Category Archives: Photolithography

Dainippon Screen DNS Spin Cup Origin Return

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Video of a DNS Track spin cup running an origin return.  This is a working unit for reference.  If you are having trouble with you 60A or need parts, contact https://getsparesllc.com for expert parts and advice and the best quality repairs.

 

Partname Partcategory Description Oem Model Datefield Picture1 Price
CERB-1016 2-VC-15254-1 Slave Board Transport Station Controller DNS 60A
CESB-2011 2-VC-19075 Slave Board Spin control board. Station Controller DNS
CEYD-0015 2-VC-13743 Power Supply 60A Power Controller DNS 60A
EEMP-0021X3 LCD Main Display Panel DNS 60A
CEBB-1011 Slave Board Station Controller Board BAKE DNS 60A
CERD-0111 Axis Controller Old style axis controller for robot DNS 60A
AU3585N222 CESA-0014 Servo Amp Old servo for DNS X”A” style DNS 60A

AU3585N222 CESA-0014, CERD-0111, CEBB-1011, EEMP-0021X3, CESB-2011 2-VC-19075, CERB-1016 2-VC-15254-1, AU3585N222 CESA-0014 Servo Amp, CEBB-1011 Station Controller Board BAKE, CERB-1016 2-VC-15254-1 Transport Station Controller, CESB-2011 2-VC-19075 Spin control board. Station Controller, CEYD-0015 2-VC-13743-GSRPR, EEMP-0021X3 LCD DISPLAY

Origin Return for Dainippon Screen DNS 80B Coat Develop Track

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Take a look at these videos of robots, computers and other track pieces in action..

A way to communicate failure symptom for DNS track is to run the Origin Return / Lot Clear operation after a boot up. We collect videos of this process for different pieces during the origin return. Take a look and if you have any interesting DNS behavior that could help other technicians isolate track failures please email us at info@comvolt.com and we will post it for everybody to see.

Look at this spin cup during an origin return..Mostly just the nozzle arms move.


How about origin return of the transport robot?

Depending on where the origin return fails, it can point you which controller is failing. Typical error codes are:

1-03-0247, 1-03-0201, 1-03-0107, 1-01-0112, 1-02-0120, 1-03-1010, 1-03-0210, 1-03-0252, 1-03-0253, 1-01-0221 , 1-03-0242, 1-03-0254, 1-01-0310, 1-03-0258, 1-03-0255, 1-02-0470, 1-00-0023, 1-03-2001, 1-03-2101, 1-05-0015, 1-01-0210, 1-02-410, 01-02-0121, 1-03-0254, 1-03-0220, 1-01-0210, 1-06-0206, 1-00-0025, 1-03-0251

2-39-45431, 2-39-51930 2-39-61074 UT3-F1AE, 2-39-51930 2-39-61074 UT3-F1AE /DSS1-A, 2-39-51930 2-39-61074 UT3-X3AE / DSS4-A, 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07, 2-VC-16217-1EEBH-0021, 2-VC-19090 EERC-0012, 2-VC-19090 EERC-0013, 80A, 80B, 80B Scrubber AU6351N60 2-39-57597, CEDB-1013 2-VC-15252, CEMP-0016 EEMP-0021X3, CERB-1016 2-VC-15254-1, CESA-804, CESB-2011 2-VC-19075, CESB-2012, CESP-0002 2-VC-42102, CESP-0017, CESP-001A F-VC-40833, CESP-002, CEYD-0015 2-VC-13743, 2-VC-28124 GEIA-001, EEBH-0011, EEDC-0011 2-VC-19089, EEJA-001A, EESA-001 AU3575N223, EESA-001 AU3575N233 2-39-48133 , EESA-001A1 AU6356N20 EESA-001 2-39-53462, EESC-0012 2-VC-19115 Spin Slave, EEUC-0013, EEUD-0013, EEUE-001, EEUE-001B, EEUE-001X1, EEW, EEYC-0011 2-VC-20626, GEIC-002 BP-0015C, GEPH-001X3, GESA-001 AU6354N40 2-VC-27621Hamamatsu,IDI, IDI/Cybor, INR-244-216, INR-244-402 2-39-45751, INR-497-001B, INR-497-P2393 Motherboard, Motor, Motor Controller, OMRON, Photolithograpy, PiBoc, Power Supply, Robot Controller, Robots Servo Amp, Servo Driver, Slave Board, Slave Board , Stage Driver, Super Vexta UDX5107, ESP-002A2, Touchscreen VGA, Vexta,

Another Sample of Failed Semiconductor Fab Electonics and Happy Endings

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GetSparesCESP-002
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
05/02/2019Repaired/shipped
GetSparesTESP-002A2
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
05/02/2019Custom solution/shipped
GetSparesPCS4900/DELL
Therma-Wave
Single board computer
Opti-probe 2600-2690 3260-3290
Thermawave/KLA
Inspection
05/02/2019Repaired/shipped
GetSparesCESB-1011
DNS
Spin control board. Station Controller DNS
80A
DNS
Photolithograpy
04/17/2019Repaired/shipped
GetSpares90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/12/2019Repaired/shipped
GetSpares90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/12/2019Custom solution/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/11/2019Repaired/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/11/2019Custom solution/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/01/2019Repaired/shipped
GetSparesCESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
03/28/2019Repaired/shipped
GetSparesCESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
03/28/2019Custom solution/shipped
GetSpares36-0201 54-0219
Prometrix
H2 Interface PCB for UV1050/UV1250
UV1050
Tencor/KLA
Inspection
12/14/2018Repaired/shipped
GetSpares36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSpares36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Custom solution/shipped
GetSpares36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSpares36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSparesVLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
10/05/2018Repaired/shipped
GetSparesEST0220C05WNXE1
SMC
Smart Terminal
INR-497-001B
SMC
Water Chiller
09/10/2018Repaired/shipped
GetSparesPS500 2-39-55593
DNS
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018Repaired/shipped
GetSparesEEBH-0011X1
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/28/2018Repaired/shipped
GetSpares780-14091-000
KLA
CD Sem Column Aligner
8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM
06/05/2018Custom solution/shipped
GetSparesVLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018Custom solution/shipped
GetSpares36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/04/2016Repaired/shipped

Recent Board Failures in a 6″/8″ Semiconductor Fab

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GetSpares
INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
01/04/2019
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Custom solution/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
For Sale/ Stock

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped

GetSpares
2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
12/04/2018
Repaired/shipped

GetSpares
Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
01/09/2019
Repaired/shipped

GetSpares
2-39-51930 2-39-61074 UT3-F1AE /DSS1-A
DNS
LCD Gold Version
SK200
DNS
Photolithograpy
12/21/2018
Custom solution/shipped

GetSpares
2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
12/21/2018
Custom solution/shipped

GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped

GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped

GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped

GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped

GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped

GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Custom solution/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped

GetSpares
INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
11/27/2018
Repaired/shipped

GetSpares
AG09
Hamamatsu
50V power supply for HgXe light.
80B
DNS
Photolithograpy
11/13/2018
Repaired/shipped

GetSpares
54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
12/14/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped

GetSpares
EESA-001 AU3575N233 2-39-48133
DNS
servo amp
80B
DNS
Photolithograpy
12/08/2018
Repaired/shipped

GetSpares
16498-01
Gasonics
Display Driver
L3510
Novellus/Gasonics
RIE/Plasma
11/27/2018
Repaired/shipped

GetSpares
2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
11/28/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
10/18/2018
For Sale/ Stock

GetSpares
2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
11/02/2018
Repaired/shipped

GetSpares
L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
10/04/2018
Repaired/shipped

GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
11/13/2018
Repaired/shipped

GetSpares
EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/16/2018
Repaired/shipped

GetSpares
EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/16/2018
Repaired/shipped

GetSpares
EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
10/04/2018
Repaired/shipped

GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
10/15/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
10/12/2018
Repaired/shipped

GetSpares
2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/20/2018
Repaired/shipped

GetSpares
EEYC-0011 2-VC-20626
DNS
20 slot – Cage for all the slave cards in front of track
80B
DNS
Photolithograpy
08/15/2018
Repaired/shipped

GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
09/24/2018
Custom solution/shipped

GetSpares
2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
09/13/2018
Repaired/shipped

GetSpares
EESC-0012 2-VC-19115 Spin Slave
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
09/12/2018
Repaired/shipped

GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
09/05/2018
Repaired/shipped

GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
09/05/2018
Repaired/shipped

GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
05/15/2018
Repaired/shipped

GetSpares
BU504XII 2-XZ-10840
OMRON
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018
Repaired/shipped

GetSpares
001-4130-03
Brooks
Brooks ACE VCE Controller
LAM and others
Brooks
Robots
05/23/2018
Repaired/shipped

GetSpares
36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/17/2018
Repaired/shipped

GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
08/09/2018
Repaired/shipped

GetSpares
EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
08/21/2018
Repaired/shipped

GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
08/09/2018
Repaired/shipped

DNS 80B Track – Removing Supply from EEYC-0011 EEYC-0111 2-VC-20626 2-VC-20627

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This post shows how to remove the power supply from the side of the station controller for DNS 80B coater/developer tracks. There is no need to remove the whole card cage if you are sending in a repair. It would be too bulky. The part here can go by a variety of names such as EEYC-0011, EEYC-0111, 2-VC-20626 and 2-VC-20627. Remember contact www.GetSpares.com for this or any other semiconductor tool parts that you need. Here you go…

This is a rare case where we recommend that the customer open a part to send a controller by itself

More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

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GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 08/06/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 07/13/2018 Repaired/shipped
GetSpares 36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 08/01/2018 Custom solution/shipped
GetSpares 36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F 		UV1250-UV1280
Tencor/KLA
Inspection		 08/01/2018 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/01/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 07/19/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 07/13/2018 Repaired/shipped
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver 		SK200
DNS
Photolithograpy		 07/02/2018 Repaired/shipped
GetSpares BU504XII 2-XZ-10840
OMRON
Battery backed power supply		 80B
DNS
Photolithograpy		 07/15/2018 Repaired/shipped
GetSpares PS500 2-39-55593
DNS
Battery backed power supply		 80B
DNS
Photolithograpy		 07/15/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/21/2018 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW		 SK200
DNS
Photolithograpy		 07/11/2018 Repaired/shipped
GetSpares EEBH-0011X1
DNS
heater control bake unit		 80B
DNS
Photolithograpy		 06/28/2018 Repaired/shipped
GetSpares EEBH-0011
DNS
heater control bake unit		 80B
DNS
Photolithograpy		 06/19/2018 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit		 80B
DNS
Photolithograpy		 09/06/2017 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply 		RS55
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB		 RS35
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply 		RS55
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C		 RS55
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares EEYC-001
DNS
Cage for all the slave cards in front of track		 80B
DNS
Photolithograpy		 07/02/2018 Custom solution/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 07/02/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/21/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board		 80A
DNS
Photolithograpy		 06/19/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 06/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C		 RS55
Prometrix/KLA
Wafer Resistivity		 06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C		 RS55
Prometrix/KLA
Wafer Resistivity		 06/04/2018 Repaired/shipped
GetSpares 36-0325
Prometrix
controller that slides in from right horizontally.		 RS75
Prometrix/KLA
Wafer Resistivity		 05/04/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 06/06/2018 Repaired/shipped
GetSpares 95-3155
Gasonics
Cluster Misc Controller With AC power detect J6		 PEP3510
Novellus/Gasonics
RIE/Plasma		 07/28/2016 Repaired/shipped
GetSpares 567-5101 HV Supply
Hitachi
Hv supply for electron gun		 Unknown CD SEM
Hitachi
SEM		 05/22/2018 For Sale/ Stock
GetSpares LSMUT_TF
Comvolt
Just an HV timer. 		SMBUS_ASMU1
Comvolt
lab tester		 05/15/2018 Custom solution/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers		 ASML chiller
Neslab
Chiller		 06/01/2018 Repaired/shipped
GetSpares 001-4130-03
Brooks
Brooks ACE VCE Controller		 LAM and others
Brooks
Robots		 05/23/2018 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers		 ASML chiller
Neslab
Chiller		 05/23/2018 For Sale/ Stock
GetSpares VLT 2800
DanFoss
drive water pump in chillers		 ASML chiller
Neslab
Chiller		 05/23/2018 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers		 ASML chiller
Neslab
Chiller		 05/21/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver 		SK200
DNS
Photolithograpy		 05/15/2018 Repaired/shipped
GetSpares 810-025368-001
Lam Research
Simple relay board. located in top left of the chiller		 Lam-TCU_2080
Lam
Chiller		 04/10/2018 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 10/21/2015 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 04/27/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver 		SK200
DNS
Photolithograpy		 03/27/2018 Repaired/shipped
GetSpares CESB-2012
DNS
Spin Board		 80A
DNS
Photolithograpy		 04/14/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface		 L3510
Novellus/Gasonics
RIE/Plasma		 04/14/2018 Repaired/shipped
GetSpares EEJA-001A
DNS
6-axis controller based on the note on this unit.		 80B
DNS
Photolithograpy		 04/06/2018 Repaired/shipped
GetSpares EESA-001 AU3575N223
DNS
servo amp		 80B
DNS
Photolithograpy		 10/25/2017 For Sale/ Stock
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001		 SK200
DNS
Photolithograpy		 04/14/2018 Repaired/shipped
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001		 SK200
DNS
Photolithograpy		 04/14/2018 Repaired/shipped
GetSpares 95-0541Misc Controller
Gasonics

 PEP3510
Novellus/Gasonics
RIE/Plasma		 10/27/2016 Repaired/shipped
GetSpares 1-139-023
IDI
Communications Card		 M300
IDI/Cybor
Pump		 02/18/2014 Repaired/shipped
GetSpares 1-139-022
IDI
Pump Controller		 M300
IDI/Cybor
Pump		 02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board 		M300
IDI/Cybor
Pump		 02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board 		M300
IDI/Cybor
Pump		 02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board 		M300
IDI/Cybor
Pump		 02/18/2014 Custom solution/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds		 Lam-TCU_2080
Lam
Chiller		 04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller		 Lam-TCU_2080
Lam
Chiller		 04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller		 Lam-TCU_2080
Lam
Chiller		 04/10/2018 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 04/10/2018 Repaired/shipped
GetSpares 375039
Tencor
Data Processing Board		 AIT2
KLA
Inspection		 04/05/2018 Custom solution/shipped
GetSpares 810-025369-001
Lam Research
Resistivity Board. located in top center of the chiller		 Lam-TCU_2080
Lam
Chiller		 04/03/2018 Repaired/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds		 Lam-TCU_2080
Lam
Chiller		 04/03/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board		 80A
DNS
Photolithograpy		 04/03/2018 Repaired/shipped
GetSpares Super Vexta UDX5107
Vexta
5 axis driver		 80A
DNS
Photolithograpy		 03/29/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 03/22/2018 Repaired/shipped
GetSpares 3510N45E10
Tamagawa
Tamagawa Motor AC servo		 80B
DNS
Photolithograpy		 03/19/2018 Repaired/shipped
GetSpares 373583
Tencor
ANALOG BOARD		 AIT2
KLA
Inspection		 06/22/2016 Repaired/shipped
GetSpares SQV175-1433-2
Prometrix
Power Supply		 6220
KLA
Inspection		 02/28/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB 		RS55
Prometrix/KLA
Wafer Resistivity		 01/29/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB 		RS55
Prometrix/KLA
Wafer Resistivity		 01/29/2018 Repaired/shipped
GetSpares 0100-02016 0100-20066
AMAT
Analog Sync Detect AMAT		 P5000
Applied Materials AMAT
RIE/Plasma		 01/04/2018 For Sale/ Stock
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 02/20/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface		 L3510
Novellus/Gasonics
RIE/Plasma		 02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 02/15/2018 Repaired/shipped

More Parts from Available from GetSpares

Posted on by

 

GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares MR-J10A-S07 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares 95-3155
Gasonics
Cluster Misc Controller With AC power detect J6		 PEP3510
Novellus/Gasonics
RIE/Plasma		 08/04/2016 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 02/04/2018 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply		 RS55
Prometrix/KLA
Wafer Resistivity		 02/01/2018 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 01/04/2018 For Sale/ Stock
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 02/04/2016 Repaired/shipped
GetSpares 000496
Neslab/JR Banks
Measures temperature and detects water flow from reed valve.		 Neslab model
Neslab
Chiller		 01/16/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 12/12/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares GEIC-002 BP-0015C
DNS
Interface card in back of unit for interface unit		 SK200
DNS
Photolithograpy		 01/16/2018 For Sale/ Stock
GetSpares EEDC-0011 2-VC-19089
DNS
Indexer card for 80B		 80B
DNS
Photolithograpy		 01/16/2018 Repaired/shipped
GetSpares EEDC-0011 2-VC-19089
DNS
Indexer card for 80B		 80B
DNS
Photolithograpy		 01/16/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board		 80A
DNS
Photolithograpy		 05/09/2016 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 01/04/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 01/04/2018 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 12/17/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 12/17/2017 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply		 RS55
Prometrix/KLA
Wafer Resistivity		 12/17/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 12/12/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 12/18/2017 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 12/13/2017 Repaired/shipped
GetSpares 54-0317 REVA 36-0317
KLA
PCB Measurement Control Board 54-0317 REVA. 36-0317. This has the J14IPDA connector and has the U11 and U16 PALS		 UV1250-UV1280
Tencor/KLA
Inspection		 11/28/2017 Repaired/shipped
GetSpares INR-497-P2393 A19393-01
SMC
2 channel controller board		 INR-497-001B
SMC
Water Chiller		 10/11/2017 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 11/22/2017 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 09/26/2017 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 11/22/2017 Repaired/shipped
GetSpares T0351/10-1006
Tectrol
Power Supply		 6200
KLA
Inspection		 07/19/2017 Repaired/shipped
GetSpares AU6351N60 2-39-57597
DNS
servo amp		 80B Scrubber
DNS
Photolithograpy		 10/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 04/11/2016 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/21/2017 Custom solution/shipped

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

Posted on by

More successful solutions from GetSpares

 

GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 11/08/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 11/06/2017 Repaired/shipped

DNS_Hamamatsu_L6001-01
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 10/23/2017 Repaired/shipped
GetSpares T0351/10-1006
Tectrol
Power Supply		 6200
KLA
Inspection		 07/19/2017 For Sale/ Stock
GetSpares GLC352-CEF
Emerson
Power Supply		 Not Specified
Not Specified
Not Specified		 10/30/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 10/06/2017 Repaired/shipped
GetSpares EESA-001 AU3575N233 2-39-48133
DNS
servo amp		 80B
DNS
Photolithograpy		 10/25/2017 Repaired/shipped
GetSpares AU6351N60 2-39-57597
DNS
servo amp		 80B Scrubber
DNS
Photolithograpy		 10/22/2017 For Sale/ Stock
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 10/23/2017 Repaired/shipped
GetSpares EEUE-001
DNS
EEW Control Unit		 80A
DNS
Photolithograpy		 10/03/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 09/20/2017 For Sale/ Stock
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 10/12/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 10/06/2017 Repaired/shipped
GetSpares INR-497-P2393 A19393-01
SMC
2 channel controller board		 INR-497-001B
SMC
Water Chiller		 10/11/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 11/10/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 10/07/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 10/05/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 09/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 04/11/2016 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 09/26/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 09/22/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit		 80B
DNS
Photolithograpy		 09/06/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 10/21/2015 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 09/08/2017 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 09/18/2014 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4		 80B
DNS
Photolithograpy		 08/09/2017 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4		 80B
DNS
Photolithograpy		 08/09/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface		 L3510
Novellus/Gasonics
RIE/Plasma		 07/21/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 07/31/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 06/22/2016 Repaired/shipped
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit		 80B
DNS
Photolithograpy		 07/17/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor		 AIT2
KLA
Inspection		 07/17/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 01/19/2015 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor		 AIT2
KLA
Inspection		 07/06/2017 Repaired/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 07/06/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 07/11/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 07/11/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 06/27/2017 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 06/23/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 06/23/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 06/23/2017 Repaired/shipped
GetSpares CESP-0002 2-VC-42102
DNS
maintenance panel with SCN5		 80B
DNS
Photolithograpy		 02/03/2017 Custom solution/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 04/02/2017 Repaired/shipped
GetSpares CESB-2011 2-VC-19075
DNS
Spin control board. Station Controller		 60A
DNS
Photolithograpy		 06/06/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 06/12/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor		 AIT2
KLA
Inspection		 06/22/2016 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 06/12/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 06/12/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface		 L3510
Novellus/Gasonics
RIE/Plasma		 06/06/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB		 RS35
Prometrix/KLA
Wafer Resistivity		 06/06/2017 For Sale/ Stock
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 04/28/2017 Repaired/shipped
GetSpares 54-0311
Prometrix
UV1250/ 1050 optical array PDA		 UV1050
Tencor/KLA
Inspection		 01/03/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 06/06/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 05/30/2017 Repaired/shipped
GetSpares CESP-001A F-VC-40833
DNS
maintenance panel without SCN5		 80B
DNS
Photolithograpy		 04/11/2017 For Sale/ Stock
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit		 80B
DNS
Photolithograpy		 05/24/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 02/22/2017 Repaired/shipped
GetSpares 54-0317 36-0317
KLA
PCB Measurement Control Board 54-0317 36-0317		 UV1250-UV1280
Tencor/KLA
Inspection		 03/29/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW		 SK200
DNS
Photolithograpy		 05/04/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 05/15/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 05/15/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 05/08/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 05/09/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 02/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 04/19/2017 Repaired/shipped
GetSpares 710-693221-000
KLA
Matrox Corona Rev 6 8M Confg AIT2, Slot		 8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM		 04/17/2017 Repaired/shipped
GetSpares 356166 Matrox Corona
KLA
U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18		 AIT2
KLA
Inspection		 04/17/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 04/24/2017 Repaired/shipped
GetSpares CEMP-0016 EEMP-0021X3
DNS
Main Display Panel		 80A
DNS
Photolithograpy		 04/18/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB		 RS35
Prometrix/KLA
Wafer Resistivity		 04/19/2017 Custom solution/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 04/03/2017 Repaired/shipped
GetSpares 55079-763288
Prometrix
PCA-DUAL Stepper Driver		 RS55
Prometrix/KLA
Wafer Resistivity		 03/29/2017 Repaired/shipped
GetSpares 36-0201
Prometrix
H2 Interface PCB for UV1050/UV1250		 UV1050
Tencor/KLA
Inspection		 03/29/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 03/29/2017 Repaired/shipped
GetSpares 2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair		 80B
DNS
Photolithograpy		 04/03/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 03/13/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 04/04/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW		 SK200
DNS
Photolithograpy		 04/02/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 03/10/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 03/13/2017 Custom solution/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 02/24/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 02/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 03/07/2017 Repaired/shipped
GetSpares CERB-1016 2-VC-15254-1
DNS
Transport Station Controller		 60A
DNS
Photolithograpy		 02/04/2017 Repaired/shipped
GetSpares 2114B-30SLQST
Cyonics
CYONICS-UNIPHASE		 6220
KLA
Inspection		 01/09/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 02/24/2017 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board		 80A
DNS
Photolithograpy		 02/04/2017 Repaired/shipped

GetSpares for Semiconductor Electronics Parts

Posted on by

GetSpares

 

GetSpares INR-244-402-GSRPR aka 2-39-45751 Thermo Controller DNS 80B 03/13/2017

Typical INR_244-402
GetSpares INR-244-402-GSRPR aka 2-39-45751 Thermo Controller DNS 80B 03/13/2017
GetSpares 600400-01 Track Interface PDB PD 80072E SVG Track 03/10/2017
GetSpares 2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 02/24/2017

Typical SK200 LCD UT3-F1AE
GetSpares 2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 02/24/2017
GetSpares servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 02/24/2017
GetSpares 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) KLA/Prometrix RS-35 02/22/2017

Prometrix_RS35/RS55_CurrentSource With Beckman 36-0004 (Alternate 54-0005 or 54-0389)
GetSpares 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) KLA/Prometrix RS-35 02/22/2017
GetSpares 36-0004/54-0006 PCA ART Relay Board W/Exchange KLA/Prometrix RS-35 02/22/2017
GetSpares 36-0004/54-0006 PCA ART Relay Board W/Exchange KLA/Prometrix RS-35 02/22/2017
GetSpares A90-005-01-GSRPR A90-005-002 Gasonics Aura1000 02/08/2017
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 02/06/2017
GetSpares CERB-1016 2-VC-15254-1 Transport Station Controller DNS 80A 02/04/2017
GetSpares CERB-1016 2-VC-15254-1 Transport Station Controller DNS 80A 02/04/2017
GetSpares CERB-1016 2-VC-15254-1 Transport Station Controller DNS 80A 02/04/2017
GetSpares EEW Hamamatsu L6299-12 DNS 80B / SK200 02/04/2017
GetSpares servo amp 2-VC-27621 AU6354N40 and GESA-001 DNS SK-200 02/04/2017
GetSpares CEDB-1013 2-VC-15252 Indexer Board DNS 80A 02/04/2017
GetSpares Argon 50 watt laser class III KLA 6220 6420 02/01/2017
GetSpares 16495-01-GSRPR Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 01/13/2017
GetSpares 2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 01/09/2017
GetSpares 0190-76050-GSRPR R Video PCB Applied Materials P5000 / P5200 01/05/2017
GetSpares DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 01/03/2017
GetSpares 0100-02016-GSRPR Analog Sync Detect Applied Materials 12/16/2016
GetSpares servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 12/15/2016
GetSpares servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 12/12/2016
GetSpares Tamagawa 3510N45E10 Motor AC servo DNS 11/21/2016
GetSpares 95-0517 PCB Motherboard Intel 486DX CPU exchange program Gasonics/Novellus L_3500 L_3510 11/18/2016
GetSpares 0100-20066-GSRPR Analog Sync Detect Applied Materials 11/18/2016
GetSpares Brooks ACE 001-4130-03 VCE Controller No MISC-IO LAM and others 11/02/2016
GetSpares 95-0541 MISC mini-controller Novellus / Gasonics PEP3510 10/27/2016
GetSpares servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 10/13/2016
GetSpares CT2939-000009-12-GSRPR Power Supply Upstair TEL ACT 8 10/12/2016
GetSpares Thermo-Con Power Supply INR-244-216 TEL ACT 8 10/12/2016
GetSpares DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 10/11/2016
GetSpares FRD-4 2-39-45431-GSRPR DNS 80B 09/30/2016
GetSpares FRD-4 2-39-45431-GSRPR DNS 80B 09/30/2016
GetSpares servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 09/30/2016
GetSpares Current Source PCB (Alternate 54-0005 or 54-0389) KLA/Prometrix RS55/75 09/27/2016
GetSpares 54-0014 36-0014 PCB DVM CARD KLA/Prometrix RS55/RS75 09/27/2016
GetSpares 36-0042 Analog I/O Board 54-0252 KLA/Prometrix RS-55 09/27/2016
GetSpares 16495-01E-GSRPR Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 09/01/2016
GetSpares servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 08/29/2016
GetSpares Hamamatsu L6599-01 Lamp House for EEW DNS Lamphouse-EEW 80B UV-SPOT light source 08/19/2016
GetSpares DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 08/19/2016
GetSpares FRD-4 2-39-45431-GSRPR DNS 80B 08/15/2016
GetSpares 3L135-GSRPR DNS SK-200 08/15/2016
GetSpares 95-3155 Cluster Misc Controller Novellus / Gasonics PEP3510 08/04/2016
GetSpares 95-0537 gas box mini controller 95-2977 Novellus / Gasonics PEP3510 08/01/2016
GetSpares 95-3155 Cluster Misc Controller Novellus / Gasonics PEP3510 07/28/2016
GetSpares 2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 07/26/2016
GetSpares CEDB-1013 2-VC-15252 Indexer Board DNS 80A 07/26/2016
GetSpares 14-007009-GSRPR Auto FOCUS Driver Board KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 07/08/2016
GetSpares EEYC-0011 EEW station controller DNS 80B 07/08/2016
GetSpares 16495-01-REV.7.4 Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 07/06/2016
GetSpares 14-010064-GSRPR Analog Processor Board Optiprobe 2600 W/Exchange Thermawave 07/06/2016
GetSpares EEUE-001X3 DNS EEW Control Unit 07/05/2016
GetSpares LCD Monitor 90X0054 KLA 06/22/2016
GetSpares 373583-GSRPR ANALOG BOARD AIT 2 KLA 06/22/2016
GetSpares INR-244-402-GSRPR aka 2-39-45751 Thermo Controller DNS 80B 06/22/2016
GetSpares AG09 Lamp Power Unit Hamamatsu L6299 06/15/2016
GetSpares UFP-710-TA422 LCD Display Canon i5 06/15/2016
GetSpares Power supply from EEUE-001B unit DNS 80B 06/15/2016
GetSpares AG09 Lamp Power Unit Hamamatsu L6299 06/15/2016
GetSpares 710-058894-00 FA Board KLA Starlight SL3XX series 06/14/2016
GetSpares GetSpares 710-058894-00 FA Board KLA Starlight SL3XX series 06/14/2016
2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 06/14/2016
EEUD-0013 DNS EEW Power Supply 06/14/2016
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 06/10/2016
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 06/09/2016
EESA-001 and AU3575N223 DNS 80B 06/09/2016
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 06/09/2016
EESA-001 and AU3575N223 DNS 80B 06/09/2016
EEUE-001X3 DNS EEW Control Unit 06/08/2016
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 06/08/2016
EEUE-001B DNS EEW Control Unit 06/08/2016
INR-244-402-GSRPR aka 2-39-45751 Thermo Controller DNS 80B 06/08/2016
DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 06/07/2016
DNS Lamphouse,Hamamatsu L6001-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 06/07/2016
servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 06/01/2016
FRD-4 2-39-45431-GSRPR DNS 80B 06/01/2016
2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 05/23/2016
FRD-4 2-39-45431-GSRPR DNS 80B 05/17/2016
CEYD-0015 2-VC-13743-GSRPR DNS 60A 05/17/2016
2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 05/15/2016
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 DNS SK-200 05/10/2016
CEDB-1013 2-VC-15252 Indexer Board DNS 80A 05/09/2016
2-39-51930 2-39-61074 LCD UT3-F1AE DNS SK-200 05/06/2016
Brooks ACE 001-4130-03 VCE Controller LAM and others 05/05/2016
95-0517 PCB Motherboard Intel 486DX CPU exchange program Gasonics/Novellus L_3500 L_3510 04/26/2016
FRD-4 2-39-45431-GSRPR DNS 80B 04/26/2016
Hamamatsu L6599-01 Lamp House for EEW DNS 80B 04/25/2016
95-0517 PCB Motherboard Intel 486DX CPU exchange program Gasonics/Novellus L_3500 L_3510 04/21/2016
290432-REV A-GSRPR AOD Scanner AIT 1 KLA 04/19/2016
AG09 Lamp Power Unit Hamamatsu L6299 04/18/2016
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 DNS SK-200 04/18/2016
2-39-51930 2-39-61074 LCD DNS SK-200 04/14/2016
2-39-51930 2-39-61074 LCD DNS SK-200 04/11/2016
IPC51/596 UPIBOC-I INDUSTRIAL PC DNS 80B 04/08/2016
UFP-710-TA422 LCD Display Canon i5 04/08/2016
CEDB-1013 2-VC-15252 Indexer Board DNS 80A 04/01/2016
GEPH-001X3 Track Coater Power Supply DNS SK-200 03/31/2016
IPC51/596 UPIBOC-I INDUSTRIAL PC DNS 80B 03/21/2016
IPC51/293 UPIBOC-I INDUSTRIAL PC DNS 80B 03/17/2016
Brooks ACE 001-4130-03 VCE Controller LAM and others 03/08/2016
Brooks ACE 001-4130-03 VCE Controller LAM and others 03/08/2016
884-98-000-GSRPR PCB -RMX PCB MRC/Eclipse 4 CVD-PVD 03/04/2016
DNS Lamphouse,Hamamatsu L6599-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 02/29/2016
DNS Lamphouse,Hamamatsu L6599-01GSRPR DNS Lamphouse-EEW 80B UV-SPOT light source 02/29/2016
2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) DNS 80B 02/23/2016
EESA-001 and AU3575N223 DNS 80B 02/18/2016
EESA-001 and AU3575N223 DNS 80B 02/18/2016
PCB, ASSY 375420 , 0235098 Beam Pos Control KLA SP1-TB1 02/17/2016
A90-005-01-GSRPR A90-005-002 Gasonics Aura1000 02/12/2016
CEDB-1013 2-VC-15252 Indexer Board DNS 80A 02/11/2016
0190-35765-GSRPR Applied Materials AMAT Centura 02/11/2016
0190-35765-GSRPR Applied Materials AMAT Centura 02/10/2016
A90-005-01-GSRPR A90-005-002 Gasonics Aura1000 02/10/2016
36-0042 Analog Power Supply 54-0057 KLA/Prometrix RS-35 02/04/2016
54-0014 36-0014 PCA-DVM, ART Voltmeter KLA/Prometrix RS-35 02/04/2016
36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) KLA/Prometrix RS-35 02/04/2016
54-0006 PCA ART Relay Board W/Exchange KLA/Prometrix RS-35 02/04/2016
FRD-4 2-39-45431-GSRPR DNS 80B 02/02/2016
493-30-1020-GSRPR HOTPLATE POWER SUPPLY MR-2015 DNS 80B 02/02/2016
FRD-4 2-39-45431-GSRPR DNS 80B 02/02/2016
0090-75014-A-GSRPR Synergy CPU VME SBC (v21) Applied Materials P5000 01/28/2016
FRD-4 2-39-4543-1 DNS 80B 01/27/2016
Driver Motor Box Servo PK CESA-804 DNS 80A 01/19/2016
communication card 1-139-023 IDI M300 01/07/2016
710-058895-00-GSRPR PCB Multi Speed Interface Board KLA Starlight 12/14/2015
BG4-6582-000-GSRPR Canon 12/08/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 12/08/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 12/04/2015
0090-76110-GSRPR Synergy CPU VME SBC Applied Materials V440 (V21) P5000 12/02/2015
0090-76110-A-GSRPR Synergy CPU VME SBC Applied Materials V440 (SV21) P5000 11/24/2015
LTS, TCB, VIDEO Generator 11/19/2015
2-39-51930 2-39-61074 LCD DNS SK-200 11/11/2015
AG09 Lamp Power Unit Hamamatsu L6299 11/07/2015
AG09 Lamp Power Unit Hamamatsu L6299 11/07/2015
90-2590 16495-01B Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 11/06/2015
90-2590 16495-01B Branson/IPC, I/O interface Gasonics/Novellus L_3500 L_3510 11/06/2015
2-39-51930 2-39-61074 LCD DNS SK-200 11/04/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 11/03/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 11/03/2015
14-008473-GSRPR PCB, AUTO FOCUS KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 10/28/2015
410-01900 OBC Board (ECO-1000) 000-883100 050-883100 Nicolet Magna ECO 1000 10/28/2015
2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) DNS 80B 10/23/2015
2-39-51930-2-39-61074 DNS SK-200 10/22/2015
AG09 Hamamatsu L6299 10/21/2015
52-0616 ME Box KLA/Prometrix RS-75 10/21/2015
52-0616 ME Box KLA/Prometrix RS-75 10/21/2015
Leybold UL-500 10/19/2015
780-14091-000GSRPR KLA8100 CD-SEM, 8100XP CD-SEM, 8100XPR CD-SEM, 8250 CD-SEM, 8300 CD-SEM, 8450 CD-SEM 10/19/2015
servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 DNS 80B 10/07/2015
52-0616 ME Box KLA/Prometrix RS-75 09/21/2015
servo amp AU3575N233 and EESA-001 DNS 80B 09/21/2015
AC-2S06 Adaptor, Throttle Valve Controller (796-006238-002) C1 Tylan General 09/14/2015
Timing Generator, PCB W/Exchange S6420 277266 KLA/Tencor 09/10/2015
2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) DNS 80B 09/08/2015
52-0616 ME Box KLA/Prometrix RS-75 09/08/2015
AG09 Lamp Power Unit Hamamatsu L6299 09/02/2015
AG09 Lamp Power Unit Hamamatsu L6299 09/02/2015
AG09 Lamp Power Unit Hamamatsu L6299 09/02/2015
AG09 Lamp Power Unit Hamamatsu L6299 09/02/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 09/01/2015
Laser sensor KLA Laser 08/24/2015
spin board EESC-0012 DNS 80B 08/20/2015
spin board EESC-0012 DNS 80B 08/20/2015
spin board EESC-0012 DNS 80B 08/20/2015
spin board EESC-0012 DNS 80B 08/20/2015
EEBH-0011X1GSRPR heater control bake unit DNS 80B 08/18/2015
90-2590 Gasonics/Novellus L_3500 L_3510 08/18/2015
spin board EESC-0012 DNS 80B 08/17/2015
02-00149-00 Novellus / Gasonics C1 08/13/2015
95-0538 Cluster Misc Controller Novellus / Gasonics PEP3510 08/12/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR DNS 80B 08/12/2015
EEW Hamamatsu L6299-12 PSI-DUV248 DNS 80B 08/11/2015
EEBH-0011X1GSRPR heater control bake unit DNS 80B 08/10/2015
Driver Motor Box, Servo Pack CESA-804 DNS 80A 08/06/2015
50-188N PCB -RMX Control Board MRC/Eclipse 4 CVD-PVD 08/06/2015
Driver Motor Box, Servo Pack CESA-804 DNS 80A 08/06/2015
Driver Motor Box, Servo Pack CESA-804 DNS 80A 08/06/2015
linear encoder 08/04/2015
-VC-34885-GSRPR EEBH-6011 heater control bake unit DNS 80B 08/03/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462 DNS 80B 07/30/2015
2-39-51930-2-39-61074 LCD DNS SK-200 07/27/2015
spin board EESC-0012 DNS 80B 07/24/2015
spin board EESC-0012 DNS 80B 07/24/2015
spin board EESC-0012 DNS 80B 07/24/2015
spin board EESC-0012 DNS 80B 07/24/2015
spin board EESC-0012 DNS 80B 07/24/2015
servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 07/23/2015
servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 07/23/2015
EEMP-0021X3 LCD DISPLAY DNS 60B
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 07/14/2015
2-39-51930 2-39-61074 LCD DNS SK-200 07/10/2015
2-39-51930-2-39-61074 LCD DNS SK-200 07/10/2015
2-39-51930-2-39-61074 LCD DNS SK-200 07/10/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 07/03/2015
EEMP-0021X3 DNS 60B 07/02/2015
SQV175-14XX KLA/Prometrix RS35 06/30/2015
Phasetronics PTR1000 120 KB 69039 Control Assembly Novellus / Gasonics PEP3510 06/29/2015
Computer FC-9821Ka DNS 80A 06/26/2015
903-1598 PCB-EOP/Pressure ControlIPC SPA L_3510 Gasonics 06/24/2015
EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07 DNS 80B 06/24/2015
50-188N PCB -RMX Control Board MRC/Eclipse 4 CVD-PVD 06/24/2015
spin board EESC-0012 DNS 80B 06/23/2015
spin board EESC-0012 DNS 80B 06/23/2015
spin board EESC-0012 DNS 80B 06/23/2015
spin board EESC-0012 DNS 80B 06/23/2015
CEML-0014 DS-LAN BOARD/2-VC-1075-1 IF01068A DNS 80B 06/18/2015
Computer FC-9821Ka DNS 80A 06/18/2015
maintenance panel CESP-002 (Coat) DNS 80B 06/07/2015
spin board EESC-0012 DNS 80B 06/03/2015
spin board EESC-0012 DNS 80B 06/03/2015
spin board EESC-0012 DNS 80B 06/03/2015
spin board EESC-0012 DNS 80B 06/03/2015
FRD-4 2-39-4543-1 DNS 80B 06/02/2015
FRD-4 2-39-4543-1 DNS 80B 06/02/2015
0190-09379 ASSy VME CPU Synergy Upgrade Applied Materials P5000 05/29/2015
Brooks ACE 001-4130-03 VCE Controller LAM and others 05/27/2015
spin board EESC-0012 DNS 80B 05/15/2015
spin board EESC-0012 DNS 80B 05/15/2015
spin board EESC-0012 DNS 80B 05/15/2015
spin board EESC-0012 DNS 80B 05/15/2015
maintenance panel CESP-002 (Coat) DNS 80B 05/12/2015
servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 DNS 80B 05/12/2015
maintenance panel CESP-002 (Coat) DNS 80B 05/12/2015
2-39-51930-2-39-61074 SN 001003BB LCD DNS SK-200 05/10/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 05/05/2015
JZ15-30549 LCD DNS SK-200 04/28/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 04/28/2015
2-39-51930-2-39-61074 DNS SK-200 04/28/2015
8axis Controller 2-VC-15485 EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07 DNS 80B 04/28/2015
Little Giant Bl1100 04/28/2015
Unipower Vega 650 Lambda X65223B-ACFN Unknown 04/26/2015
Unipower Vega 650 Lambda X65223B-ACFN 04/24/2015
LK27 Canon I4 04/24/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 04/23/2015
spin board EESC-0012 DNS 80B 04/22/2015
spin board EESC-0012 DNS 80B 04/22/2015
spin board EESC-0012 DNS 80B 04/22/2015
spin board EESC-0012 DNS 80B 04/22/2015
PMT AIT 1 KLA 341444 04/06/2015
PMT AIT 1 KLA 341444 04/06/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 04/03/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 04/01/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 04/01/2015
Brooks ACE 001-4130-03 VCE Controller LAM and others 03/31/2015
spin board EESC-0012 DNS 80B 03/27/2015
Indexer EEDC-0011 DNS 80B 03/27/2015
spin board EESC-0012 DNS 80B 03/27/2015
spin board EESC-0012 DNS 80B 03/27/2015
Indexer EEDC-0011 DNS 80B 03/27/2015
CEBB-1011 Station Controller Board BAKE DNS 60A 03/26/2015
001-3252-133 03/24/2015
001-3252-133 03/24/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 03/20/2015
2114B-30SLQST CYONICS-UNIPHASE KLA 6220 6420 03/20/2015
0010-20498 ASSY +/- 15V POWER SUPPLY GEN RACK DBA-5CENTURA/ENDURA 03/09/2015
95-3154 95-0547 microwave min Novellus / Gasonics PEP3510 02/26/2015
90-2590 L_3510 02/19/2015
90-2590 L_3510 02/19/2015
UDX5107N Vexta 5-Phase Driver Exchange DNS 80B 02/19/2015
SQV175-14XX KLA/Prometrix RS35 02/17/2015
spin board EESC-0012 DNS 80B 02/11/2015
0190-76043 Synergy CPU 68040 Controller Applied Materials V440 02/11/2015
spin board EESC-0012 DNS 80B 02/11/2015
Brooks ACE 001-4130-03 VCE Controller LAM and others 02/10/2015
spin board EESC-0012 80b 02/03/2015
spin board EESC-0012 DNS 80B 02/03/2015
95-0541 MISC mini-controller Novellus / Gasonics PEP3510 01/29/2015
95-0537 gas box mini controller 95-2977 Novellus / Gasonics PEP3510 01/29/2015
0090-75014 Synergy CPU Applied Materials V440 (V21) 01/29/2015
95-3154 95-0547 microwave min Novellus / Gasonics PEP3510 01/29/2015
maintenance panel CESP-0002 (Coater) DNS 80B 01/26/2015
maintenance panel CESP-001A (Coater) DNS 80B 01/26/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 01/26/2015
maintenance panel CESP-0018 (Develop) DNS 80B 01/26/2015
SQV175-14XX KLA/Prometrix RS35 01/22/2015
SQV175-14XX KLA/Prometrix RS35 01/22/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 01/22/2015
36-0042 Analog Power Supply KLA/Prometrix RS-35 01/19/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 01/19/2015
EESA-001A1 servo amp AU6356N20 and EESA-001 DNS 80B 01/19/2015
52-0616 ME Box KLA/Prometrix RS-75 01/19/2015
spin board EESC-0012 DNS 80B 01/10/2015
AG09 Lamp Power Unit Hamamatsu L6299 01/06/2015
AG09 Lamp Power Unit Hamamatsu L6299 12/29/2014
AG09 Lamp Power Unit Hamamatsu L6299 12/29/2014
LCD power board ZD75-0524 DNS 80B 12/04/2014
AG09 Lamp Power Unit Hamamatsu L6299 11/18/2014
AG09 Lamp Power Unit Hamamatsu L6299 11/18/2014
spin board EESC-0012 80b 11/06/2014
spin board EESC-0012 80b 10/21/2014
maintenance panel CESP-0017X2 (Coater) DNS 80B 10/15/2014
AG09 Lamp Power Unit Hamamatsu L6299 10/15/2014
spin board EESC-0012 80b 10/10/2014
AG09 Lamp Power Unit Hamamatsu L6299 09/27/2014
AG09 Lamp Power Unit Hamamatsu L6299 09/27/2014
spin board EESC-0012 80b 09/27/2014
54-0005 Current Source KLA/Prometrix RS-35 09/23/2014
36-0004 Current Source KLA/Prometrix RS-35 09/23/2014
spin board EESC-0012 80b 09/23/2014
spin board EESC-0012 80b 09/23/2014
M400 09/18/2014
1-39-028 Pump Controller IDI-400 09/08/2014
maintenance panel CESP-0017X2 (Coater) 80B 09/01/2014
mother board 1-130-020 IDI M300 02/18/2014
mother board 1-130-020 IDI M300 02/18/2014
mother board 1-130-020 IDI M300 02/18/2014
pump controller card 1-139-022 IDI M300 02/18/2014
com card 1-139-023 IDI M300 02/18/2014