GetSpares for Semiconductor Electronics Parts

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GetSpares INR-244-402-GSRPR aka 2-39-45751 Thermo Controller DNS 80B 03/13/2017

Typical INR_244-402

GetSpares INR-244-402-GSRPR aka 2-39-45751 Thermo Controller DNS 80B 03/13/2017
GetSpares 600400-01 Track Interface PDB PD 80072E SVG Track 03/10/2017
GetSpares 2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 02/24/2017

Typical SK200 LCD UT3-F1AE

GetSpares 2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 02/24/2017
GetSpares servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 02/24/2017
GetSpares 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) KLA/Prometrix RS-35 02/22/2017

Prometrix_RS35/RS55_CurrentSource With Beckman 36-0004 (Alternate 54-0005 or 54-0389)

GetSpares 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) KLA/Prometrix RS-35 02/22/2017
GetSpares 36-0004/54-0006 PCA ART Relay Board W/Exchange KLA/Prometrix RS-35 02/22/2017
GetSpares 36-0004/54-0006 PCA ART Relay Board W/Exchange KLA/Prometrix RS-35 02/22/2017
GetSpares A90-005-01-GSRPR A90-005-002 Gasonics Aura1000 02/08/2017
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 02/06/2017
GetSpares CERB-1016 2-VC-15254-1 Transport Station Controller DNS 80A 02/04/2017
GetSpares CERB-1016 2-VC-15254-1 Transport Station Controller DNS 80A 02/04/2017
GetSpares CERB-1016 2-VC-15254-1 Transport Station Controller DNS 80A 02/04/2017
GetSpares EEW Hamamatsu L6299-12 DNS 80B / SK200 02/04/2017
GetSpares servo amp 2-VC-27621 AU6354N40 and GESA-001 DNS SK-200 02/04/2017
GetSpares CEDB-1013 2-VC-15252 Indexer Board DNS 80A 02/04/2017
GetSpares Argon 50 watt laser class III KLA 6220 6420 02/01/2017
GetSpares 16495-01-GSRPR Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 01/13/2017
GetSpares 2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 01/09/2017
GetSpares 0190-76050-GSRPR R Video PCB Applied Materials P5000 / P5200 01/05/2017
GetSpares DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 01/03/2017
GetSpares 0100-02016-GSRPR Analog Sync Detect Applied Materials 12/16/2016
GetSpares servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 12/15/2016
GetSpares servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 12/12/2016
GetSpares Tamagawa 3510N45E10 Motor AC servo DNS 11/21/2016
GetSpares 95-0517 PCB Motherboard Intel 486DX CPU exchange program Gasonics/Novellus L_3500 L_3510 11/18/2016
GetSpares 0100-20066-GSRPR Analog Sync Detect Applied Materials 11/18/2016
GetSpares Brooks ACE 001-4130-03 VCE Controller No MISC-IO LAM and others 11/02/2016
GetSpares 95-0541 MISC mini-controller Novellus / Gasonics PEP3510 10/27/2016
GetSpares servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 10/13/2016
GetSpares CT2939-000009-12-GSRPR Power Supply Upstair TEL ACT 8 10/12/2016
GetSpares Thermo-Con Power Supply INR-244-216 TEL ACT 8 10/12/2016
GetSpares DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 10/11/2016
GetSpares FRD-4 2-39-45431-GSRPR DNS 80B 09/30/2016
GetSpares FRD-4 2-39-45431-GSRPR DNS 80B 09/30/2016
GetSpares servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 09/30/2016
GetSpares Current Source PCB (Alternate 54-0005 or 54-0389) KLA/Prometrix RS55/75 09/27/2016
GetSpares 54-0014 36-0014 PCB DVM CARD KLA/Prometrix RS55/RS75 09/27/2016
GetSpares 36-0042 Analog I/O Board 54-0252 KLA/Prometrix RS-55 09/27/2016
GetSpares 16495-01E-GSRPR Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 09/01/2016
GetSpares servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 08/29/2016
GetSpares Hamamatsu L6599-01 Lamp House for EEW DNS Lamphouse-EEW 80B UV-SPOT light source 08/19/2016
GetSpares DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 08/19/2016
GetSpares FRD-4 2-39-45431-GSRPR DNS 80B 08/15/2016
GetSpares 3L135-GSRPR DNS SK-200 08/15/2016
GetSpares 95-3155 Cluster Misc Controller Novellus / Gasonics PEP3510 08/04/2016
GetSpares 95-0537 gas box mini controller 95-2977 Novellus / Gasonics PEP3510 08/01/2016
GetSpares 95-3155 Cluster Misc Controller Novellus / Gasonics PEP3510 07/28/2016
GetSpares 2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 07/26/2016
GetSpares CEDB-1013 2-VC-15252 Indexer Board DNS 80A 07/26/2016
GetSpares 14-007009-GSRPR Auto FOCUS Driver Board KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 07/08/2016
GetSpares EEYC-0011 EEW station controller DNS 80B 07/08/2016
GetSpares 16495-01-REV.7.4 Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 07/06/2016
GetSpares 14-010064-GSRPR Analog Processor Board Optiprobe 2600 W/Exchange Thermawave 07/06/2016
GetSpares EEUE-001X3 DNS EEW Control Unit 07/05/2016
GetSpares LCD Monitor 90X0054 KLA 06/22/2016
GetSpares 373583-GSRPR ANALOG BOARD AIT 2 KLA 06/22/2016
GetSpares INR-244-402-GSRPR aka 2-39-45751 Thermo Controller DNS 80B 06/22/2016
GetSpares AG09 Lamp Power Unit Hamamatsu L6299 06/15/2016
GetSpares UFP-710-TA422 LCD Display Canon i5 06/15/2016
GetSpares Power supply from EEUE-001B unit DNS 80B 06/15/2016
GetSpares AG09 Lamp Power Unit Hamamatsu L6299 06/15/2016
GetSpares 710-058894-00 FA Board KLA Starlight SL3XX series 06/14/2016
GetSpares GetSpares 710-058894-00 FA Board KLA Starlight SL3XX series 06/14/2016
2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 06/14/2016
EEUD-0013 DNS EEW Power Supply 06/14/2016
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 06/10/2016
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 06/09/2016
EESA-001 and AU3575N223 DNS 80B 06/09/2016
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 06/09/2016
EESA-001 and AU3575N223 DNS 80B 06/09/2016
EEUE-001X3 DNS EEW Control Unit 06/08/2016
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 06/08/2016
EEUE-001B DNS EEW Control Unit 06/08/2016
INR-244-402-GSRPR aka 2-39-45751 Thermo Controller DNS 80B 06/08/2016
DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 06/07/2016
DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 06/07/2016
servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 06/01/2016
FRD-4 2-39-45431-GSRPR DNS 80B 06/01/2016
2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 05/23/2016
FRD-4 2-39-45431-GSRPR DNS 80B 05/17/2016
CEYD-0015 2-VC-13743-GSRPR DNS 60A 05/17/2016
2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 05/15/2016
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 DNS SK-200 05/10/2016
CEDB-1013 2-VC-15252 Indexer Board DNS 80A 05/09/2016
2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 05/06/2016
Brooks ACE 001-4130-03 VCE Controller LAM and others 05/05/2016
95-0517 PCB Motherboard Intel 486DX CPU exchange program Gasonics/Novellus L_3500 L_3510 04/26/2016
FRD-4 2-39-45431-GSRPR DNS 80B 04/26/2016
Hamamatsu L6599-01 Lamp House for EEW DNS 80B 04/25/2016
95-0517 PCB Motherboard Intel 486DX CPU exchange program Gasonics/Novellus L_3500 L_3510 04/21/2016
290432-REV A-GSRPR AOD Scanner AIT 1 KLA 04/19/2016
AG09 Lamp Power Unit Hamamatsu L6299 04/18/2016
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 DNS SK-200 04/18/2016
2-39-51930 2-39-61074 LCD DNS SK-200 04/14/2016
2-39-51930 2-39-61074 LCD DNS SK-200 04/11/2016
IPC51/596 UPIBOC-I INDUSTRIAL PC DNS 80B 04/08/2016
UFP-710-TA422 LCD Display Canon i5 04/08/2016
CEDB-1013 2-VC-15252 Indexer Board DNS 80A 04/01/2016
GEPH-001X3 Track Coater Power Supply DNS SK-200 03/31/2016
IPC51/596 UPIBOC-I INDUSTRIAL PC DNS 80B 03/21/2016
IPC51/293 UPIBOC-I INDUSTRIAL PC DNS 80B 03/17/2016
Brooks ACE 001-4130-03 VCE Controller LAM and others 03/08/2016
Brooks ACE 001-4130-03 VCE Controller LAM and others 03/08/2016
884-98-000-GSRPR PCB -RMX PCB MRC/Eclipse 4 CVD-PVD 03/04/2016
DNS Lamphouse,Hamamatsu L6599-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 02/29/2016
DNS Lamphouse,Hamamatsu L6599-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 02/29/2016
2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) DNS 80B 02/23/2016
EESA-001 and AU3575N223 DNS 80B 02/18/2016
EESA-001 and AU3575N223 DNS 80B 02/18/2016
PCB, ASSY 375420 , 0235098 Beam Pos Control KLA SP1-TB1 02/17/2016
A90-005-01-GSRPR A90-005-002 Gasonics Aura1000 02/12/2016
CEDB-1013 2-VC-15252 Indexer Board DNS 80A 02/11/2016
0190-35765-GSRPR Applied Materials AMAT Centura 02/11/2016
0190-35765-GSRPR Applied Materials AMAT Centura 02/10/2016
A90-005-01-GSRPR A90-005-002 Gasonics Aura1000 02/10/2016
36-0042 Analog Power Supply 54-0057 KLA/Prometrix RS-35 02/04/2016
54-0014 36-0014 PCA-DVM, ART Voltmeter KLA/Prometrix RS-35 02/04/2016
36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) KLA/Prometrix RS-35 02/04/2016
54-0006 PCA ART Relay Board W/Exchange KLA/Prometrix RS-35 02/04/2016
FRD-4 2-39-45431-GSRPR DNS 80B 02/02/2016
493-30-1020-GSRPR HOTPLATE POWER SUPPLY MR-2015 DNS 80B 02/02/2016
FRD-4 2-39-45431-GSRPR DNS 80B 02/02/2016
0090-75014-A-GSRPR Synergy CPU VME SBC (v21) Applied Materials P5000 01/28/2016
FRD-4 2-39-4543-1 DNS 80B 01/27/2016
Driver Motor Box Servo PK CESA-804 DNS 80A 01/19/2016
communication card 1-139-023 IDI M300 01/07/2016
710-058895-00-GSRPR PCB Multi Speed Interface Board KLA Starlight 12/14/2015
BG4-6582-000-GSRPR Canon 12/08/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 12/08/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 12/04/2015
0090-76110-GSRPR Synergy CPU VME SBC Applied Materials V440 (V21) P5000 12/02/2015
0090-76110-A-GSRPR Synergy CPU VME SBC Applied Materials V440 (SV21) P5000 11/24/2015
LTS, TCB, VIDEO Generator 11/19/2015
2-39-51930 2-39-61074 LCD DNS SK-200 11/11/2015
AG09 Lamp Power Unit Hamamatsu L6299 11/07/2015
AG09 Lamp Power Unit Hamamatsu L6299 11/07/2015
90-2590 16495-01B Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 11/06/2015
90-2590 16495-01B Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 11/06/2015
2-39-51930 2-39-61074 LCD DNS SK-200 11/04/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 11/03/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 11/03/2015
14-008473-GSRPR PCB, AUTO FOCUS KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 10/28/2015
410-01900 OBC Board (ECO-1000) 000-883100 050-883100 Nicolet Magna ECO 1000 10/28/2015
2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) DNS 80B 10/23/2015
2-39-51930-2-39-61074 DNS SK-200 10/22/2015
AG09 Hamamatsu L6299 10/21/2015
52-0616 ME Box KLA/Prometrix RS-75 10/21/2015
52-0616 ME Box KLA/Prometrix RS-75 10/21/2015
Leybold UL-500 10/19/2015
780-14091-000GSRPR KLA8100 CD-SEM, 8100XP CD-SEM, 8100XPR CD-SEM, 8250 CD-SEM, 8300 CD-SEM, 8450 CD-SEM 10/19/2015
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 10/07/2015
52-0616 ME Box KLA/Prometrix RS-75 09/21/2015
servo amp AU3575N233 and EESA-001 DNS 80B 09/21/2015
AC-2S06 Adaptor, Throttle Valve Controller (796-006238-002) C1 Tylan General 09/14/2015
Timing Generator, PCB W/Exchange S6420 277266 KLA/Tencor 09/10/2015
2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) DNS 80B 09/08/2015
52-0616 ME Box KLA/Prometrix RS-75 09/08/2015
AG09 Lamp Power Unit Hamamatsu L6299 09/02/2015
AG09 Lamp Power Unit Hamamatsu L6299 09/02/2015
AG09 Lamp Power Unit Hamamatsu L6299 09/02/2015
AG09 Lamp Power Unit Hamamatsu L6299 09/02/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 09/01/2015
Laser sensor KLA Laser 08/24/2015
spin board EESC-0012 DNS 80B 08/20/2015
spin board EESC-0012 DNS 80B 08/20/2015
spin board EESC-0012 DNS 80B 08/20/2015
spin board EESC-0012 DNS 80B 08/20/2015
EEBH-0011X1GSRPR heater control bake unit DNS 80B 08/18/2015
90-2590 Gasonics/Novellus L_3500 L_3510 08/18/2015
spin board EESC-0012 DNS 80B 08/17/2015
02-00149-00 Novellus / Gasonics C1 08/13/2015
95-0538 Cluster Misc Controller Novellus / Gasonics PEP3510 08/12/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 08/12/2015
EEW Hamamatsu L6299-12 PSI-DUV248 DNS 80B 08/11/2015
EEBH-0011X1GSRPR heater control bake unit DNS 80B 08/10/2015
Driver Motor Box, Servo Pack CESA-804 DNS 80A 08/06/2015
50-188N PCB -RMX Control Board MRC/Eclipse 4 CVD-PVD 08/06/2015
Driver Motor Box, Servo Pack CESA-804 DNS 80A 08/06/2015
Driver Motor Box, Servo Pack CESA-804 DNS 80A 08/06/2015
linear encoder 08/04/2015
-VC-34885-GSRPR EEBH-6011 heater control bake unit DNS 80B 08/03/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462 DNS 80B 07/30/2015
2-39-51930-2-39-61074 LCD DNS SK-200 07/27/2015
spin board EESC-0012 DNS 80B 07/24/2015
spin board EESC-0012 DNS 80B 07/24/2015
spin board EESC-0012 DNS 80B 07/24/2015
spin board EESC-0012 DNS 80B 07/24/2015
spin board EESC-0012 DNS 80B 07/24/2015
servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 07/23/2015
servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 07/23/2015
EEMP-0021X3 LCD DISPLAY DNS 60B
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 07/14/2015
2-39-51930 2-39-61074 LCD DNS SK-200 07/10/2015
2-39-51930-2-39-61074 LCD DNS SK-200 07/10/2015
2-39-51930-2-39-61074 LCD DNS SK-200 07/10/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 07/03/2015
EEMP-0021X3 DNS 60B 07/02/2015
SQV175-14XX KLA/Prometrix RS35 06/30/2015
Phasetronics PTR1000 120 KB 69039 Control Assembly Novellus / Gasonics PEP3510 06/29/2015
Computer FC-9821Ka DNS 80A 06/26/2015
903-1598 PCB-EOP/Pressure ControlIPC SPA L_3510 Gasonics 06/24/2015
EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07 DNS 80B 06/24/2015
50-188N PCB -RMX Control Board MRC/Eclipse 4 CVD-PVD 06/24/2015
spin board EESC-0012 DNS 80B 06/23/2015
spin board EESC-0012 DNS 80B 06/23/2015
spin board EESC-0012 DNS 80B 06/23/2015
spin board EESC-0012 DNS 80B 06/23/2015
CEML-0014 DS-LAN BOARD/2-VC-1075-1 IF01068A DNS 80B 06/18/2015
Computer FC-9821Ka DNS 80A 06/18/2015
maintenance panel CESP-002 (Coat) DNS 80B 06/07/2015
spin board EESC-0012 DNS 80B 06/03/2015
spin board EESC-0012 DNS 80B 06/03/2015
spin board EESC-0012 DNS 80B 06/03/2015
spin board EESC-0012 DNS 80B 06/03/2015
FRD-4 2-39-4543-1 DNS 80B 06/02/2015
FRD-4 2-39-4543-1 DNS 80B 06/02/2015
0190-09379 ASSy VME CPU Synergy Upgrade Applied Materials P5000 05/29/2015
Brooks ACE 001-4130-03 VCE Controller LAM and others 05/27/2015
spin board EESC-0012 DNS 80B 05/15/2015
spin board EESC-0012 DNS 80B 05/15/2015
spin board EESC-0012 DNS 80B 05/15/2015
spin board EESC-0012 DNS 80B 05/15/2015
maintenance panel CESP-002 (Coat) DNS 80B 05/12/2015
servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 05/12/2015
maintenance panel CESP-002 (Coat) DNS 80B 05/12/2015
2-39-51930-2-39-61074 SN 001003BB LCD DNS SK-200 05/10/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 05/05/2015
JZ15-30549 LCD DNS SK-200 04/28/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 04/28/2015
2-39-51930-2-39-61074 DNS SK-200 04/28/2015
8axis Controller 2-VC-15485 EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07 DNS 80B 04/28/2015
Little Giant Bl1100 04/28/2015
Unipower Vega 650 Lambda X65223B-ACFN Unknown 04/26/2015
Unipower Vega 650 Lambda X65223B-ACFN 04/24/2015
LK27 Canon I4 04/24/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 04/23/2015
spin board EESC-0012 DNS 80B 04/22/2015
spin board EESC-0012 DNS 80B 04/22/2015
spin board EESC-0012 DNS 80B 04/22/2015
spin board EESC-0012 DNS 80B 04/22/2015
PMT AIT 1 KLA 341444 04/06/2015
PMT AIT 1 KLA 341444 04/06/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 04/03/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 04/01/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 04/01/2015
Brooks ACE 001-4130-03 VCE Controller LAM and others 03/31/2015
spin board EESC-0012 DNS 80B 03/27/2015
Indexer EEDC-0011 DNS 80B 03/27/2015
spin board EESC-0012 DNS 80B 03/27/2015
spin board EESC-0012 DNS 80B 03/27/2015
Indexer EEDC-0011 DNS 80B 03/27/2015
CEBB-1011 Station Controller Board BAKE DNS 60A 03/26/2015
001-3252-133 03/24/2015
001-3252-133 03/24/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 03/20/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 03/20/2015
0010-20498 ASSY +/- 15V POWER SUPPLY GEN RACK DBA-5CENTURA/ENDURA 03/09/2015
95-3154 95-0547 microwave min Novellus / Gasonics PEP3510 02/26/2015
90-2590 L_3510 02/19/2015
90-2590 L_3510 02/19/2015
UDX5107N Vexta 5-Phase Driver Exchange DNS 80B 02/19/2015
SQV175-14XX KLA/Prometrix RS35 02/17/2015
spin board EESC-0012 DNS 80B 02/11/2015
0190-76043 Synergy CPU 68040 Controller Applied Materials V440 02/11/2015
spin board EESC-0012 DNS 80B 02/11/2015
Brooks ACE 001-4130-03 VCE Controller LAM and others 02/10/2015
spin board EESC-0012 80b 02/03/2015
spin board EESC-0012 DNS 80B 02/03/2015
95-0541 MISC mini-controller Novellus / Gasonics PEP3510 01/29/2015
95-0537 gas box mini controller 95-2977 Novellus / Gasonics PEP3510 01/29/2015
0090-75014 Synergy CPU Applied Materials V440 (V21) 01/29/2015
95-3154 95-0547 microwave min Novellus / Gasonics PEP3510 01/29/2015
maintenance panel CESP-0002 (Coater) DNS 80B 01/26/2015
maintenance panel CESP-001A (Coater) DNS 80B 01/26/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 01/26/2015
maintenance panel CESP-0018 (Develop) DNS 80B 01/26/2015
SQV175-14XX KLA/Prometrix RS35 01/22/2015
SQV175-14XX KLA/Prometrix RS35 01/22/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 01/22/2015
36-0042 Analog Power Supply KLA/Prometrix RS-35 01/19/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 01/19/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 01/19/2015
52-0616 ME Box KLA/Prometrix RS-75 01/19/2015
spin board EESC-0012 DNS 80B 01/10/2015
AG09 Lamp Power Unit Hamamatsu L6299 01/06/2015
AG09 Lamp Power Unit Hamamatsu L6299 12/29/2014
AG09 Lamp Power Unit Hamamatsu L6299 12/29/2014
LCD power board ZD75-0524 DNS 80B 12/04/2014
AG09 Lamp Power Unit Hamamatsu L6299 11/18/2014
AG09 Lamp Power Unit Hamamatsu L6299 11/18/2014
spin board EESC-0012 80b 11/06/2014
spin board EESC-0012 80b 10/21/2014
maintenance panel CESP-0017X2 (Coater) DNS 80B 10/15/2014
AG09 Lamp Power Unit Hamamatsu L6299 10/15/2014
spin board EESC-0012 80b 10/10/2014
AG09 Lamp Power Unit Hamamatsu L6299 09/27/2014
AG09 Lamp Power Unit Hamamatsu L6299 09/27/2014
spin board EESC-0012 80b 09/27/2014
54-0005 Current Source KLA/Prometrix RS-35 09/23/2014
36-0004 Current Source KLA/Prometrix RS-35 09/23/2014
spin board EESC-0012 80b 09/23/2014
spin board EESC-0012 80b 09/23/2014
M400 09/18/2014
1-39-028 Pump Controller IDI-400 09/08/2014
maintenance panel CESP-0017X2 (Coater) 80B 09/01/2014
mother board 1-130-020 IDI M300 02/18/2014
mother board 1-130-020 IDI M300 02/18/2014
mother board 1-130-020 IDI M300 02/18/2014
pump controller card 1-139-022 IDI M300 02/18/2014
com card 1-139-023 IDI M300 02/18/2014

Prometrix/KLA RS35/RS55 swapping DVM, Current Source, Analog I/O and PCA Relay board

Please follow this critical step when getting a board from GetSpares.com.  Please make sure you disconnect the battery connection on the analog power supply.    This applies to :

KLA/Prometrix RS35, RS55, RS75, Versaprobe VP10e 54-0005

These models have the following card part numbers:

36-0014 – PCB DVM CARD
54-0014 – PCB DVM CARD
54-0005 – Current Source PCB
54-0389 – Current Source PCB
36-0042 – Analog I/O Board
54-0252 – Analog I/O Board
54-0057 – Analog Power Supply
36-0004 – Current Source PCB
54-0006 – PCA Relay Board

Simply put, the battery connection should be disconnected during install to ensure that any voltage is not force on any pin which should not recieve power when unplugging the cards and the interconnect daughther cards.  Really, as long as you have This picture illustrates the key components where care must be taken:

Cards for RS35,RS55 and RS75 measurement cards

Please follow this simple step to protect the sensitive voltage supply, current source, digital voltmeter,  relay matrix boards from any accidental short while plugging in the interface cards.

Thanks for looking!

Comvolt

KLA Therma-Wave Opti-Probe 14-008473 REV B 14-007009 REV B1 REV G 14-007003 Backplane Connector on

If you get your electronics from GetSpares.com, you know the unit will be fully functional.  Why?  Because they test it in the actual tool and run wafers.  Once in a while, a fully functional board can get damaged due to a simple installation mishap.  This post describes this exact situation on KLA / Thermawave Opti-Probe 2600,2690,3260 and 3290 series film measurement tools. Some common revs of this board have part numbers:

14-008473, 14-007009, 14-007003,  14-010064

A 2 minute card swap can turn into a disaster if the P1 power connector is installed 180 degrees rotated.  Careful, this is easy to do because the connector is not keyed!  Take a look at the following picture to see the correct orientation.

P1 Connector. Pin 1 location

P1 Connector. Pin 1 location

Applies to 2600,2680,3260,3290

Applies to 2600,2680,3260,3290

 What happens if it rotated?  More than we have time to describe!  But basically, when this board fails you may see the following errors:

0x09080008 Can’t complete hardware initialization

0x0608000A Can’t Focus

0x06080011 Failed to close high mag focus loop

0x06080035 High mag focus capture failed: soft limit

0x06080050 Focus pos: 5.466 Limit: 5.465 Corr: 0.000

Don’t forget to visit GetSpares.com for this auto-focus board and many other semiconductor parts.

Hope this helps and Good luck!

KLA-Tencor 8100, 8250, 8300, 8450 series Critical Dimensions – Scanning Electron Microscope (CD-SEM): imaging malfunctions result of failed Column Control Chassis II (CCC2) part number 720-06884-002

KLA-Tencor Critical Dimensions Scanning Electron Microscope (CD-SEM) models 8100, 8250, 8300, 8450 can suffer from imaging malfunctions as the result of a failed Column Control Chassis II (CCC2) unit – part number 720-06884-002.  The observed failure mechanism is usually a ripple distortion effect along one or more view axes (see below images for clear examples). GetSpares maintains fully operational KLA SEMs in their warehouse, as well as the ability to repair these critical electronics.  This means parts sent in for repair get fully tested in a functional tool before being sent out – so you can be assured of top quality service.  Contact GetSpares today for replacement/repair solutions!

Front view of KLA 8100 SEM

Front view of KLA 8100 SEM

Side view of KLA 8100 SEM

Side view of KLA 8100 SEM

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

KLA 8100 SEM imaging: malfunctioning CCCP2 720-06884-002

KLA 8100 SEM imaging
Top – electron gun image of wafer site with funcitonal CCC2.
Bottom Left/Right – same site shown when CCC2 malfunctions and causes ripple distortion in image.

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

Leybold UL-500 Error Codes during Boot – EF, EH, FH, AH, BH, CH – 20061966

These are common error codes for the Leybold Ultratest UL-500 Helium Leak Detector used to test chamber conditions in many semiconductor processing equipment.  Failure on part 20061966.  Good news!  It can be repaired.  Contact info@comvolt.com.

ER1:CHECK ERROR E.O 92H:
Error within the internal V.24 connection.
ER1:CHECK ERROR ID 93H:
Error within the internal V.24 connection.

ER1:TIME OUT IDENT 95H:

Error within the internal V.24 connection.

ER1:TIME OUT INIT 96H:

Error within the internal V.24 connection.

ER1:DSR INACTIV INIT 97H:

Error within the internal V.24 connection.

ER1:DSR INACTIV 98H:

Error within the internal V.24 connection.

ER1:TIME OUT ECHO O 9AH:

Error within the internal V.24 connection.

ER1:ACIA-OVERRUN 9BH:

Error within the internal V.24 connection.

ER1:DSR AKTIV 9CH:

Error within the internal V.24 connection.

ER1:PARITY-ERROR 9EH:

Error within the internal V.24 connection.

ER1:DATA LOST 9FH:

Error within the internal V.24 connection.

leybold_UL500_cabinet

 

KLA-Tencor 277266 Timing Generator for Surfscan Systems S6100, S6120, S6220, S6420

The electronic circuit board 277266 Timing Generator goes into KLA-Tencor Surfscan systems S6100, S6120, S6220, and S6420.  The board is integral to the tool, which provides high precision defect inspection for silicon wafers.  GetSpares.com maintains fully functional Surfscan systems on their warehouse floor – that means good parts for sale, or good test environments for repaired parts.  If your tool is down, contact GetSpares.com today for replacement/repair solutions.

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6120

KLA-Tencor Surfscan S6120

 

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Bottom view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

KLA-Tencor Prometrix ME Box 52-0616, DVM for RS75 Resistivity Mapping Systems

The “ME Box” (part number 52-0616) is a high precision voltmeter used in the KLA-Tencor Prometrix RS75 series Resistivity Mapping Systems, which probe wafers for production defects.

The communication circuit in the ME Box is known to fail, causing false voltage/resistance/current readings by the RS75, or no readings at all.

GetSpares.com has the ME Box in stock in a functional RS75 tool – a guarantee that the ME Box will be operational.  Head to GetSpares and get yours today!

 

Side View: MEBox 52-0616

Side View: MEBox 52-0616

Top View: MEBox 52-0616

Top View: MEBox 52-0616

Bottom View: MEBox 52-0616

Bottom View: MEBox 52-0616

Cyonics-Uniphase 2114B-30SLQST Laser Power Supply for KLA Surfscans 6220 and 6420

If your KLA Surfscan’s laser is no longer working, it’s likely that the Cyonics-Uniphase 2114B-30SLQST power supply has failed.  GetSpares.com has these supplies in fully functional Surfscan models 6100, SFS 6200, SFS 6220, SFS 6400 and SFS 6420.  The tools are fully functional so you know the supply is too.  Head to GetSpares.com to get your parts today!

2114B-30SLQST Cyonics-Uniphase Laser Power Supply - front view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – front view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply - rear view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – rear view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply - in-tool view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – in-tool view