sync Detect AMAT |
P5000 Applied Materials AMAT RIE/Plasma |
01/04/2018 | For Sale/ Stock |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
02/15/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
02/15/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
02/15/2018 | Repaired/shipped |
More Parts from Available from GetSpares
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
GetSpares | MR-J10A-S07 | 80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
GetSpares | 95-3155 Gasonics Cluster Misc Controller With AC power detect J6 |
PEP3510 Novellus/Gasonics RIE/Plasma |
08/04/2016 | Repaired/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
02/04/2018 | Repaired/shipped | |
GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
02/01/2018 | Repaired/shipped | |
GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
01/04/2018 | For Sale/ Stock | |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
02/04/2016 | Repaired/shipped | |
GetSpares | 000496 Neslab/JR Banks Measures temperature and detects water flow from reed valve. |
Neslab model Neslab Chiller |
01/16/2018 | Repaired/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
12/12/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
GetSpares | GEIC-002 BP-0015C DNS Interface card in back of unit for interface unit |
SK200 DNS Photolithograpy |
01/16/2018 | For Sale/ Stock | |
GetSpares | EEDC-0011 2-VC-19089 DNS Indexer card for 80B |
80B DNS Photolithograpy |
01/16/2018 | Repaired/shipped | |
GetSpares | EEDC-0011 2-VC-19089 DNS Indexer card for 80B |
80B DNS Photolithograpy |
01/16/2018 | Repaired/shipped | |
GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
05/09/2016 | Repaired/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/04/2018 | Repaired/shipped | |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
01/04/2018 | Repaired/shipped | |
GetSpares | 15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
12/17/2017 | Repaired/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
12/17/2017 | Repaired/shipped | |
GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
12/17/2017 | Repaired/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
12/12/2017 | Repaired/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
12/18/2017 | Repaired/shipped | |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
12/13/2017 | Repaired/shipped | |
GetSpares | 54-0317 REVA 36-0317 KLA PCB Measurement Control Board 54-0317 REVA. 36-0317. This has the J14IPDA connector and has the U11 and U16 PALS |
UV1250-UV1280 Tencor/KLA Inspection |
11/28/2017 | Repaired/shipped | |
GetSpares | INR-497-P2393 A19393-01 SMC 2 channel controller board |
INR-497-001B SMC Water Chiller |
10/11/2017 | Repaired/shipped | |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
11/22/2017 | Repaired/shipped | |
GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
09/26/2017 | Repaired/shipped | |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
11/22/2017 | Repaired/shipped | |
GetSpares | T0351/10-1006 Tectrol Power Supply |
6200 KLA Inspection |
07/19/2017 | Repaired/shipped | |
GetSpares | AU6351N60 2-39-57597 DNS servo amp |
80B Scrubber DNS Photolithograpy |
10/22/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/11/2016 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/21/2017 | Custom solution/shipped |
Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts
More successful solutions from GetSpares
GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
11/08/2017 | Repaired/shipped | |
GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
11/06/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
10/23/2017 | Repaired/shipped | |
GetSpares | T0351/10-1006 Tectrol Power Supply |
6200 KLA Inspection |
07/19/2017 | For Sale/ Stock | |
GetSpares | GLC352-CEF Emerson Power Supply |
Not Specified Not Specified Not Specified |
10/30/2017 | Repaired/shipped | |
GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
10/06/2017 | Repaired/shipped | |
GetSpares | EESA-001 AU3575N233 2-39-48133 DNS servo amp |
80B DNS Photolithograpy |
10/25/2017 | Repaired/shipped | |
GetSpares | AU6351N60 2-39-57597 DNS servo amp |
80B Scrubber DNS Photolithograpy |
10/22/2017 | For Sale/ Stock | |
GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
10/23/2017 | Repaired/shipped | |
GetSpares | EEUE-001 DNS EEW Control Unit |
80A DNS Photolithograpy |
10/03/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
09/20/2017 | For Sale/ Stock | |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
10/12/2017 | Repaired/shipped | |
GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
10/06/2017 | Repaired/shipped | |
GetSpares | INR-497-P2393 A19393-01 SMC 2 channel controller board |
INR-497-001B SMC Water Chiller |
10/11/2017 | Custom solution/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
11/10/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
10/07/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
10/05/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
GetSpares | 15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
09/22/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/11/2016 | Repaired/shipped | |
GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
09/26/2017 | Repaired/shipped | |
GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
09/22/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
GetSpares | 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit |
80B DNS Photolithograpy |
09/06/2017 | Repaired/shipped | |
GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
10/21/2015 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
09/08/2017 | For Sale/ Stock | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/24/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
09/18/2014 | Repaired/shipped | |
GetSpares | 2-39-45431 DNS FRD-4 |
80B DNS Photolithograpy |
08/09/2017 | Repaired/shipped | |
GetSpares | 2-39-45431 DNS FRD-4 |
80B DNS Photolithograpy |
08/09/2017 | Repaired/shipped | |
GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
07/21/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
07/31/2017 | Custom solution/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
06/22/2016 | Repaired/shipped | |
GetSpares | 2-VC-16217-1EEBH-0021 DNS heater control bake unit |
80B DNS Photolithograpy |
07/17/2017 | Repaired/shipped | |
GetSpares | CMX15 90X0054 KLA LCD Monitor |
AIT2 KLA Inspection |
07/17/2017 | Repaired/shipped | |
GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
01/19/2015 | Repaired/shipped | |
GetSpares | CMX15 90X0054 KLA LCD Monitor |
AIT2 KLA Inspection |
07/06/2017 | Repaired/shipped | |
GetSpares | 903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
07/06/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
07/11/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
07/11/2017 | Repaired/shipped | |
GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
06/27/2017 | Repaired/shipped | |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
06/23/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
06/23/2017 | Custom solution/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
06/23/2017 | Repaired/shipped | |
GetSpares | CESP-0002 2-VC-42102 DNS maintenance panel with SCN5 |
80B DNS Photolithograpy |
02/03/2017 | Custom solution/shipped | |
GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
04/02/2017 | Repaired/shipped | |
GetSpares | CESB-2011 2-VC-19075 DNS Spin control board. Station Controller |
60A DNS Photolithograpy |
06/06/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
06/12/2017 | Repaired/shipped | |
GetSpares | CMX15 90X0054 KLA LCD Monitor |
AIT2 KLA Inspection |
06/22/2016 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
06/12/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
06/12/2017 | Repaired/shipped | |
GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
06/06/2017 | Repaired/shipped | |
GetSpares | 54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB |
RS35 Prometrix/KLA Wafer Resistivity |
06/06/2017 | For Sale/ Stock | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
04/28/2017 | Repaired/shipped | |
GetSpares | 54-0311 Prometrix UV1250/ 1050 optical array PDA |
UV1050 Tencor/KLA Inspection |
01/03/2017 | Repaired/shipped | |
GetSpares | 15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
06/06/2017 | Repaired/shipped | |
GetSpares | 15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
05/30/2017 | Repaired/shipped | |
GetSpares | CESP-001A F-VC-40833 DNS maintenance panel without SCN5 |
80B DNS Photolithograpy |
04/11/2017 | For Sale/ Stock | |
GetSpares | 2-VC-16217-1EEBH-0021 DNS heater control bake unit |
80B DNS Photolithograpy |
05/24/2017 | Repaired/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
02/22/2017 | Repaired/shipped | |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
02/22/2017 | Repaired/shipped | |
GetSpares | 54-0317 36-0317 KLA PCB Measurement Control Board 54-0317 36-0317 |
UV1250-UV1280 Tencor/KLA Inspection |
03/29/2017 | Repaired/shipped | |
GetSpares | L6599-01 Hamamatsu L6599-01 Lamp House for EEW |
SK200 DNS Photolithograpy |
05/04/2017 | Repaired/shipped | |
GetSpares | 36-0287 Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
05/15/2017 | Custom solution/shipped | |
GetSpares | 36-0287 Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
05/15/2017 | Repaired/shipped | |
GetSpares | 36-0287 Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
05/08/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
05/09/2017 | Repaired/shipped | |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
02/22/2017 | Repaired/shipped | |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
02/22/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/19/2017 | Repaired/shipped | |
GetSpares | 710-693221-000 KLA Matrox Corona Rev 6 8M Confg AIT2, Slot |
8100 8100XP 8100XPR 8250 8300 8450 KLA SEM |
04/17/2017 | Repaired/shipped | |
GetSpares | 356166 Matrox Corona KLA U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18 |
AIT2 KLA Inspection |
04/17/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
04/24/2017 | Repaired/shipped | |
GetSpares | CEMP-0016 EEMP-0021X3 DNS Main Display Panel |
80A DNS Photolithograpy |
04/18/2017 | Repaired/shipped | |
GetSpares | 54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB |
RS35 Prometrix/KLA Wafer Resistivity |
04/19/2017 | Custom solution/shipped | |
GetSpares | 903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
04/03/2017 | Repaired/shipped | |
GetSpares | 55079-763288 Prometrix PCA-DUAL Stepper Driver |
RS55 Prometrix/KLA Wafer Resistivity |
03/29/2017 | Repaired/shipped | |
GetSpares | 36-0201 Prometrix H2 Interface PCB for UV1050/UV1250 |
UV1050 Tencor/KLA Inspection |
03/29/2017 | Custom solution/shipped | |
GetSpares | 36-0287 Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
03/29/2017 | Repaired/shipped | |
GetSpares | 2-VC-19090 EERC-0012 DNS Transport Slave Board Repair |
80B DNS Photolithograpy |
04/03/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
03/13/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
04/04/2017 | Repaired/shipped | |
GetSpares | L6599-01 Hamamatsu L6599-01 Lamp House for EEW |
SK200 DNS Photolithograpy |
04/02/2017 | Custom solution/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
03/10/2017 | Repaired/shipped | |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
03/13/2017 | Custom solution/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
02/24/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
02/24/2017 | Repaired/shipped | |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
03/07/2017 | Repaired/shipped | |
GetSpares | CERB-1016 2-VC-15254-1 DNS Transport Station Controller |
60A DNS Photolithograpy |
02/04/2017 | Repaired/shipped | |
GetSpares | 2114B-30SLQST Cyonics CYONICS-UNIPHASE |
6220 KLA Inspection |
01/09/2017 | Repaired/shipped | |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
02/24/2017 | Repaired/shipped | |
GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
02/04/2017 | Repaired/shipped |
KLA/Prometrix RS-35 36-0004 / 54-0005 Current Source With Beckman 7581
Compliance Errors and Measuement Errors on Your Prometrix OmniMap? Call https://www.getspares.com/
Custom Solutions Available!
KLA/Prometrix RS-35 36-0004 Current Source With Beckman
KLA/Prometrix RS-35 54-0005 Current Source With Beckman
KLA/Prometrix RS-55 54-0005 / 54-0005 Current Source With Beckman
KLA/Prometrix Versaprobe VP10e 54-0005 / 54-0005 Current Source With Beckman
Prometrix/KLA Omnimap RS-35, RS55 Calibration Procedure 54-0014 36-0014 PCB DVM 36-0004 Current Source PCB 54-0005 or 54-0389)
____________ Testing the Analog Section ____________
CAUTION Call GetSpares before attempting any of the following as it might invalidate your warranty.
The Purpose of these instructions is to determine if a PCA board in the analog se‘sfi’zezd to tester has failed. The following section includes an overview of the tools you l ection of perform the test, as well as an overview of the PCA boards thatcompnse the ana 08 5 the tester.
Testing the analog section basically consists of the following:
Testing the Power Supply board.
Testing the Current Supply board.
Testing the Relay and Voltmeter boards.
Testing each board in the order just described enables you to determine of a particular board has failed.
If you are not familiar with Term4 software, refer to Using Term4 before proceeding with the following procedures.
Tools Required to Test the Analog Section a
You will need the following tools to test the analog section. b ‘1‘ 0
Fast response multimeter with 5 or 6 digit display (response time of 250 ms). 0
Clip—on type leads for multimeter. 0 p
5/32 allen wrench (ball type driver). 0
2.79 ohms/ sq. resistor network (part number 50—0009). 0
Term4 or MPTerm software. (Refer to Using Term4 if you are unfamiliar with Term4 software.) . . ‘
Important Remove the probe head from the tester before proceeding with these tests.
PCA Boards That Comprise the Analog Section
Follow this procedure to locate the PCA boards of the testers analog Section
1. Remove the right-side panel from tho tester to allow arrows to the Analog PCA’s.
2. Locate and Identify the four Analog PCAs in the tester. When looking at the card cage from the left side of the tester. The PCAs that comprise the analog section are located at the extreme left. The follwoing describes and gives the location of each board.
The Analog Relay PCA board is the far left position of the card cage. The probe head cable and two jumper boards are connected to the Analog Relay PCA. During measurements, this board sends currentl to and from the probe head. 0
The Analog Voltmeter PCA board is to tho right of the Analog Relay PCA. The Analog Voltmotor PCA shares the short four-pin jumper board with the Relay PCA. The Analog Voltmotor PCA makes the mweasurements, and converts analog to digital.
The Analog Current Supply PCA board to to tho right of the Analog Voltmotor PCA. The Analog Voltmetor PCA has a short five-pin jumper, and shares the long four-pln jumper with the Relay PCA. This board produces the current that is forced to the probe head during measuremnts.
Thu Analog Power Supply PCA board in to the right of tho Analog Current Supply PCA. The Analog Power Supply PCA shares the short five-pln jumpor with tho Analog Current Supply PCA. The Analog Power Supply may or may not (depending on tho age of your system) may have a two-pin connector at the top. Thatconnector connects to a battery which in used during measurements whoro the selected current is 20.0 mA or less
WARNING if your system has an Analog Power Supply with a battery connectormmrclor. NEVER connect or disconnect any of the jumper boards or any leads to the multimeter without turning off the tester and disconnecting the battery from the Analog Power Supply PCA.
If your system has an Analog Power Supply PCA without a batter connector , NEVER connect or disocnnect any of the jumber board or leads to the multimeter without turning off the tester.
Testing the Power Supply Board es . assum
The following procedures describe testing the Power Supply board. This procedure assumes you have already removed the right side panel of the tester. (Refer to .: Replacing the Left and Right Side Panels” in Chapter 4.)
To test the Power Supply board:
1. Power Off the tester and disconnect the two-pin battery connector (If your system has one) from the Power Supply board.
2. Disconnect the short five-pin connector between the Power Supply board and the Current Supply board.
3. Connect the Negative lead of the multimeter to the bottom pin of the five Pin connector on the Power Supply board.
4. Select VDC on the multimeter and power on the tester.
\— Note Use caution to ensure you do not short between pins when measuring voltages. . A
5. Verify the following voltages are being output from the Power Supply board.
6. Power off the tester. 1
7. Disconnect multimeter from the five pin output connector.
8. Power on the tester and measure the output of the two pin battery output connector to ensure that the output is approximately 13.8 vdc.
9. Measure the voltage from the battery at the connector that plugs into the Power Supply to ensure that it is approximately 13.6 vdc.
10. Power off the tester. ‘ a.
11. Connect the negative lead of the multimeter to the bottom pin of the five pin connector.
12. Connect the two pin battery connector to the Power Supply board.
13. Verify that there are no voltages present at the five pin connector Outputs.
If any of the above reading were incorrect, the Power Supply board is defective. Please contact GetSpares for further instructions. If all of the readings were correct, continue to the next step in this procedure. .
Table 7-10: Pins of the Power Supply PCA Board and their Voltage Outputs
Pin Voltage Output Acceptable Ranges
top pin of five pin output +50 vdc 48—50.00 vdc
next to top pin +20 VDC 18—20.0 vdc
third pin +15 vdc 1 15 +/- 0.25 vdc
second pin —15 vdc 15.00 vdc +/-.025 vdc
bottom pin analog ground .
Testing and Calibrating the Current Supply Board
The following procedure describes testing the Current Supply board. This procedure assumes you have tested the Power Supplyboard, and have determined thatitis functioning prOperly. If you are unfamiliar with Term4 software, read “Proper Format for Entering Commands in Term4.” Otherwise, proceed with the following instructions.
1mPortant The Current Supply is static sensitive. Take precautionary measures to prevent Static Electrical Discharges. Remove the probe head before proceeding with the calibration instructions. Use ground straps!
To test the Current Supply board:
1. Power off the tester.
2. Remove the four—pin and five-pin jumpers to the Current Supply board.
3. Remove the Current Supply board from the tester. Remove the tape covering the threes holes on the side of the board’s protective covering. These holes enable . you to access the board’s test point and potentiometers without removing the protective covering. Figure 7-23 shows the holes on the side of the board’s protective covering and the test point and pots accessible through each hole. Four-Pin _ Connector ‘ Gain Potentiometer Test Point Zero Offset Potentiometer Five-Pin Connector . Side View of the Current Supply Board Figure 7-23: locatitm of the Current Supply Board’s Test Points and Potentiometers
4. Connect the positive lead of the multimeter to the test point shown in Figure 7-24. –
5. Reinstall the Current Supply into the tester. _
6. Connect the five pin jumper board.
7_ Connect the negative lead of the multimeter to the bottom pin of the five pin jumper (analog ground).
8. Power on the tester. Enable Term4 software by doing the following:
– Power on the computer.
– The StatTrax software loads and displays the Introduchon screen
– From the Introduction screen, press the Shift tilde ( % simultaneously to enter the operating system (M5— Dos .
The C:> prompt appears.
— Type TERM4 and press Enter.
– The computer displays the Term4 Command screen.
— Press F1 to scroll through the various system types until RS550 is displayed in the lower left comer of the monitor.
— Press F3 to select TESTER.
— Enter the command RST and press RETURN. Verify that the tester resets and that the symbol ”t” is displayed on the monitor.
9. Type STI_0000_0000 and press RETURN.
10. Ensure the multimeter reads 0.0000 vdc 0.100 mvdc. If value is out of spec, adjust the Zero Offset potentiometer (see Figure 7—24).
11. Type STI_0000_4000 and press RETURN.
12. Ensure the multimeter reads 5.0000 vdc 0.0005 vdc. If value is out of spec. adjust the Gain potentiometer (see Figure 7-24).
Repeat steps 9 through 12 until values are correct.
13. Remove the DVM leads from the Current Supply board.
14. Select Amp DC. on the multimeter.
15. Selects range of 200 mA.
16. Connect the negative lead of the multimeter to the pin (next to the top) of the Current Supply board’s four-pin connector.
17. Connect the positive lead of the multimeter to the pin (next to the bottom) of the Current Supply board’s four-pin connector.
Note Make sure that the test leads are connected to the two_inside pins of the four-pin connector.
Note Use a meter capable of measurements at less than 100 nano—amps for the following steps, Failure to do so will void any claims as to the accuracy of the system.
18. Use this procedure to complete the calibration procedure: ‘
a. Type in a Term4’command listed in Table 7-11 (in sequence).
b. Press Enter. The system should display a ”i” to verify the command you entered. ; c. Type ION, and then press Enter. The system should display a ”I.”
d. Check that the Ammeter displays the expected current level (refer . to Table 7-11 for the expected current level for the Term4 command.
e. ‘Iype 10F, and then press Enter.
Do this for each command listed in Table 7-11. ‘
19. Power off the tester.
20. Disconnect the Ammeter leads from the Current Supply board.
If any of the above readings were incorrect, the Current Supply board is defective or needs to be repaired. If all of the readings were correct, continue to ”Testing the Relay Board.” Table 7-11:
Term4 Commands and their Expected Current Levels Term4 Format Command Expected Current STI_0004_4000 200.00 mA +/-2.0 mA
STI_0003_4000 20.00 mA +/-0.05 mA
STI_0002_4000 2.000 mA +/-0.002 mA
STI_0001_4000 0.200 mA +/-0.002 mA
STI__0000_4000 0.020 mA i0.0005 mA
STI_0000_0000 0.000 mA 10.0005 mA
Testing the Relay Board
The following procedure describes testing the Relay board. This procedure-assumes you have tested the Power Supply board, and have determined that it is functioning prOperly.
1. Connect the long, four-pin jumper between the Current Supply and the Relay PCAs. f Connect the short, four-pin jumper between the Relay and Voltmeter PCA. j
2. Connect the negative lead of the multimeter to the bottom pin of the Relay PCA’s four-pin connector. _
3. Connect the positive lead of the multimeter to the pin (next to the top pin) of the Relay PCA’s lower four-pin connector.
4. Select the VDC setting on the multimeter. ‘ ‘ Select the mV range. (You willbemeasuring approximately 10 mV during these ‘ next few steps.) ,
5. Power On the tester. .. V
6. Install the 2.79 ohm/ sq. resistor network (provided with each system) in the , . . probe head connector. _ f ‘
7. Type STI__0003_2 400 and press RETURN. ‘ ‘
8. Use Table 7-12 to help you verify the voltages at a single—step rate:
If any of the above voltage readings are incorrect, the Relay board is defective. Please contact Prometrix Field Service for further instructions. If the voltage readings are correct, test and ‘ calibrate the Analog Voltmeter PCA board.
Table 7-12: Verifying Voltages at a Single-Step Rate W
Command Voltage
Type ION No voltage
Type IP No voltage
Type STR_3 +7.5 mV ’
Type IN_ —7.5 mV
Type IP_ No voltage
Type STR_0 +6.0 mV ‘
Iype IN_ —6.0 mV .
Testing and Calibrating the Analog Voltmeter PCA g
1. ‘Itrm power to the tester off.
2. Locate the Analog Voltmeter circuit board.
3. Remove all jumpers to the board.
4. Remove the board from the tester.
5. Take the top can off. Jumper the input and ground.
6. Connect the negative test lead of the DVM to the jumper-
7. Connect the positive testlead of the DVM to the test pin on the circuit board. The test pin is located next to pin 37 of the large IC. If no test pin rs available, use pin 32 of the large IC. Set the DVM to Volts.
8. Install the extender board into the tester. Re—install the circuit board onto the extender board and turn the power on to the system. The jumpers to other crrcult boards do not have to be installed.
9. Verify that the voltage reading is 2.0000 vdc +/- 0.0005 vdc. If the reading is off, adjust the voltage by turning the bottom trimpot.
Note Ifyou are unabletoobtain thecorrect voltage, thecircuit board is defectioeand must bereturned to Prometrixfar repair.
10. Power off the tester and remove the positive test lead from the circuit board.
11. Locate pin 9 on the IC PGAZOOBG (by BB). This IC is located next to the two trim 1 pots (Figure 7-25). A long thin probe electrode will be required to make an – in-circuit measurement on this pin. .
12. Re-install the board into the tester and turn the system power on. 5 The Zero adjust is a difficult measurement to‘ make. With the thin probe lead . resting on pin 9 of the PGAZOOBG IC, adjust the top trimpot to get a reading of 0.0000 vdc +/- 0.0005 vdc.
13. Power the tester off.
14. Remove the jumper from the circuit board and put the can back on the board. Re—install the board, connect the jumpers, then turn the system power on.
15. Connect the battery connector. ._ p
16. Exit Term4 and return to the StatTrax Introduction screen by typing PMX and i then pressing Enter. You are now finished calibrating the Voltmetei’ PCA board. Next, you will verify system calibration.
17. After the screen displays the Introduction screen, begin collecting normal data using the 2.79 ohms/ sq. resistor network and the Manual current feature of the . system. :
18. Select a current of 12.0 mA. As the sample current is being taken, ensure that the . Va reading is approximately 7.5 mV, and that the Vb reading is approximately 6.0 mV.
If you have any other questions or need parts for your SemiCon equipment. Remember, GetSpares has load of parts or can fix them for you.