Before and after repair we process wafers with a variety of recipies like this one. This is a reference point for a working tool used for communicing symptoms and troubleshooting problems.
This process is used to test electronic control boards in L3510 etcher/asher.
PCB’s that apply but not limited to are:
15451-010, PCB-EOP/Pressure Control IPC SPA
Branson/IPC,
16495-01-REV.7.4 , I/O interface ,16495-01E
16498-01, Display Driver,
16495-01B, 16495-01
90-2590, 89-2572,
| GetSpares | CESP-002 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 05/02/2019 | Repaired/shipped | |
| GetSpares | TESP-002A2 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 05/02/2019 | Custom solution/shipped | |
| GetSpares | PCS4900/DELL Therma-Wave Single board computer | Opti-probe 2600-2690 3260-3290 Thermawave/KLA Inspection | 05/02/2019 | Repaired/shipped | |
| GetSpares | CESB-1011 DNS Spin control board. Station Controller DNS | 80A DNS Photolithograpy | 04/17/2019 | Repaired/shipped | |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface | L3510 Novellus/Gasonics RIE/Plasma | 04/12/2019 | Repaired/shipped | |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface | L3510 Novellus/Gasonics RIE/Plasma | 04/12/2019 | Custom solution/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/11/2019 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/11/2019 | Custom solution/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/01/2019 | Repaired/shipped | |
| GetSpares | CESP-0002 2-VC-42102 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 03/28/2019 | Repaired/shipped | |
| GetSpares | CESP-0002 2-VC-42102 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 03/28/2019 | Custom solution/shipped | |
| GetSpares | 36-0201 54-0219 Prometrix H2 Interface PCB for UV1050/UV1250 | UV1050 Tencor/KLA Inspection | 12/14/2018 | Repaired/shipped | |
| GetSpares | 36-0294 Prometrix Turret Servo Driver 54-0294 | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
| GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Custom solution/shipped | |
| GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
| GetSpares | 36-0294 Prometrix Turret Servo Driver 54-0294 | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers | ASML chiller Neslab Chiller | 10/05/2018 | Repaired/shipped | |
| GetSpares | EST0220C05WNXE1 SMC Smart Terminal | INR-497-001B SMC Water Chiller | 09/10/2018 | Repaired/shipped | |
| GetSpares | PS500 2-39-55593 DNS Battery backed power supply | 80B DNS Photolithograpy | 07/15/2018 | Repaired/shipped | |
| GetSpares | EEBH-0011X1 DNS heater control bake unit | 80B DNS Photolithograpy | 06/28/2018 | Repaired/shipped | |
| GetSpares | 780-14091-000 KLA CD Sem Column Aligner | 8100 8100XP 8100XPR 8250 8300 8450 KLA SEM | 06/05/2018 | Custom solution/shipped | |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers | ASML chiller Neslab Chiller | 05/23/2018 | Custom solution/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB | RS55 Prometrix/KLA Wafer Resistivity | 02/04/2016 | Repaired/shipped |
This is a story of two Cluster Misc Controller from a Novellus / Gasonics PEP 3510. There are other Cluster-Misc boxes, but the ones we see frequently from
are the 95-3155 and the 95-0538. They are identical and work exactly the same…WRONG!! Check your PEP-3510 to make sure which one you have. The 95-3155 has a J6 connector called AC Power/PWR Detect. The 95-0538 does not. These two boxes are almost identical except if used in place of each other, there can be status errors reported in the tool and it can cause wafers to halt or not run at all.
Check J6 connector on your Cluster Misc Controller
Common error codes due to failure for these boxes are:
“Door won’t close in a reasonable amount of time”
“CC-0520 Cluster Misc-Invalid status data in Left Cooler”
“CC-0810 Cluster Misc-Invalid status data in Right Cassette”
“CC-0710 Cluster Misc-Invalid status data in Left Cassette”
“CC-0620 Cluster Misc-Invalid status data in Right Cooler”
“CC-0616 Cluster Misc-Service error in Right Cooler”
As always, if you think your PEP 3510 or any other Semiconductor tool needs parts, contact
PCB 903-1598 controlls the gas pressure valves for GaSonics L3510 chamber during the End Of Process (EOP). This board is known to fail, causing deficient to zero throttle valve control during EOP. If you’re experiencing these or similar symptoms, contact GetSpares.com for replacement/repair solutions. GetSpares maintains fully operational L3510 tools, which means fully operational test environments for all relevant parts. Rest assured that the part you receive from GetSpares will be fully functional.
GaSonics L3510 EOP Pressure Controller 903-1598 PCB
GetSpares.com has good parts for sale in a fully operational GaSonics L3510 Plasma Ashing System.
These are the part numbers for the Electronic IO Modules:
90-2590
16495
Head to GetSpares.com to order the parts you need.
IO Board 90-2590 for GaSonics L3510
GaSonics L3510
The GaSonics PEP3510 ashing and etching system offers two parallel process chambers, each governed by a set of three electronic modules referred to as mini-controllers. The relevant part numbers for each mini-controller are listed below:
Miscellaneous: 95-3978, 95-3157, 95-0541
Microwave: 95-0547, 95-3154
Gas Box: 95-0537, 95-2977
Failure of these mini-controllers is frequent and can result in an array of malfunctions including loss of communication, loss of door/lamp/wafer pin control, invalid status errors, and over-reading power output of the microwave.
GetSpares.com has these mini-controllers currently installed in a fully functional PEP3510. They are ready to be pulled and shipped to you today. Head to GetSpares.com for your parts needs!
Process Mini Controllers – front
Process Mini Controllers – rear
Novellus GaSonics PEP3510
Novellus GaSonics PEP3510