Another Sample of Failed Semiconductor Fab Electonics and Happy Endings

Posted on May 16, 2019 by Currentflow

GetSpares	CESP-002 DNS maintenance panel with SCN5	80B DNS Photolithograpy	05/02/2019	Repaired/shipped
GetSpares	TESP-002A2 DNS maintenance panel with SCN5	80B DNS Photolithograpy	05/02/2019	Custom solution/shipped
GetSpares	PCS4900/DELL Therma-Wave Single board computer	Opti-probe 2600-2690 3260-3290 Thermawave/KLA Inspection	05/02/2019	Repaired/shipped
GetSpares	CESB-1011 DNS Spin control board. Station Controller DNS	80A DNS Photolithograpy	04/17/2019	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/12/2019	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/12/2019	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/11/2019	Repaired/shipped

GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/11/2019	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/01/2019	Repaired/shipped
GetSpares	CESP-0002 2-VC-42102 DNS maintenance panel with SCN5	80B DNS Photolithograpy	03/28/2019	Repaired/shipped
GetSpares	CESP-0002 2-VC-42102 DNS maintenance panel with SCN5	80B DNS Photolithograpy	03/28/2019	Custom solution/shipped
GetSpares	36-0201 54-0219 Prometrix H2 Interface PCB for UV1050/UV1250	UV1050 Tencor/KLA Inspection	12/14/2018	Repaired/shipped
GetSpares	36-0294 Prometrix Turret Servo Driver 54-0294	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Custom solution/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	36-0294 Prometrix Turret Servo Driver 54-0294	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	10/05/2018	Repaired/shipped
GetSpares	EST0220C05WNXE1 SMC Smart Terminal	INR-497-001B SMC Water Chiller	09/10/2018	Repaired/shipped
GetSpares	PS500 2-39-55593 DNS Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	EEBH-0011X1 DNS heater control bake unit	80B DNS Photolithograpy	06/28/2018	Repaired/shipped
GetSpares	780-14091-000 KLA CD Sem Column Aligner	8100 8100XP 8100XPR 8250 8300 8450 KLA SEM	06/05/2018	Custom solution/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	Custom solution/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	02/04/2016	Repaired/shipped

Recent Board Failures in a 6″/8″ Semiconductor Fab

Posted on January 21, 2019 by Currentflow

GetSpares
INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
01/04/2019
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Custom solution/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
For Sale/ Stock

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped

GetSpares
2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
12/04/2018
Repaired/shipped

GetSpares
Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
01/09/2019
Repaired/shipped

GetSpares
2-39-51930 2-39-61074 UT3-F1AE /DSS1-A
DNS
LCD Gold Version
SK200
DNS
Photolithograpy
12/21/2018
Custom solution/shipped

GetSpares
2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
12/21/2018
Custom solution/shipped

GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped

GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Custom solution/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped

GetSpares
INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
11/27/2018
Repaired/shipped

GetSpares
AG09
Hamamatsu
50V power supply for HgXe light.
80B
DNS
Photolithograpy
11/13/2018
Repaired/shipped

GetSpares
54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
12/14/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped

GetSpares
EESA-001 AU3575N233 2-39-48133
DNS
servo amp
80B
DNS
Photolithograpy
12/08/2018
Repaired/shipped

GetSpares
16498-01
Gasonics
Display Driver
L3510
Novellus/Gasonics
RIE/Plasma
11/27/2018
Repaired/shipped

GetSpares
2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
11/28/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
10/18/2018
For Sale/ Stock

GetSpares
2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
11/02/2018
Repaired/shipped

GetSpares
L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
10/04/2018
Repaired/shipped

GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
11/13/2018
Repaired/shipped

GetSpares
EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/16/2018
Repaired/shipped

GetSpares
EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
10/04/2018
Repaired/shipped

GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
10/15/2018
Repaired/shipped

GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
10/12/2018
Repaired/shipped

GetSpares
2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/20/2018
Repaired/shipped

GetSpares
EEYC-0011 2-VC-20626
DNS
20 slot – Cage for all the slave cards in front of track
80B
DNS
Photolithograpy
08/15/2018
Repaired/shipped

GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
09/24/2018
Custom solution/shipped

GetSpares
2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
09/13/2018
Repaired/shipped

GetSpares
EESC-0012 2-VC-19115 Spin Slave
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
09/12/2018
Repaired/shipped

GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
09/05/2018
Repaired/shipped

GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
05/15/2018
Repaired/shipped

GetSpares
BU504XII 2-XZ-10840
OMRON
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018
Repaired/shipped

GetSpares
001-4130-03
Brooks
Brooks ACE VCE Controller
LAM and others
Brooks
Robots
05/23/2018
Repaired/shipped

GetSpares
36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/17/2018
Repaired/shipped

GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
08/09/2018
Repaired/shipped

GetSpares
EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
08/21/2018
Repaired/shipped

GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
08/09/2018
Repaired/shipped

DNS 80B Track – Removing Supply from EEYC-0011 EEYC-0111 2-VC-20626 2-VC-20627

Posted on September 17, 2018 by Currentflow

This post shows how to remove the power supply from the side of the station controller for DNS 80B coater/developer tracks. There is no need to remove the whole card cage if you are sending in a repair. It would be too bulky. The part here can go by a variety of names such as EEYC-0011, EEYC-0111, 2-VC-20626 and 2-VC-20627. Remember contact www.GetSpares.com for this or any other semiconductor tool parts that you need. Here you go…

This is a rare case where we recommend that the customer open a part to send a controller by itself

More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

Posted on August 8, 2018 by Currentflow

GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/06/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	07/13/2018	Repaired/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	08/01/2018	Custom solution/shipped
GetSpares	36-0287 54-0287 RevAG Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	08/01/2018	For Sale/ Stock
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/01/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/24/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/24/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/19/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	07/13/2018	Repaired/shipped
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	07/02/2018	Repaired/shipped
GetSpares	BU504XII 2-XZ-10840 OMRON Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	PS500 2-39-55593 DNS Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/21/2018	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	07/11/2018	Repaired/shipped
GetSpares	EEBH-0011X1 DNS heater control bake unit	80B DNS Photolithograpy	06/28/2018	Repaired/shipped
GetSpares	EEBH-0011 DNS heater control bake unit	80B DNS Photolithograpy	06/19/2018	Repaired/shipped
GetSpares	2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit	80B DNS Photolithograpy	09/06/2017	Repaired/shipped
GetSpares	36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB	RS35 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	EEYC-001 DNS Cage for all the slave cards in front of track	80B DNS Photolithograpy	07/02/2018	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/02/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/13/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/13/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/21/2018	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	06/19/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0325 Prometrix controller that slides in from right horizontally.	RS75 Prometrix/KLA Wafer Resistivity	05/04/2018	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	06/06/2018	Repaired/shipped
GetSpares	95-3155 Gasonics Cluster Misc Controller With AC power detect J6	PEP3510 Novellus/Gasonics RIE/Plasma	07/28/2016	Repaired/shipped
GetSpares	567-5101 HV Supply Hitachi Hv supply for electron gun	Unknown CD SEM Hitachi SEM	05/22/2018	For Sale/ Stock
GetSpares	LSMUT_TF Comvolt Just an HV timer.	SMBUS_ASMU1 Comvolt lab tester	05/15/2018	Custom solution/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	06/01/2018	Repaired/shipped
GetSpares	001-4130-03 Brooks Brooks ACE VCE Controller	LAM and others Brooks Robots	05/23/2018	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	For Sale/ Stock
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/21/2018	For Sale/ Stock
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	05/15/2018	Repaired/shipped
GetSpares	810-025368-001 Lam Research Simple relay board. located in top left of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	10/21/2015	For Sale/ Stock
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/27/2018	For Sale/ Stock
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	03/27/2018	Repaired/shipped
GetSpares	CESB-2012 DNS Spin Board	80A DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/14/2018	Repaired/shipped
GetSpares	EEJA-001A DNS 6-axis controller based on the note on this unit.	80B DNS Photolithograpy	04/06/2018	Repaired/shipped
GetSpares	EESA-001 AU3575N223 DNS servo amp	80B DNS Photolithograpy	10/25/2017	For Sale/ Stock
GetSpares	D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001	SK200 DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001	SK200 DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	95-0541Misc Controller Gasonics	PEP3510 Novellus/Gasonics RIE/Plasma	10/27/2016	Repaired/shipped
GetSpares	1-139-023 IDI Communications Card	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-139-022 IDI Pump Controller	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Custom solution/shipped
GetSpares	810-025370—1 Lam Research Large rectangular board that controls and displays status leds	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	810-025369-002 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	810-025369-002 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	04/10/2018	Repaired/shipped
GetSpares	375039 Tencor Data Processing Board	AIT2 KLA Inspection	04/05/2018	Custom solution/shipped
GetSpares	810-025369-001 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/03/2018	Repaired/shipped
GetSpares	810-025370—1 Lam Research Large rectangular board that controls and displays status leds	Lam-TCU_2080 Lam Chiller	04/03/2018	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	04/03/2018	Repaired/shipped
GetSpares	Super Vexta UDX5107 Vexta 5 axis driver	80A DNS Photolithograpy	03/29/2018	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	03/22/2018	Repaired/shipped
GetSpares	3510N45E10 Tamagawa Tamagawa Motor AC servo	80B DNS Photolithograpy	03/19/2018	Repaired/shipped
GetSpares	373583 Tencor ANALOG BOARD	AIT2 KLA Inspection	06/22/2016	Repaired/shipped
GetSpares	SQV175-1433-2 Prometrix Power Supply	6220 KLA Inspection	02/28/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	01/29/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	01/29/2018	Repaired/shipped
GetSpares	0100-02016 0100-20066 AMAT Analog Sync Detect AMAT	P5000 Applied Materials AMAT RIE/Plasma	01/04/2018	For Sale/ Stock
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	02/15/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	02/15/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	02/15/2018	Repaired/shipped

Jumper Descriptions on Little Giant BL1100 – ZWorld C-Programmable Controller

Posted on March 26, 2018 by Currentflow

If you are doing a conversion form Zworlds little giant BL1100, start by understanding what the jumpers are and how they are connected to your application. Your new design will be dependent on the settings and will likely only need a fraction of the capability of this BL1100 board. We have seen some applications that use most of its functionality, but it is usually just a couple of IO ports and and communications ports…

Table B-4. Standard BL1100 Jumper Settings
Header Pins Description Factory
Default

J12

1–2

Connect for factory-default RS-232 or RS-485
programming mode, remove for run mode or
user-defined programming mode

Connected

6–10

CTC3 output drives CTC2

8–9

CTC2 output drives CTC3

6–11

CTC2 operates at 16X baud rate of z0

6–12

CTC2 operates at 16X baud rate of z1

8–11

CTC3 operates at 16X baud rate of z0

8–12

CTC3 operates at 16X baud rate of z1

9–11

CTC2 drives external clock at 1/16 z0 baud
rate

10–12

CTC3 drives external clock at 1/16 z1 baud
rate

1–2
J13

J14

J014

J15
J16
J17

SIO Port A to RS-232 (J8)

Connected

2–3

SIO Port A to RS-485 (J3)

3–4

ZIO Port 1 to RS-485 (J3)

1–4

ZIO Port 1 to RS-232 (J8)

1–2

SIO Port A to RS-485 (J3)

2–3

ZIO Port 1 to RS-485 (J3)

Connected

1–2

RX and TX clocks come from SIO

Connected

2–4

TX clock from SIO, RX clock from external
source via pins 3–4 of header J3/J301

1–2

SRAM smaller than 256K

2–3

SRAM 256K or larger

1–2

EPROM 32 K

2–4

EPROM larger than 32K

1–2

Connect to enable excitation resistors for
analog input signal conditioning op-amps

Connected

Connected
Connected
Not
connected

continued…

��

Table B-4. Standard BL1100 Jumper Settings (concluded)
Header

Pins

1–2
J18

Factory
Default

Description

RS-485 three-state always enabled

Connected

2–3

RS-485 three-state controlled by PB0

none

RS-485 three-state always disabled

1–2

Connect to enable onboard +5 V power
supply, disconnect for external power supply

Connected

1–2

EPROM smaller than 256K

Connected

2–4

EPROM 256K

1–2

Write-protect upper part of EEPROM

2–3

Write-enable upper part of EEPROM

J22

1–2

Connect to enable watchdog timer

Not
connected

J25

1–2

Startup mode factory-default RS-232 or read
from EEPROM

Connected

1–2

Remote reset using RXC

2–3

Remote reset using CTSB

none

No remote reset

1–2

Connect to enable switching power supply,
disconnect for time/date clock to control
power supply

1–2

Output DAC to pin 1 on J5/J501

2–3

Pin 1 of J5/J501 is analog ground

1–2

Connects E to expansion bus J24 pin 52

2–3

Connects BATACT to expansion bus J24 pin
52

J31

1–2

Ties high-voltage driver SUB signal to ground
to keep it from floating

Connected

J32

1–2

Connect to control use of ENMI signal on
expansion bus J24 pin 9

Connected

J19
J20
J21

J26

J27

J28

J29

��

Connected

Not
installed

Connected

Connected
Not
installed

Novellus/GaSonics PEP-3510 Cluster Misc , 95-3155, 95-0538

Posted on March 7, 2018 by Currentflow

This is a story of two Cluster Misc Controller from a Novellus / Gasonics PEP 3510. There are other Cluster-Misc boxes, but the ones we see frequently from

GetSpares

are the 95-3155 and the 95-0538. They are identical and work exactly the same…WRONG!! Check your PEP-3510 to make sure which one you have. The 95-3155 has a J6 connector called AC Power/PWR Detect. The 95-0538 does not. These two boxes are almost identical except if used in place of each other, there can be status errors reported in the tool and it can cause wafers to halt or not run at all.

Check J6 connector on your Cluster Misc Controller

Common error codes due to failure for these boxes are:

“Door won’t close in a reasonable amount of time”
“CC-0520 Cluster Misc-Invalid status data in Left Cooler”
“CC-0810 Cluster Misc-Invalid status data in Right Cassette”
“CC-0710 Cluster Misc-Invalid status data in Left Cassette”
“CC-0620 Cluster Misc-Invalid status data in Right Cooler”
“CC-0616 Cluster Misc-Service error in Right Cooler”

As always, if you think your PEP 3510 or any other Semiconductor tool needs parts, contact

GetSpares

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Dainippon Screen Servo Pack CESA-804 CESA-804X6

Posted on November 16, 2017 by Currentflow

Common errors on the CESA-804. Model Dainippon Screnn (DNS 80A)

1-03-0258 – Servo Deviation Error

Servo Speed Deviation

1-03-0255

CESA_804_1-03-0255 Speed Deviation

– ‘3’ on LED display – Spin Servo Overvoltage

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

Posted on November 13, 2017 by Currentflow

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KLA/Prometrix RS-35 36-0004 / 54-0005 Current Source With Beckman 7581

Posted on August 9, 2017 by Currentflow

Compliance Errors and Measuement Errors on Your Prometrix OmniMap? Call https://www.getspares.com/

Custom Solutions Available!

KLA/Prometrix RS-35 36-0004 Current Source With Beckman
KLA/Prometrix RS-35 54-0005 Current Source With Beckman

KLA/Prometrix RS-55 54-0005 / 54-0005 Current Source With Beckman

KLA/Prometrix Versaprobe VP10e 54-0005 / 54-0005 Current Source With Beckman

chip overheats and causes measurement errors and compliance errors on RS-35 and RS-55