B EEMP-0021X3, EEMP-0013 LCD Monitors – Color and Monochrome

Posted on July 22, 2015 by Currentflow

DNS part numbers EEMP-0021X3 and EEMP-0013 are LCD monitors that can be used in either the 60A, 60B, 80A, or 80B tracks, depending on the track configuration.

Monitor installed in DNS 80B

Monitor installed in DNS 80B, telescoped out

These can fail or malfunction if installed in a tool not configured for that exact part number. EEMP-0021X3 is a full color display, whereas EEMP-0013 is a monochrome display.

DNS EEMP-0013 Monochrome LCD monitor installed in 80B

DNS EEMP-0021X3 Color LCD monitor installed in 80B

A known symptom of color vs. monochrome incompatibility is loss of directional sync on the monitor. The screen image will continuously and uncontrollably “roll” like the images in a slot machine. Another failure symptom is no image at all, but this is less likely a compatibility issue as opposed to general circuit failure. In either case, GetSpares.com maintains a fully operational DNS 80B track and parts, as well as the capability to repair and test parts. If your DNS LCD monitor is failing, contact GetSpares for quality repair/replacement solutions.

Removing Power Supply From Hamamatsu L6001/L6299 UV-Spot Light Source

Posted on July 14, 2015 by Currentflow

These Hamamatsu UV-Spot Light Sources can be found on spin coat tracks such as the Dainippon Screen DNS-80, DNS-60, SK200 and others. GetSpares.com, LLC has them in stock fully tested and ready.

L6001 From DNS SK200

The part number for the whole exposure assembly is L6001/L6299. One of the common failure modes is when the UV light will not ignite or has a weak output. The obvious culprits are the 50Volt igniter and the lamp part number L6190 / DNS 2-39-51072. Assuming that those are known to be good, the next common failure is with the AG09 50V power supply. These power supplies units can easily be swapped out with 8 screws in less than 10 minutes.

8 Screws to remove power unit

Dainippon Screen -80B Schematics Lists

Posted on June 23, 2015 by Currentflow

List of schematics for DNS 80B tracks. Here is a list of schematics for control schematics.

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
ELECTRICAL CIRCUIT DIAGRAM LIST
HIGH PRESSURE GENERATION UNIT
JEHP-005
co2 BUBBLING CONTROLLER
SECO-1053
cog BUBBLING UNIT
SECV-104
MAINTENANCE PANEL [ SPIN UNIT 1
CESP-0015
STEPDOWN TRANSFORMER
9EDT-101A
STEPDOWN TRANSFORMER
9EDT-111A
STEPDOWN TRANSFORMER
9EDT-201A
STEPDOWN TRANSFORMER
9EDT-211A

2/9
STATION CONTROLLER [ INDEXER UNIT ]
EEDC-0011
STATION CONTROLLER [ TRANSPORT UNIT ]
EERC-0011
STATION CONTROLLER [ SPIN UNIT ]
EESC-0011
STATION CONTROLLER [ BAKE UNIT ]
EEBC-0012
STATION CONTROLLER [ UEEW UNIT ]
EEEC-002
STATION CONTROLLER [ IF-B UNIT ]
EEEB-001
MAIN I/0 IFC BOX
EEMH-001
MAIN EXTERNAL IFC BOX
EEMI-001
STATION CONTROLLER
EEYC-0#11
MAIN PANEL [ STANDARD TYPE ]
EEMP-001#
MAIN PANEL [ MOTORED TYPE ]
EEMP-0112
INDEXER PANEL
EEDP-001
PORTABLE PANEL IFC BOX
EEMJ-002

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
3/9
INDEXER A UNIT [ VACUUMLESS TYPE ]
EED#-001
INDEXER A UNIT [ VACUUM TYPE ]
EED#-0#1#
INTERFACE UNIT [ TYPE B ]
EEI#-####
TRANSPORT UNIT
EERM-OO1

4/9

SPIN UNIT [ COATER ]
EESM-0O1

SPIN UNIT [ POSITIVE DEVELOPER ]
EESM-O02

SPIN UNIT [ PIQ COATER ]
EESM-003

SPIN UNIT [ SCRUBBER ]
EESM-030

SPIN VACUUM SENSOR
EEFT-O01

SPIN CUP [ COATER, POSITIVE DEVELOPER ]
EESM~010

SPIN CUP [ MOTORED EBR NOZZLE ]
EES#-011

SPIN COVER
EESM-O20

RESIST PUMP CYLINDER SENSOR
EEFT-021

SPIN TWO-WAY WASTE DRAIN
EEFT-O51

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
5/9

CHEMICAL FLOW/LEVEL SENSOR
E##-0#1

SPIN CHEMICAL IFC BOX
EEFH-001

SPIN IFC BOARD
EESD-O01

EXTERNAL ALARM IFC BOARD
EEKD-O01

CHEMICAL FLOW/LEVEL SENSOR IFC BOARD
EEFD-001

D-SONIC IFC BOX
EEFI-001

EXHAUST CONTROLLER
EESW-0#1

DRAIN BOX SENSOR
EEFT-O#11

AUTO-DRAIN BOX SENSOR
EEC#-0#1

DIRECT-DRAIN SENSOR
EEFT-O71

SV IFC BOARD
EECS-O#1
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST

6/9

BAKE UNIT [ HP(HH,AH) ]
EEBM-O##
BAKE UNIT [ CP(AC) ]
EEBN-O#1
BAKE UNIT [ LPAH ]
EEBO-0#1
BAKE SV
EEBS-010
BAKE IFC BOARD
EEBD-O01
HEATER CONTROLLER
EEB#-0O1##
COMMON T0 CHEMICAL CONTROLLER
EEC#-001
CHEMICAL CONTROLLER [ SD ONLY ]
EEC#-011
CHEMICAL CONTROLLER [ SC+SD TYPE ]
EEC#-001
SwITCHINC BOTTLES SENSOR
EECN-0#1
AUTO-SUPPLY SYSTEM SENSOR
EECN-0#11

7/9

LOWER LIMIT SENSOR
EEH#-0#1
EXHAUST SOURCE PRESSURE SENSOR
EEHW-O#1
DIW SOURCE PRESSURE SENSOR [ SPIN UNIT ]
EEHW-011
SOURCE PRESSURE SENSOR
EE##”OO1
LEAKAGE SENSOR
EEHY-O11
CIRCUIT BREAKER BOX
EEPB-00#
AC POWER SUPPLY
EEP#-00#
MAIN POWER ON/OFF SWITCH BOX
EEMK-001
EMERGENCY POWER OFF SWITCH
EEPI-OO1

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST

8/9
TOWER-LAMP
EEMT-0O1

DEEW UNIT
EEUM-0O2

IMAGE SENSOR CONTROLLER
EEUE-001
DEEW POWER SUPPLY BOX
EEUB-001
HOST,AGV IFC BOX
EEMX-00#1

DRIVER UNIT POWER RELAY CABLE
EEKL-OO1

9/9
AIR CONDITIONING UNIT ALARM CABLE
EEHW-0#1

CABLE CONNECTION [ MAIN CONTROLLER ]
EEML-001

CABLE CONNECTION [ INDEXER UNIT ]
EEDL-O01

CABLE CONNECTION [ TRANSPORT UNIT ]
EERL-001

CABLE CONNECTION [ SPIN UNIT ]
EESL-O01

CABLE CONNECTION [ SPIN CHEMICAL IFC BOX ]
EEFL-OO1

CABLE CONNECTION [ BAKE UNIT ]
EEBLâ-O01

CABLE CONNECTION [ CHEMICAL CONTROLLER ]
EECLâ-O01

CABLE CONNECTION [ ALARM IFC BOX ]
EEHL-O01

CABLE CONNECTION [ INTERFACE UNIT (TYPE B) ]

CABLE CONNECTION [ UEEW UNIT ]
EEEL-0O1

CABLE CONNECTION [ DEEW UNIT ]
EEUL-O01

Controls Parts List for DNS 80B

Posted on June 22, 2015 by Currentflow

Trouble finding the right part number for your DNS 80B part? Look no further! We scanned and OCR’ed the official Dainippon Screen Parts List for your convenience. Peruse the results below. Contact www.GetSpares.com for replacement or repair solutions on the parts you need.

DNS 80B Control Units Parts List 1/3

DNS 80B Control Units Parts List 2/3

DNS 80B Control Units Parts List 3/3

SERVICE ‘PARTS LIST (80B).x1s Z§_,_C_Qnj’__r_Q_I_U_n_i_t

REV.5.1 00.09
No A PARTS NAME APPLICATION TYPE PARTS No. DEL. MANUFACTURER REMARKS DIV. REV.
1 Indexer board ID-A EEDC-0011 2-VC-19089

2 Indexer board ID-A EEDC-0012 2-VC-34410 4

3 IF-B board (Type 1) IF-B EEIB-O01 2-VC-18166 1
14 IF-B board (Type 2) IF-B EEIC—OO1 2-VC*19284 1
5 IF-B board IF-B EEIC-0012 2-VC-19284-2 4
6 Transport board Transport unit EERC~O012 2-VC-19090-1 3
7 Spin board Spin EESC-0012 2-VC-19115

:3 Bake board Bake EEBC-0012 2-VC-19116

S9 Bake board Bake EEBC-0013 2-VC-34409 4
10 EEW board DEEW 2-VC-18987 1
11 EEW board DEEW EEUC-0013 2-VC-18987-4 4
12 EEW board DEEW EEUC-0014 2-VC-18987-5 4
13 EEW board DEEW EEUC-0015 2-VC-18987-6 4
14 EEW board UEEW EEEC-O02 2-VC-16147-2 1
15 Spin IFC board I Spin EESD-O01 2-VC-16027

16 EBR IFC bard Spin EESD-O11 2-VC—17102

17 Bake IFC board Bake EEBD—OO1 2-VC-16010

18 DS-LAN board *1 Main controller CEML-0014 2-VC-10751-3 3

19 DS-LAN board *1 Main controller CEML-0014 2-VC-10751-4 5
20 DS-LAN board *1 Main controller CEML~0O16 2-VC-10751-5 5
21 Parallel I/O board *1 Main controller CEMI-0011 2-VC-09977-1
22 RAS board Main controller FC-9801-06K 2-39-48605 NEC gg;380lB/2
23 Simplified RAS board Main controller PC-9821KE-E06 2~39-59409 NEC 5
24 Main controller FC-9821X/2 2-VB-25463
25 Main controller FC-9821X/2 2-VB-25463
26 HD adapter Main controller FC-9821KA-E01 2-39-59405 NEC 5
27 Hard disk drive Main controller §Cgg8ﬁ$XA-HD1 2-39-59406 NBC 5
28 Copy board *1 Copy for main panel CEMG-O01 2-VC-20712 2
29 Copy board *1 Copy for main panel CEMG-0021 2-VC-24889 3
30 Station controller STANDARD (20 SLOTS) EEYC-0011 2-VC-20626 2
31 Station controller 28 SLOTS TYPE EEYC-O111 2-VC-20627 . 2
32 Station controller 11 SLOTS TYPE EEYC-003 2-VC-34399 5
33 GEM controller EEMZ-001 2-VC-25207-1 3
34 GEM controller EEMZ—0O11 2-VC—25207-2 5
35 1/0 unit box Main controller EEMH-001 2-VC-16705
36 Heater controller Bake unit(Max.8 HP) EEBH-0011 2-VC*162l7-1

37 Heater controller Bake unit EEBH~6011 2-VC-34885 CE TYPE 5
ﬂmwm‘ 38 Servo amplifier Spin motor drive AU6356N20 2-39-53462 3
. 39 Servo amplifier Spin motor drive (8OB) EESA-0O1A1 2-VC-16396-2
40 AC power supply Primary AC power input/ EEPH-001 2-VC-16214
Secondary power output
UPS *l*2 Main controller back-up PS500 2-39-55593 HEIAN ELE §;fg“f$fHmJ%Ei 3.1
41 . 121368. (There is 5 UL
label on the backside
of the main body.)
42 Main panel EEMP-0013 2-VC-21746 2
43 Main panel Motor—drive EEMP-0112 2-VC-21747-1 2
44 Main panel Motor-drive EEMP-0113 2-VC-28117
45 Portable main panel EEMP-0212 2~VC-21717 2
46 ID-A panel ID-A EEDP—O01A 2-VC-14786-7 5
47 Maintenance panel ‘ *1 Spin unit CESP-0017 2-VC-10752-6 3
48 Maintenance panel UEEW EEEP-001 2-VC-17848-1 3
49 5 axis motor driver I EEKB-0011 2-VC-26961
50 8 axis motor driver ID—A/Transport Unit EEKA-001 2-VC-15485
51 8 axis motor driver ID-A/Transport Unit EEKA-0011 2-VC~23936

PORP (Incl. Printer) Edit Recipe on Portable
Personal Computer
Book type Personal comp. PC-9801NS/T40
Memory Card (8MB) RCS-8000
52 Application Software PS-98-1002-32 Ver.3.3D
Cable PORP-Printer PC-9801N-19
Printer PC-PR150N
PORP (Not incl. Printer) Edit Recipe on Portable
Personal Computer
Book type Personal comp. PC-9801NS/T40
53 Memory Card (8MB) RCS-8000
Application Software PS-98-1002-32 Ver.3.3D
Cable PORP-User’s Printer PC-9801N—19
54 EBR motor driver EBR CSD5807N-P 2-39-46547
CP power supply unit Cooling plate MR-2015 ﬁg; 2-39~45432
‘K 56 CP controller Cooling plate FRD-4 1 2-39-45431
57 Chemical temp controller INR-244-402 2-39-45751
58 Circulator Chemical temp controller INR-244—404 (2oov) 2-39-45750
59 Circulator Chemical temp controller INR-244-406 (220V) 2-39-48373
60 Panel Chemical Temp Controller INR-244-403 2-39-48374 1
61 WCDS controller *1 For photoresist CECC~4012 2-VC-19786-1 2
62 WCDS panel *1 For photoresist CECP-001 2-VC-14144-1 2
63 Air elimination control. For photoresist PDS-1602 2-39-48738 2
*1
64 Air elimination panel *1 For photoresist PDS-1520 2-39-47429 2
65 Battery unit UPS Type BT-2-48(2Ah-4 48V) 2-39-58575
66 Fuse UPS Type (UL) TSC-8A 2-39-58576 s. 0. C
67 UPS with a Cable Main controller back-up CEMD-0012 2-VC-09974-1 HEIAN ELE
68 Video measure sensor DEEW EEUE-001B 2-VC-30392 Z4LC-CD2 TYPE 3.1
controller
Video measure sensor DEEW EEVE-001 2-VC-18989 3X2CA—PLC8 TYPE 4
69 controller
*1 Common to 80A
*2 back-up time comes to be shorter by degrees because the inside battery getting old.

Contact www.GetSpares.com for replacement or repair solutions on the parts you need.

2-39-45431 Thermostatic Unit FRD-4, Cool Plate Controller for DNS 80B

Posted on June 22, 2015 by Currentflow

The FRD-4 Thermostatic Unit serves as the controller for cool plates in the DNS 80B track. This unit is known to fail and can cause communication errors in the bake/cool process.

Front view of FRD-4 for DNS 80B

Cool Plate Controller Communication Error in DNS 80B caused by faulty FRD-4

Front view of FRD-4 installed in DNS 80B. Check communication 5V power at the output connectors.

A good way to quickly check whether or not the FRD-4 communication circuit is functional is to check voltage on one of the output cables to cool plate units. The output cables connect to the right-most ports on the FRD-4. Each of them has a red wire and black wire that carry 5V DC power. Backprobe one of these connectors while it is connected to a live FRD-4 to verify the 5V power. If there is no voltage, the communication logic on-board the FRD-4 has suffered critical failure. Contact GetSpares.com for replacement or repair solutions.

Power Supply in Main Computer FC-9821Ka for DNS 80A/80B (not FC-9821Ke)

Posted on June 18, 2015 by Currentflow

The DNS 80A and 80B tracks have varying main computers depending on the serial number and configuration of the track. This article discusses the power supply for a FC-9821Ka computer, which is not the same as the FC-9821Ke. Before following the diagnostic procedure below, ensure that the computer you are inspecting is the Ka.

Front view of DNS 80 FC9821Ka main computer

Rear view of DNS 80 FC9821Ka main computer

View of an FC-9821Ke installed in the DNS 80B (very similar appearance to FC-9821Ka)

The power supply is mounted on the inside of the back wall of the computer box. Molex cables drop down to the motherboard and attach to five connectors to power the majority of the computer (a separate cable goes to the hard drive). Below is a photograph of these connections viewed from the side. An illustrated representation of these connections has also been provided (drawn from the perspective of facing forward from the rear of the computer and looking top-down onto the motherboard).

Image of power supply connections to DNS 80A/B FC2981Ka motherboard

Top-down view illustrated representation of power supply connections to DNS 80A/B FC9821Ka motherboard

The black wires are all connected to GND. Relative to GND the DC levels on the other wires are as follows (assume pin 1 is the leftmost for each connector in above illustration):

DC1:

1) EMPTY

2) RED — +5V Vcc

3) ORANGE — +12V

4) BLUE — -12V (note this is a negative supply)

5) 6) BLACK — GND

DC2:

1) 2) BLACK — GND

3) EMPTY

4) 5) 6) RED — +5V Vcc

DC3:

1) 2) 3) GREEN — +5V Vdd

4) 5) 6) BLACK — GND

DC9:

1) WHITE — +2.015V

2) 3) RED — +5V Vcc

DC10:

1) 2) 3) WHITE — these are actually unused. Note that these wires lead to an interconnect which does not involve these conductors (in other words, they are floating).

4) BLACK — GND

5) 6) RED — +5.082V *NOT Vcc – these are an isolated 5V supply*

7) WHITE — +5.049V

If your DNS 80 track is completely inoperable/dead, you may have a bad computer. And it may be as simple as a dead supply. Or the computer may need to be replaced (i.e. bad motherboard). Check the DC voltages out of the supply. If you don’t get these numbers, the supply is the culprit. If you do get these numbers, the motherboard is likely bad. In either case, contact www.GetSpares.com to seek repair or replacement.

DNS SK200 LCD Panels 2-39-51930, 2-39-61074, 001003BB, and 978009BB

Posted on May 5, 2015 by Currentflow

The LCD screen interface for DNS SK 200 developer track can become dim or shaky. You can get this part replaced or serviced at GetSpares.com. Replacement parts are pulled from fully operational tools in the GetSpares warehouse, so you know the parts are good. LCD screen part numbers listed below – get yours today!

2-39-51930 or 978009BB

2-39-61074 or 001003BB

UT3-F1AE / DSS1-A

Front View 2-39-51930

Front View 2-39-61074

Rear View 2-39-51930

Rear View 2-39-61074

Maintenance Panels CESP-001A, CESP-0017, CESP-0018, CESP-002 for DNS80B track

Posted on March 20, 2015 by Currentflow

GetSpares.com has good parts for sale in a fully operational DNS 80B wafer spin coating track.

These are the part numbers for the manual control Maintenance Panels:

CESP-001A – Panel with pump control through PCN5

CESP-0017X2 -Panel with pump control through PCN5

CESP-0017 -Panel (No PCN5)

CESP-0018 – Panel (No PCN5)

CESP-002 – Panel (No PCN5)

CESP-0012 – Panel (No PCN5)

Head to GetSpares.com to order the parts you need.

Maintenance Panel CESP_0017 and similar. DNS 80B

DNS 80B

AU6356N2( a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) Servo Amp Controller for DNS 80B Coat and Develop Tracks

Posted on February 23, 2015 by Currentflow

Servo amps AU6356N2 (a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) are sitting in a fully functional track, ready to be pulled and sent to you when you need it. In DNS 80B tracks, these electronic modules control the spin of a wafer in the coating and developing processes. The common failure mode is loss of LED indication on the connection panel and erratic or non existent motor control. GetSpares.com keeps these modules installed in fully operational tracks in their warehouse inventory, so you know they are working. When you order a module, it’s pulled from the track and shipped. Head to GetSpares.com and order yours today!

DNS80B: Wafer in coater ready for spin

DNS80B: Wafer after spin

DNS80B: Electronic Module Cabinet

DNS80B: AU3656N20 Servo Amp Controllers

When you no longer see the LEDS illuminate in the top right cutout, the module needs to be replaced.

DNS80B – Cassette, Arm, Track

Front view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR) installed in track

Top view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR)

Hamamatsu L6299 UV Light – Low or No Output Causing Underexposure

Posted on November 17, 2014 by Currentflow

Is your Hamamatsu L6299 UV light underexposing or not turning on at all? If you have checked the lamp and igniter, it is very likely a problem with your lamp power unit. This is part number AG09. These boards are taken from fully functional DNS tracks at GetSpares.com. To test yourself, all you need is a high power 10 ohm resistor. Note that any time you are working with power supply boards, there are high voltages that can be deadly. If you are not comfortable working around voltages as high as 400V do not try any of these tests.

Check HV Tabs Loaded and Unloaded. Also make sure input power is ok.

First thing to check is that the open circuit voltage is between 50 and 55V. Open circuit means that everything is disconnected from the HV+ and HV- tabs as illustrated above. If it is not withing this voltage, there is a problem with the board and it should be repaired. If it passes this test, the next step is to load it with the 10 ohm resistor.

With 10 ohms connected to the HV+ and the HV- tabs, the voltage should be no less than 33V across the resistor. If it is lower than that, there is a problem with the board and it should be repaired.

Information Repository

Comvolt

Category Archives: Photolithography