Origin Return for Dainippon Screen DNS 80B Coat Develop Track

Posted on May 24, 2019 by Currentflow

Take a look at these videos of robots, computers and other track pieces in action..

A way to communicate failure symptom for DNS track is to run the Origin Return / Lot Clear operation after a boot up. We collect videos of this process for different pieces during the origin return. Take a look and if you have any interesting DNS behavior that could help other technicians isolate track failures please email us at info@comvolt.com and we will post it for everybody to see.

Look at this spin cup during an origin return..Mostly just the nozzle arms move.

How about origin return of the transport robot?

Depending on where the origin return fails, it can point you which controller is failing. Typical error codes are:

1-03-0247, 1-03-0201, 1-03-0107, 1-01-0112, 1-02-0120, 1-03-1010, 1-03-0210, 1-03-0252, 1-03-0253, 1-01-0221 , 1-03-0242, 1-03-0254, 1-01-0310, 1-03-0258, 1-03-0255, 1-02-0470, 1-00-0023, 1-03-2001, 1-03-2101, 1-05-0015, 1-01-0210, 1-02-410, 01-02-0121, 1-03-0254, 1-03-0220, 1-01-0210, 1-06-0206, 1-00-0025, 1-03-0251

2-39-45431, 2-39-51930 2-39-61074 UT3-F1AE, 2-39-51930 2-39-61074 UT3-F1AE /DSS1-A, 2-39-51930 2-39-61074 UT3-X3AE / DSS4-A, 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07, 2-VC-16217-1EEBH-0021, 2-VC-19090 EERC-0012, 2-VC-19090 EERC-0013, 80A, 80B, 80B Scrubber AU6351N60 2-39-57597, CEDB-1013 2-VC-15252, CEMP-0016 EEMP-0021X3, CERB-1016 2-VC-15254-1, CESA-804, CESB-2011 2-VC-19075, CESB-2012, CESP-0002 2-VC-42102, CESP-0017, CESP-001A F-VC-40833, CESP-002, CEYD-0015 2-VC-13743, 2-VC-28124 GEIA-001, EEBH-0011, EEDC-0011 2-VC-19089, EEJA-001A, EESA-001 AU3575N223, EESA-001 AU3575N233 2-39-48133 , EESA-001A1 AU6356N20 EESA-001 2-39-53462, EESC-0012 2-VC-19115 Spin Slave, EEUC-0013, EEUD-0013, EEUE-001, EEUE-001B, EEUE-001X1, EEW, EEYC-0011 2-VC-20626, GEIC-002 BP-0015C, GEPH-001X3, GESA-001 AU6354N40 2-VC-27621Hamamatsu,IDI, IDI/Cybor, INR-244-216, INR-244-402 2-39-45751, INR-497-001B, INR-497-P2393 Motherboard, Motor, Motor Controller, OMRON, Photolithograpy, PiBoc, Power Supply, Robot Controller, Robots Servo Amp, Servo Driver, Slave Board, Slave Board , Stage Driver, Super Vexta UDX5107, ESP-002A2, Touchscreen VGA, Vexta,

More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

Posted on August 8, 2018 by Currentflow

GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/06/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	07/13/2018	Repaired/shipped
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GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/24/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/24/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/19/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	07/13/2018	Repaired/shipped
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	07/02/2018	Repaired/shipped
GetSpares	BU504XII 2-XZ-10840 OMRON Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	PS500 2-39-55593 DNS Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/21/2018	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	07/11/2018	Repaired/shipped
GetSpares	EEBH-0011X1 DNS heater control bake unit	80B DNS Photolithograpy	06/28/2018	Repaired/shipped
GetSpares	EEBH-0011 DNS heater control bake unit	80B DNS Photolithograpy	06/19/2018	Repaired/shipped
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GetSpares	36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
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GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/13/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/21/2018	Repaired/shipped
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GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
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GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
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GetSpares	810-025369-002 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	04/10/2018	Repaired/shipped
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GetSpares	810-025369-001 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/03/2018	Repaired/shipped
GetSpares	810-025370—1 Lam Research Large rectangular board that controls and displays status leds	Lam-TCU_2080 Lam Chiller	04/03/2018	Repaired/shipped
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GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	01/29/2018	Repaired/shipped
GetSpares	0100-02016 0100-20066 AMAT Analog Sync Detect AMAT	P5000 Applied Materials AMAT RIE/Plasma	01/04/2018	For Sale/ Stock
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	02/15/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	02/15/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	02/15/2018	Repaired/shipped

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

Posted on November 13, 2017 by Currentflow

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GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	11/10/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	10/07/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	10/05/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	09/22/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/11/2016	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	09/26/2017	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	09/22/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/21/2017	Repaired/shipped
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GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	09/08/2017	For Sale/ Stock
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GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/24/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	09/18/2014	Repaired/shipped
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GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	07/21/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/31/2017	Custom solution/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/22/2016	Repaired/shipped
GetSpares	2-VC-16217-1EEBH-0021 DNS heater control bake unit	80B DNS Photolithograpy	07/17/2017	Repaired/shipped
GetSpares	CMX15 90X0054 KLA LCD Monitor	AIT2 KLA Inspection	07/17/2017	Repaired/shipped
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GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/11/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/11/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	06/27/2017	Repaired/shipped
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GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/23/2017	Repaired/shipped
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GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	04/02/2017	Repaired/shipped
GetSpares	CESB-2011 2-VC-19075 DNS Spin control board. Station Controller	60A DNS Photolithograpy	06/06/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/12/2017	Repaired/shipped
GetSpares	CMX15 90X0054 KLA LCD Monitor	AIT2 KLA Inspection	06/22/2016	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	06/12/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	06/12/2017	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	06/06/2017	Repaired/shipped
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GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/15/2017	Custom solution/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/15/2017	Repaired/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/08/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	05/09/2017	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/19/2017	Repaired/shipped
GetSpares	710-693221-000 KLA Matrox Corona Rev 6 8M Confg AIT2, Slot	8100 8100XP 8100XPR 8250 8300 8450 KLA SEM	04/17/2017	Repaired/shipped
GetSpares	356166 Matrox Corona KLA U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18	AIT2 KLA Inspection	04/17/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	04/24/2017	Repaired/shipped
GetSpares	CEMP-0016 EEMP-0021X3 DNS Main Display Panel	80A DNS Photolithograpy	04/18/2017	Repaired/shipped
GetSpares	54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB	RS35 Prometrix/KLA Wafer Resistivity	04/19/2017	Custom solution/shipped
GetSpares	903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	04/03/2017	Repaired/shipped
GetSpares	55079-763288 Prometrix PCA-DUAL Stepper Driver	RS55 Prometrix/KLA Wafer Resistivity	03/29/2017	Repaired/shipped
GetSpares	36-0201 Prometrix H2 Interface PCB for UV1050/UV1250	UV1050 Tencor/KLA Inspection	03/29/2017	Custom solution/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	03/29/2017	Repaired/shipped


GetSpares	2-VC-19090 EERC-0012 DNS Transport Slave Board Repair	80B DNS Photolithograpy	04/03/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	03/13/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	04/04/2017	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	04/02/2017	Custom solution/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	03/10/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	03/13/2017	Custom solution/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	03/07/2017	Repaired/shipped
GetSpares	CERB-1016 2-VC-15254-1 DNS Transport Station Controller	60A DNS Photolithograpy	02/04/2017	Repaired/shipped
GetSpares	2114B-30SLQST Cyonics CYONICS-UNIPHASE	6220 KLA Inspection	01/09/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	02/04/2017	Repaired/shipped

Driver Motor Box Servo Amplifier PK CESA-804 for DNS 80A Track

Posted on April 18, 2016 by Currentflow

Communication and Rev errors in the spin units of DNS 80A tracks have been traced back to faulty electronics in the Servo Amplifier Pack – part number CESA-804.

GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

Example alarm that has been resolved:

-CODE 1-03-0247 [station 1 – unit 3 (spin) – code 0247]: Servo Controller Communication Error

If you are experiencing any communication or “rev” (RPM) errors in the spin units of your DNS equipment, contact GetSpares.com today for the right solution!

CESA-804 Servo Amp Pack for DNS 80A

Indexer Control Board CEDB-1013 aka 2-VC-15252 for DNS 80A Track

Posted on April 18, 2016 by Currentflow

A number of flow errors at the Indexer module of a DNS 80A track have been traced back to failures in the Indexer Control Board – part numbers CEDB-1013, 2-VC-15252 or 2-VC-1524-1. 2-VC-15254-1 GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

Example alarms that have been resolved include:

–CODE 1-01-0210 [station 1 – unit 1 (indexer) – code 0210]: Faulty Indexer Horizontal Axis Operation

–CODE 1-01-0220 [station 1 – unit 1 (indexer) – code 0220]: Faulty Indexer Horizontal Axis Origin Return

If you are experiencing this or similar flow alarms on your DNS equipment, contact GetSpares.com today for the right solution!

Indexer Control Board CEDB-1013 for DNS 80A

Bake Temperature Control Errors on DNS 80A and 80B – Heater Controllers EEBH-6011, EEBH-0011

Posted on August 28, 2015 by Currentflow

If you are experiencing “Bake Temperature Error”, “Bake Temperature Incomplete” or other general failures with the bake units in a DNS 80A or 80B tracks, the Heater Controllers EEBH-6011 or EEBH-0011 have likely failed. Not to fear, GetSpares.com maintains DNS tracks and parts. These parts are available for sale when in stock, but can also be repaired if shipped to the GetSpares facility. If you see a error screens as pictured below, contact GetSpares today!

Code 01-XX-201: Bake Temperature Error, DNS80A

Code 01-XX-301: Bake Temperature Incomplete, DNS80A

Font view: EEBH-6011 Heater Controller, DNS80A

Top view: EEBH-6011 Heater Controller, DNS80A

Heater controller EEBH-0011 for DNS80B

DNS 60/80 A/B EEMP-0021X3, EEMP-0013 LCD Monitors – Color and Monochrome

Posted on July 22, 2015 by Currentflow

DNS part numbers EEMP-0021X3 and EEMP-0013 are LCD monitors that can be used in either the 60A, 60B, 80A, or 80B tracks, depending on the track configuration.

Monitor installed in DNS 80B

Monitor installed in DNS 80B, telescoped out

These can fail or malfunction if installed in a tool not configured for that exact part number. EEMP-0021X3 is a full color display, whereas EEMP-0013 is a monochrome display.

DNS EEMP-0013 Monochrome LCD monitor installed in 80B

DNS EEMP-0021X3 Color LCD monitor installed in 80B

A known symptom of color vs. monochrome incompatibility is loss of directional sync on the monitor. The screen image will continuously and uncontrollably “roll” like the images in a slot machine. Another failure symptom is no image at all, but this is less likely a compatibility issue as opposed to general circuit failure. In either case, GetSpares.com maintains a fully operational DNS 80B track and parts, as well as the capability to repair and test parts. If your DNS LCD monitor is failing, contact GetSpares for quality repair/replacement solutions.

Information Repository

Comvolt

Tag Archives: 80A

Origin Return for Dainippon Screen DNS 80B Coat Develop Track

Driver Motor Box Servo Amplifier PK CESA-804 for DNS 80A Track

Indexer Control Board CEDB-1013 aka 2-VC-15252 for DNS 80A Track

Bake Temperature Control Errors on DNS 80A and 80B – Heater Controllers EEBH-6011, EEBH-0011

DNS 60/80 A/B EEMP-0021X3, EEMP-0013 LCD Monitors – Color and Monochrome