Leybold UL-500 Error Codes during Boot – EF, EH, FH, AH, BH, CH – 20061966

These are common error codes for the Leybold Ultratest UL-500 Helium Leak Detector used to test chamber conditions in many semiconductor processing equipment.  Failure on part 20061966.  Good news!  It can be repaired.  Contact info@comvolt.com.

ER1:CHECK ERROR E.O 92H:
Error within the internal V.24 connection.
ER1:CHECK ERROR ID 93H:
Error within the internal V.24 connection.

ER1:TIME OUT IDENT 95H:

Error within the internal V.24 connection.

ER1:TIME OUT INIT 96H:

Error within the internal V.24 connection.

ER1:DSR INACTIV INIT 97H:

Error within the internal V.24 connection.

ER1:DSR INACTIV 98H:

Error within the internal V.24 connection.

ER1:TIME OUT ECHO O 9AH:

Error within the internal V.24 connection.

ER1:ACIA-OVERRUN 9BH:

Error within the internal V.24 connection.

ER1:DSR AKTIV 9CH:

Error within the internal V.24 connection.

ER1:PARITY-ERROR 9EH:

Error within the internal V.24 connection.

ER1:DATA LOST 9FH:

Error within the internal V.24 connection.

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