These videos server as a baseline for Prometrix RS-75 tool operation and troubleshooting. These runs use the standard test resistance modules also seen on RS35, RS55 and VP10e tools. Some boards that customers have problems with are the 36-0325 and 52-0616 controller and ME box.
When communicating issues and problems with your tool timestamps of these videos can help us understand the issues you are having. Take a look or send us pictures or videos of your specific issue.
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/06/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
07/13/2018 | Repaired/shipped |
| GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
08/01/2018 | Custom solution/shipped |
| GetSpares | 36-0287 54-0287 RevAG Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
08/01/2018 | For Sale/ Stock |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/01/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/24/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/24/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/19/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
07/13/2018 | Repaired/shipped |
| GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
07/02/2018 | Repaired/shipped |
| GetSpares | BU504XII 2-XZ-10840 OMRON Battery backed power supply |
80B DNS Photolithograpy |
07/15/2018 | Repaired/shipped |
| GetSpares | PS500 2-39-55593 DNS Battery backed power supply |
80B DNS Photolithograpy |
07/15/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/21/2018 | Repaired/shipped |
| GetSpares | L6599-01 Hamamatsu L6599-01 Lamp House for EEW |
SK200 DNS Photolithograpy |
07/11/2018 | Repaired/shipped |
| GetSpares | EEBH-0011X1 DNS heater control bake unit |
80B DNS Photolithograpy |
06/28/2018 | Repaired/shipped |
| GetSpares | EEBH-0011 DNS heater control bake unit |
80B DNS Photolithograpy |
06/19/2018 | Repaired/shipped |
| GetSpares | 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit |
80B DNS Photolithograpy |
09/06/2017 | Repaired/shipped |
| GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | 54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB |
RS35 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | EEYC-001 DNS Cage for all the slave cards in front of track |
80B DNS Photolithograpy |
07/02/2018 | Custom solution/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/02/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/13/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/13/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/21/2018 | Repaired/shipped |
| GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
06/19/2018 | Repaired/shipped |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
| GetSpares | 36-0325 Prometrix controller that slides in from right horizontally. |
RS75 Prometrix/KLA Wafer Resistivity |
05/04/2018 | Repaired/shipped |
| GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
06/06/2018 | Repaired/shipped |
| GetSpares | 95-3155 Gasonics Cluster Misc Controller With AC power detect J6 |
PEP3510 Novellus/Gasonics RIE/Plasma |
07/28/2016 | Repaired/shipped |
| GetSpares | 567-5101 HV Supply Hitachi Hv supply for electron gun |
Unknown CD SEM Hitachi SEM |
05/22/2018 | For Sale/ Stock |
| GetSpares | LSMUT_TF Comvolt Just an HV timer. |
SMBUS_ASMU1 Comvolt lab tester |
05/15/2018 | Custom solution/shipped |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
06/01/2018 | Repaired/shipped |
| GetSpares | 001-4130-03 Brooks Brooks ACE VCE Controller |
LAM and others Brooks Robots |
05/23/2018 | Repaired/shipped |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/23/2018 | For Sale/ Stock |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/23/2018 | Repaired/shipped |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/21/2018 | For Sale/ Stock |
| GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
05/15/2018 | Repaired/shipped |
| GetSpares | 810-025368-001 Lam Research Simple relay board. located in top left of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
| GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
10/21/2015 | For Sale/ Stock |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/27/2018 | For Sale/ Stock |
| GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
03/27/2018 | Repaired/shipped |
| GetSpares | CESB-2012 DNS Spin Board |
80A DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
04/14/2018 | Repaired/shipped |
| GetSpares | EEJA-001A DNS 6-axis controller based on the note on this unit. |
80B DNS Photolithograpy |
04/06/2018 | Repaired/shipped |
| GetSpares | EESA-001 AU3575N223 DNS servo amp |
80B DNS Photolithograpy |
10/25/2017 | For Sale/ Stock |
| GetSpares | D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 |
SK200 DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
| GetSpares | D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 |
SK200 DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
| GetSpares | 95-0541Misc Controller Gasonics |
PEP3510 Novellus/Gasonics RIE/Plasma |
10/27/2016 | Repaired/shipped |
| GetSpares | 1-139-023 IDI Communications Card |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
| GetSpares | 1-139-022 IDI Pump Controller |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
| GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
| GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
| GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Custom solution/shipped |
| GetSpares | 810-025370—1 Lam Research Large rectangular board that controls and displays status leds |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
| GetSpares | 810-025369-002 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
| GetSpares | 810-025369-002 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
| GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
04/10/2018 | Repaired/shipped |
| GetSpares | 375039 Tencor Data Processing Board |
AIT2 KLA Inspection |
04/05/2018 | Custom solution/shipped |
| GetSpares | 810-025369-001 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/03/2018 | Repaired/shipped |
| GetSpares | 810-025370—1 Lam Research Large rectangular board that controls and displays status leds |
Lam-TCU_2080 Lam Chiller |
04/03/2018 | Repaired/shipped |
| GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
04/03/2018 | Repaired/shipped |
| GetSpares | Super Vexta UDX5107 Vexta 5 axis driver |
80A DNS Photolithograpy |
03/29/2018 | Repaired/shipped |
| GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
03/22/2018 | Repaired/shipped |
| GetSpares | 3510N45E10 Tamagawa Tamagawa Motor AC servo |
80B DNS Photolithograpy |
03/19/2018 | Repaired/shipped |
| GetSpares | 373583 Tencor ANALOG BOARD |
AIT2 KLA Inspection |
06/22/2016 | Repaired/shipped |
| GetSpares | SQV175-1433-2 Prometrix Power Supply |
6220 KLA Inspection |
02/28/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/29/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/29/2018 | Repaired/shipped |
| GetSpares | 0100-02016 0100-20066 AMAT Analog Sync Detect AMAT |
P5000 Applied Materials AMAT RIE/Plasma |
01/04/2018 | For Sale/ Stock |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
02/15/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
02/15/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
02/15/2018 | Repaired/shipped |