These are the part numbers for the Electronic IO Modules:
90-2590
16495
Head to GetSpares.com to order the parts you need.
IO Board 90-2590 for GaSonics L3510
GaSonics L3510
IO Boards 90-2590 and 16495 for GaSonics L3510 Plasma Ashing System
GetSpares.com has good parts for sale in a fully operational GaSonics L3510 Plasma Ashing System.
