Origin Return for Dainippon Screen DNS 80B Coat Develop Track


Take a look at these videos of robots, computers and other track pieces in action..

A way to communicate failure symptom for DNS track is to run the Origin Return / Lot Clear operation after a boot up. We collect videos of this process for different pieces during the origin return. Take a look and if you have any interesting DNS behavior that could help other technicians isolate track failures please email us at info@comvolt.com and we will post it for everybody to see.

Look at this spin cup during an origin return..Mostly just the nozzle arms move.


How about origin return of the transport robot?

Depending on where the origin return fails, it can point you which controller is failing. Typical error codes are:

1-03-0247, 1-03-0201, 1-03-0107, 1-01-0112, 1-02-0120, 1-03-1010, 1-03-0210, 1-03-0252, 1-03-0253, 1-01-0221 , 1-03-0242, 1-03-0254, 1-01-0310, 1-03-0258, 1-03-0255, 1-02-0470, 1-00-0023, 1-03-2001, 1-03-2101, 1-05-0015, 1-01-0210, 1-02-410, 01-02-0121, 1-03-0254, 1-03-0220, 1-01-0210, 1-06-0206, 1-00-0025, 1-03-0251

2-39-45431, 2-39-51930 2-39-61074 UT3-F1AE, 2-39-51930 2-39-61074 UT3-F1AE /DSS1-A, 2-39-51930 2-39-61074 UT3-X3AE / DSS4-A, 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07, 2-VC-16217-1EEBH-0021, 2-VC-19090 EERC-0012, 2-VC-19090 EERC-0013, 80A, 80B, 80B Scrubber AU6351N60 2-39-57597, CEDB-1013 2-VC-15252, CEMP-0016 EEMP-0021X3, CERB-1016 2-VC-15254-1, CESA-804, CESB-2011 2-VC-19075, CESB-2012, CESP-0002 2-VC-42102, CESP-0017, CESP-001A F-VC-40833, CESP-002, CEYD-0015 2-VC-13743, 2-VC-28124 GEIA-001, EEBH-0011, EEDC-0011 2-VC-19089, EEJA-001A, EESA-001 AU3575N223, EESA-001 AU3575N233 2-39-48133 , EESA-001A1 AU6356N20 EESA-001 2-39-53462, EESC-0012 2-VC-19115 Spin Slave, EEUC-0013, EEUD-0013, EEUE-001, EEUE-001B, EEUE-001X1, EEW, EEYC-0011 2-VC-20626, GEIC-002 BP-0015C, GEPH-001X3, GESA-001 AU6354N40 2-VC-27621Hamamatsu,IDI, IDI/Cybor, INR-244-216, INR-244-402 2-39-45751, INR-497-001B, INR-497-P2393 Motherboard, Motor, Motor Controller, OMRON, Photolithograpy, PiBoc, Power Supply, Robot Controller, Robots Servo Amp, Servo Driver, Slave Board, Slave Board , Stage Driver, Super Vexta UDX5107, ESP-002A2, Touchscreen VGA, Vexta,

Another Sample of Failed Semiconductor Fab Electonics and Happy Endings


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maintenance panel with SCN5
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RIE/Plasma
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servo amp
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maintenance panel with SCN5
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2-39-45431 Thermostatic Unit FRD-4, Cool Plate Controller for DNS 80B

The FRD-4 Thermostatic Unit serves as the controller for cool plates in the DNS 80B track.  This unit is known to fail and can cause communication errors in the bake/cool process.

Front view of FRD-4 for DNS 80B

Front view of FRD-4 for DNS 80B

Cool Plate Controller Communication Error in DNS 80B caused by faulty FRD-4

Cool Plate Controller Communication Error in DNS 80B caused by faulty FRD-4

Front view of FRD-4 installed in DNS 80B.

Front view of FRD-4 installed in DNS 80B. Check communication 5V power at the output connectors.

 

 

 

 

 

 

 

A good way to quickly check whether or not the FRD-4 communication circuit is functional is to check voltage on one of the output cables to cool plate units.  The output cables connect to the right-most ports on the FRD-4. Each of them has a red wire and black wire that carry 5V DC power.  Backprobe one of these connectors while it is connected to a live FRD-4 to verify the 5V power.  If there is no voltage, the communication logic on-board the FRD-4 has suffered critical failure.  Contact GetSpares.com for replacement or repair solutions.