Another Sample of Failed Semiconductor Fab Electonics and Happy Endings


GetSparesCESP-002
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
05/02/2019Repaired/shipped
GetSparesTESP-002A2
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
05/02/2019Custom solution/shipped
GetSparesPCS4900/DELL
Therma-Wave
Single board computer
Opti-probe 2600-2690 3260-3290
Thermawave/KLA
Inspection
05/02/2019Repaired/shipped
GetSparesCESB-1011
DNS
Spin control board. Station Controller DNS
80A
DNS
Photolithograpy
04/17/2019Repaired/shipped
GetSpares90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/12/2019Repaired/shipped
GetSpares90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/12/2019Custom solution/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/11/2019Repaired/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/11/2019Custom solution/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/01/2019Repaired/shipped
GetSparesCESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
03/28/2019Repaired/shipped
GetSparesCESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
03/28/2019Custom solution/shipped
GetSpares36-0201 54-0219
Prometrix
H2 Interface PCB for UV1050/UV1250
UV1050
Tencor/KLA
Inspection
12/14/2018Repaired/shipped
GetSpares36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSpares36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Custom solution/shipped
GetSpares36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSpares36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSparesVLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
10/05/2018Repaired/shipped
GetSparesEST0220C05WNXE1
SMC
Smart Terminal
INR-497-001B
SMC
Water Chiller
09/10/2018Repaired/shipped
GetSparesPS500 2-39-55593
DNS
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018Repaired/shipped
GetSparesEEBH-0011X1
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/28/2018Repaired/shipped
GetSpares780-14091-000
KLA
CD Sem Column Aligner
8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM
06/05/2018Custom solution/shipped
GetSparesVLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018Custom solution/shipped
GetSpares36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/04/2016Repaired/shipped

KLA-Tencor 8100, 8250, 8300, 8450 series Critical Dimensions – Scanning Electron Microscope (CD-SEM): imaging malfunctions result of failed Column Control Chassis II (CCC2) part number 720-06884-002

KLA-Tencor Critical Dimensions Scanning Electron Microscope (CD-SEM) models 8100, 8250, 8300, 8450 can suffer from imaging malfunctions as the result of a failed Column Control Chassis II (CCC2) unit – part number 720-06884-002.  The observed failure mechanism is usually a ripple distortion effect along one or more view axes (see below images for clear examples). GetSpares maintains fully operational KLA SEMs in their warehouse, as well as the ability to repair these critical electronics.  This means parts sent in for repair get fully tested in a functional tool before being sent out – so you can be assured of top quality service.  Contact GetSpares today for replacement/repair solutions!

Front view of KLA 8100 SEM

Front view of KLA 8100 SEM

Side view of KLA 8100 SEM

Side view of KLA 8100 SEM

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

KLA 8100 SEM imaging: malfunctioning CCCP2 720-06884-002

KLA 8100 SEM imaging
Top – electron gun image of wafer site with funcitonal CCC2.
Bottom Left/Right – same site shown when CCC2 malfunctions and causes ripple distortion in image.

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion