Origin Return for Dainippon Screen DNS 80B Coat Develop Track

Posted on May 24, 2019 by Currentflow

Take a look at these videos of robots, computers and other track pieces in action..

A way to communicate failure symptom for DNS track is to run the Origin Return / Lot Clear operation after a boot up. We collect videos of this process for different pieces during the origin return. Take a look and if you have any interesting DNS behavior that could help other technicians isolate track failures please email us at info@comvolt.com and we will post it for everybody to see.

Look at this spin cup during an origin return..Mostly just the nozzle arms move.

How about origin return of the transport robot?

Depending on where the origin return fails, it can point you which controller is failing. Typical error codes are:

1-03-0247, 1-03-0201, 1-03-0107, 1-01-0112, 1-02-0120, 1-03-1010, 1-03-0210, 1-03-0252, 1-03-0253, 1-01-0221 , 1-03-0242, 1-03-0254, 1-01-0310, 1-03-0258, 1-03-0255, 1-02-0470, 1-00-0023, 1-03-2001, 1-03-2101, 1-05-0015, 1-01-0210, 1-02-410, 01-02-0121, 1-03-0254, 1-03-0220, 1-01-0210, 1-06-0206, 1-00-0025, 1-03-0251

2-39-45431, 2-39-51930 2-39-61074 UT3-F1AE, 2-39-51930 2-39-61074 UT3-F1AE /DSS1-A, 2-39-51930 2-39-61074 UT3-X3AE / DSS4-A, 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07, 2-VC-16217-1EEBH-0021, 2-VC-19090 EERC-0012, 2-VC-19090 EERC-0013, 80A, 80B, 80B Scrubber AU6351N60 2-39-57597, CEDB-1013 2-VC-15252, CEMP-0016 EEMP-0021X3, CERB-1016 2-VC-15254-1, CESA-804, CESB-2011 2-VC-19075, CESB-2012, CESP-0002 2-VC-42102, CESP-0017, CESP-001A F-VC-40833, CESP-002, CEYD-0015 2-VC-13743, 2-VC-28124 GEIA-001, EEBH-0011, EEDC-0011 2-VC-19089, EEJA-001A, EESA-001 AU3575N223, EESA-001 AU3575N233 2-39-48133 , EESA-001A1 AU6356N20 EESA-001 2-39-53462, EESC-0012 2-VC-19115 Spin Slave, EEUC-0013, EEUD-0013, EEUE-001, EEUE-001B, EEUE-001X1, EEW, EEYC-0011 2-VC-20626, GEIC-002 BP-0015C, GEPH-001X3, GESA-001 AU6354N40 2-VC-27621Hamamatsu,IDI, IDI/Cybor, INR-244-216, INR-244-402 2-39-45751, INR-497-001B, INR-497-P2393 Motherboard, Motor, Motor Controller, OMRON, Photolithograpy, PiBoc, Power Supply, Robot Controller, Robots Servo Amp, Servo Driver, Slave Board, Slave Board , Stage Driver, Super Vexta UDX5107, ESP-002A2, Touchscreen VGA, Vexta,

Another Sample of Failed Semiconductor Fab Electonics and Happy Endings

Posted on May 16, 2019 by Currentflow

GetSpares	CESP-002 DNS maintenance panel with SCN5	80B DNS Photolithograpy	05/02/2019	Repaired/shipped
GetSpares	TESP-002A2 DNS maintenance panel with SCN5	80B DNS Photolithograpy	05/02/2019	Custom solution/shipped
GetSpares	PCS4900/DELL Therma-Wave Single board computer	Opti-probe 2600-2690 3260-3290 Thermawave/KLA Inspection	05/02/2019	Repaired/shipped
GetSpares	CESB-1011 DNS Spin control board. Station Controller DNS	80A DNS Photolithograpy	04/17/2019	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/12/2019	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/12/2019	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/11/2019	Repaired/shipped

GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/11/2019	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/01/2019	Repaired/shipped
GetSpares	CESP-0002 2-VC-42102 DNS maintenance panel with SCN5	80B DNS Photolithograpy	03/28/2019	Repaired/shipped
GetSpares	CESP-0002 2-VC-42102 DNS maintenance panel with SCN5	80B DNS Photolithograpy	03/28/2019	Custom solution/shipped
GetSpares	36-0201 54-0219 Prometrix H2 Interface PCB for UV1050/UV1250	UV1050 Tencor/KLA Inspection	12/14/2018	Repaired/shipped
GetSpares	36-0294 Prometrix Turret Servo Driver 54-0294	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Custom solution/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	36-0294 Prometrix Turret Servo Driver 54-0294	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	10/05/2018	Repaired/shipped
GetSpares	EST0220C05WNXE1 SMC Smart Terminal	INR-497-001B SMC Water Chiller	09/10/2018	Repaired/shipped
GetSpares	PS500 2-39-55593 DNS Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	EEBH-0011X1 DNS heater control bake unit	80B DNS Photolithograpy	06/28/2018	Repaired/shipped
GetSpares	780-14091-000 KLA CD Sem Column Aligner	8100 8100XP 8100XPR 8250 8300 8450 KLA SEM	06/05/2018	Custom solution/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	Custom solution/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	02/04/2016	Repaired/shipped

More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

Posted on August 8, 2018 by Currentflow

GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/06/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	07/13/2018	Repaired/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	08/01/2018	Custom solution/shipped
GetSpares	36-0287 54-0287 RevAG Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	08/01/2018	For Sale/ Stock
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/01/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/24/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/24/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/19/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	07/13/2018	Repaired/shipped
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	07/02/2018	Repaired/shipped
GetSpares	BU504XII 2-XZ-10840 OMRON Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	PS500 2-39-55593 DNS Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/21/2018	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	07/11/2018	Repaired/shipped
GetSpares	EEBH-0011X1 DNS heater control bake unit	80B DNS Photolithograpy	06/28/2018	Repaired/shipped
GetSpares	EEBH-0011 DNS heater control bake unit	80B DNS Photolithograpy	06/19/2018	Repaired/shipped
GetSpares	2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit	80B DNS Photolithograpy	09/06/2017	Repaired/shipped
GetSpares	36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB	RS35 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	EEYC-001 DNS Cage for all the slave cards in front of track	80B DNS Photolithograpy	07/02/2018	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/02/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/13/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/13/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/21/2018	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	06/19/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0325 Prometrix controller that slides in from right horizontally.	RS75 Prometrix/KLA Wafer Resistivity	05/04/2018	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	06/06/2018	Repaired/shipped
GetSpares	95-3155 Gasonics Cluster Misc Controller With AC power detect J6	PEP3510 Novellus/Gasonics RIE/Plasma	07/28/2016	Repaired/shipped
GetSpares	567-5101 HV Supply Hitachi Hv supply for electron gun	Unknown CD SEM Hitachi SEM	05/22/2018	For Sale/ Stock
GetSpares	LSMUT_TF Comvolt Just an HV timer.	SMBUS_ASMU1 Comvolt lab tester	05/15/2018	Custom solution/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	06/01/2018	Repaired/shipped
GetSpares	001-4130-03 Brooks Brooks ACE VCE Controller	LAM and others Brooks Robots	05/23/2018	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	For Sale/ Stock
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/21/2018	For Sale/ Stock
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	05/15/2018	Repaired/shipped
GetSpares	810-025368-001 Lam Research Simple relay board. located in top left of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	10/21/2015	For Sale/ Stock
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/27/2018	For Sale/ Stock
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	03/27/2018	Repaired/shipped
GetSpares	CESB-2012 DNS Spin Board	80A DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/14/2018	Repaired/shipped
GetSpares	EEJA-001A DNS 6-axis controller based on the note on this unit.	80B DNS Photolithograpy	04/06/2018	Repaired/shipped
GetSpares	EESA-001 AU3575N223 DNS servo amp	80B DNS Photolithograpy	10/25/2017	For Sale/ Stock
GetSpares	D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001	SK200 DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001	SK200 DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	95-0541Misc Controller Gasonics	PEP3510 Novellus/Gasonics RIE/Plasma	10/27/2016	Repaired/shipped
GetSpares	1-139-023 IDI Communications Card	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-139-022 IDI Pump Controller	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Custom solution/shipped
GetSpares	810-025370—1 Lam Research Large rectangular board that controls and displays status leds	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	810-025369-002 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	810-025369-002 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	04/10/2018	Repaired/shipped
GetSpares	375039 Tencor Data Processing Board	AIT2 KLA Inspection	04/05/2018	Custom solution/shipped
GetSpares	810-025369-001 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/03/2018	Repaired/shipped
GetSpares	810-025370—1 Lam Research Large rectangular board that controls and displays status leds	Lam-TCU_2080 Lam Chiller	04/03/2018	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	04/03/2018	Repaired/shipped
GetSpares	Super Vexta UDX5107 Vexta 5 axis driver	80A DNS Photolithograpy	03/29/2018	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	03/22/2018	Repaired/shipped
GetSpares	3510N45E10 Tamagawa Tamagawa Motor AC servo	80B DNS Photolithograpy	03/19/2018	Repaired/shipped
GetSpares	373583 Tencor ANALOG BOARD	AIT2 KLA Inspection	06/22/2016	Repaired/shipped
GetSpares	SQV175-1433-2 Prometrix Power Supply	6220 KLA Inspection	02/28/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	01/29/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	01/29/2018	Repaired/shipped
GetSpares	0100-02016 0100-20066 AMAT Analog Sync Detect AMAT	P5000 Applied Materials AMAT RIE/Plasma	01/04/2018	For Sale/ Stock
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	02/15/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	02/15/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	02/15/2018	Repaired/shipped

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

Posted on November 13, 2017 by Currentflow

More successful solutions from GetSpares

GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	11/08/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	11/06/2017	Repaired/shipped	DNS_Hamamatsu_L6001-01
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	10/23/2017	Repaired/shipped
GetSpares	T0351/10-1006 Tectrol Power Supply	6200 KLA Inspection	07/19/2017	For Sale/ Stock
GetSpares	GLC352-CEF Emerson Power Supply	Not Specified Not Specified Not Specified	10/30/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	10/06/2017	Repaired/shipped
GetSpares	EESA-001 AU3575N233 2-39-48133 DNS servo amp	80B DNS Photolithograpy	10/25/2017	Repaired/shipped
GetSpares	AU6351N60 2-39-57597 DNS servo amp	80B Scrubber DNS Photolithograpy	10/22/2017	For Sale/ Stock
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	10/23/2017	Repaired/shipped
GetSpares	EEUE-001 DNS EEW Control Unit	80A DNS Photolithograpy	10/03/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	09/20/2017	For Sale/ Stock
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	10/12/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	10/06/2017	Repaired/shipped
GetSpares	INR-497-P2393 A19393-01 SMC 2 channel controller board	INR-497-001B SMC Water Chiller	10/11/2017	Custom solution/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	11/10/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	10/07/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	10/05/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	09/22/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/11/2016	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	09/26/2017	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	09/22/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit	80B DNS Photolithograpy	09/06/2017	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	10/21/2015	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	09/08/2017	For Sale/ Stock
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/24/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	09/18/2014	Repaired/shipped
GetSpares	2-39-45431 DNS FRD-4	80B DNS Photolithograpy	08/09/2017	Repaired/shipped
GetSpares	2-39-45431 DNS FRD-4	80B DNS Photolithograpy	08/09/2017	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	07/21/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/31/2017	Custom solution/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/22/2016	Repaired/shipped
GetSpares	2-VC-16217-1EEBH-0021 DNS heater control bake unit	80B DNS Photolithograpy	07/17/2017	Repaired/shipped
GetSpares	CMX15 90X0054 KLA LCD Monitor	AIT2 KLA Inspection	07/17/2017	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	01/19/2015	Repaired/shipped
GetSpares	CMX15 90X0054 KLA LCD Monitor	AIT2 KLA Inspection	07/06/2017	Repaired/shipped
GetSpares	903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	07/06/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/11/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/11/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	06/27/2017	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	06/23/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/23/2017	Custom solution/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/23/2017	Repaired/shipped
GetSpares	CESP-0002 2-VC-42102 DNS maintenance panel with SCN5	80B DNS Photolithograpy	02/03/2017	Custom solution/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	04/02/2017	Repaired/shipped
GetSpares	CESB-2011 2-VC-19075 DNS Spin control board. Station Controller	60A DNS Photolithograpy	06/06/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/12/2017	Repaired/shipped
GetSpares	CMX15 90X0054 KLA LCD Monitor	AIT2 KLA Inspection	06/22/2016	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	06/12/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	06/12/2017	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	06/06/2017	Repaired/shipped
GetSpares	54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB	RS35 Prometrix/KLA Wafer Resistivity	06/06/2017	For Sale/ Stock
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	04/28/2017	Repaired/shipped
GetSpares	54-0311 Prometrix UV1250/ 1050 optical array PDA	UV1050 Tencor/KLA Inspection	01/03/2017	Repaired/shipped
GetSpares	15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	06/06/2017	Repaired/shipped


GetSpares	15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	05/30/2017	Repaired/shipped
GetSpares	CESP-001A F-VC-40833 DNS maintenance panel without SCN5	80B DNS Photolithograpy	04/11/2017	For Sale/ Stock
GetSpares	2-VC-16217-1EEBH-0021 DNS heater control bake unit	80B DNS Photolithograpy	05/24/2017	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	54-0317 36-0317 KLA PCB Measurement Control Board 54-0317 36-0317	UV1250-UV1280 Tencor/KLA Inspection	03/29/2017	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	05/04/2017	Repaired/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/15/2017	Custom solution/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/15/2017	Repaired/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/08/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	05/09/2017	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/19/2017	Repaired/shipped
GetSpares	710-693221-000 KLA Matrox Corona Rev 6 8M Confg AIT2, Slot	8100 8100XP 8100XPR 8250 8300 8450 KLA SEM	04/17/2017	Repaired/shipped
GetSpares	356166 Matrox Corona KLA U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18	AIT2 KLA Inspection	04/17/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	04/24/2017	Repaired/shipped
GetSpares	CEMP-0016 EEMP-0021X3 DNS Main Display Panel	80A DNS Photolithograpy	04/18/2017	Repaired/shipped
GetSpares	54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB	RS35 Prometrix/KLA Wafer Resistivity	04/19/2017	Custom solution/shipped
GetSpares	903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	04/03/2017	Repaired/shipped
GetSpares	55079-763288 Prometrix PCA-DUAL Stepper Driver	RS55 Prometrix/KLA Wafer Resistivity	03/29/2017	Repaired/shipped
GetSpares	36-0201 Prometrix H2 Interface PCB for UV1050/UV1250	UV1050 Tencor/KLA Inspection	03/29/2017	Custom solution/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	03/29/2017	Repaired/shipped


GetSpares	2-VC-19090 EERC-0012 DNS Transport Slave Board Repair	80B DNS Photolithograpy	04/03/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	03/13/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	04/04/2017	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	04/02/2017	Custom solution/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	03/10/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	03/13/2017	Custom solution/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	03/07/2017	Repaired/shipped
GetSpares	CERB-1016 2-VC-15254-1 DNS Transport Station Controller	60A DNS Photolithograpy	02/04/2017	Repaired/shipped
GetSpares	2114B-30SLQST Cyonics CYONICS-UNIPHASE	6220 KLA Inspection	01/09/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	02/04/2017	Repaired/shipped

INR-244-402 aka 2-39-45751 Chemical Temperature Controller for DNS 80B

Posted on July 6, 2016 by Currentflow

The Chemical Temperature Control unit (part number INR-244-402 aka 2-39-45751) for DNS 80B photolithography track is a known failure point. Symptoms include communication errors, error code “00”, and failure to meet temperature set point.

GetSpares.com has discovered the electronic repair solutions for restoring these units to operational status. Additionally, GetSpares.com maintains functional DNS tracks on the warehouse floor, providing a conclusive test environment for any DNS parts.

Contact GetSpares.com today for your repair or replacement needs!

Front View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

Rear View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

Bake Temperature Control Errors on DNS 80A and 80B – Heater Controllers EEBH-6011, EEBH-0011

Posted on August 28, 2015 by Currentflow

If you are experiencing “Bake Temperature Error”, “Bake Temperature Incomplete” or other general failures with the bake units in a DNS 80A or 80B tracks, the Heater Controllers EEBH-6011 or EEBH-0011 have likely failed. Not to fear, GetSpares.com maintains DNS tracks and parts. These parts are available for sale when in stock, but can also be repaired if shipped to the GetSpares facility. If you see a error screens as pictured below, contact GetSpares today!

Code 01-XX-201: Bake Temperature Error, DNS80A

Code 01-XX-301: Bake Temperature Incomplete, DNS80A

Font view: EEBH-6011 Heater Controller, DNS80A

Top view: EEBH-6011 Heater Controller, DNS80A

Heater controller EEBH-0011 for DNS80B

DNS 60/80 A/B EEMP-0021X3, EEMP-0013 LCD Monitors – Color and Monochrome

Posted on July 22, 2015 by Currentflow

DNS part numbers EEMP-0021X3 and EEMP-0013 are LCD monitors that can be used in either the 60A, 60B, 80A, or 80B tracks, depending on the track configuration.

Monitor installed in DNS 80B

Monitor installed in DNS 80B, telescoped out

These can fail or malfunction if installed in a tool not configured for that exact part number. EEMP-0021X3 is a full color display, whereas EEMP-0013 is a monochrome display.

DNS EEMP-0013 Monochrome LCD monitor installed in 80B

DNS EEMP-0021X3 Color LCD monitor installed in 80B

A known symptom of color vs. monochrome incompatibility is loss of directional sync on the monitor. The screen image will continuously and uncontrollably “roll” like the images in a slot machine. Another failure symptom is no image at all, but this is less likely a compatibility issue as opposed to general circuit failure. In either case, GetSpares.com maintains a fully operational DNS 80B track and parts, as well as the capability to repair and test parts. If your DNS LCD monitor is failing, contact GetSpares for quality repair/replacement solutions.

Dainippon Screen -80B Schematics Lists

Posted on June 23, 2015 by Currentflow

List of schematics for DNS 80B tracks. Here is a list of schematics for control schematics.

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
ELECTRICAL CIRCUIT DIAGRAM LIST
HIGH PRESSURE GENERATION UNIT
JEHP-005
co2 BUBBLING CONTROLLER
SECO-1053
cog BUBBLING UNIT
SECV-104
MAINTENANCE PANEL [ SPIN UNIT 1
CESP-0015
STEPDOWN TRANSFORMER
9EDT-101A
STEPDOWN TRANSFORMER
9EDT-111A
STEPDOWN TRANSFORMER
9EDT-201A
STEPDOWN TRANSFORMER
9EDT-211A

2/9
STATION CONTROLLER [ INDEXER UNIT ]
EEDC-0011
STATION CONTROLLER [ TRANSPORT UNIT ]
EERC-0011
STATION CONTROLLER [ SPIN UNIT ]
EESC-0011
STATION CONTROLLER [ BAKE UNIT ]
EEBC-0012
STATION CONTROLLER [ UEEW UNIT ]
EEEC-002
STATION CONTROLLER [ IF-B UNIT ]
EEEB-001
MAIN I/0 IFC BOX
EEMH-001
MAIN EXTERNAL IFC BOX
EEMI-001
STATION CONTROLLER
EEYC-0#11
MAIN PANEL [ STANDARD TYPE ]
EEMP-001#
MAIN PANEL [ MOTORED TYPE ]
EEMP-0112
INDEXER PANEL
EEDP-001
PORTABLE PANEL IFC BOX
EEMJ-002

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
3/9
INDEXER A UNIT [ VACUUMLESS TYPE ]
EED#-001
INDEXER A UNIT [ VACUUM TYPE ]
EED#-0#1#
INTERFACE UNIT [ TYPE B ]
EEI#-####
TRANSPORT UNIT
EERM-OO1

4/9

SPIN UNIT [ COATER ]
EESM-0O1

SPIN UNIT [ POSITIVE DEVELOPER ]
EESM-O02

SPIN UNIT [ PIQ COATER ]
EESM-003

SPIN UNIT [ SCRUBBER ]
EESM-030

SPIN VACUUM SENSOR
EEFT-O01

SPIN CUP [ COATER, POSITIVE DEVELOPER ]
EESM~010

SPIN CUP [ MOTORED EBR NOZZLE ]
EES#-011

SPIN COVER
EESM-O20

RESIST PUMP CYLINDER SENSOR
EEFT-021

SPIN TWO-WAY WASTE DRAIN
EEFT-O51

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
5/9

CHEMICAL FLOW/LEVEL SENSOR
E##-0#1

SPIN CHEMICAL IFC BOX
EEFH-001

SPIN IFC BOARD
EESD-O01

EXTERNAL ALARM IFC BOARD
EEKD-O01

CHEMICAL FLOW/LEVEL SENSOR IFC BOARD
EEFD-001

D-SONIC IFC BOX
EEFI-001

EXHAUST CONTROLLER
EESW-0#1

DRAIN BOX SENSOR
EEFT-O#11

AUTO-DRAIN BOX SENSOR
EEC#-0#1

DIRECT-DRAIN SENSOR
EEFT-O71

SV IFC BOARD
EECS-O#1
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST

6/9

BAKE UNIT [ HP(HH,AH) ]
EEBM-O##
BAKE UNIT [ CP(AC) ]
EEBN-O#1
BAKE UNIT [ LPAH ]
EEBO-0#1
BAKE SV
EEBS-010
BAKE IFC BOARD
EEBD-O01
HEATER CONTROLLER
EEB#-0O1##
COMMON T0 CHEMICAL CONTROLLER
EEC#-001
CHEMICAL CONTROLLER [ SD ONLY ]
EEC#-011
CHEMICAL CONTROLLER [ SC+SD TYPE ]
EEC#-001
SwITCHINC BOTTLES SENSOR
EECN-0#1
AUTO-SUPPLY SYSTEM SENSOR
EECN-0#11

7/9

LOWER LIMIT SENSOR
EEH#-0#1
EXHAUST SOURCE PRESSURE SENSOR
EEHW-O#1
DIW SOURCE PRESSURE SENSOR [ SPIN UNIT ]
EEHW-011
SOURCE PRESSURE SENSOR
EE##”OO1
LEAKAGE SENSOR
EEHY-O11
CIRCUIT BREAKER BOX
EEPB-00#
AC POWER SUPPLY
EEP#-00#
MAIN POWER ON/OFF SWITCH BOX
EEMK-001
EMERGENCY POWER OFF SWITCH
EEPI-OO1

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST

8/9
TOWER-LAMP
EEMT-0O1

DEEW UNIT
EEUM-0O2

IMAGE SENSOR CONTROLLER
EEUE-001
DEEW POWER SUPPLY BOX
EEUB-001
HOST,AGV IFC BOX
EEMX-00#1

DRIVER UNIT POWER RELAY CABLE
EEKL-OO1

9/9
AIR CONDITIONING UNIT ALARM CABLE
EEHW-0#1

CABLE CONNECTION [ MAIN CONTROLLER ]
EEML-001

CABLE CONNECTION [ INDEXER UNIT ]
EEDL-O01

CABLE CONNECTION [ TRANSPORT UNIT ]
EERL-001

CABLE CONNECTION [ SPIN UNIT ]
EESL-O01

CABLE CONNECTION [ SPIN CHEMICAL IFC BOX ]
EEFL-OO1

CABLE CONNECTION [ BAKE UNIT ]
EEBLâ-O01

CABLE CONNECTION [ CHEMICAL CONTROLLER ]
EECLâ-O01

CABLE CONNECTION [ ALARM IFC BOX ]
EEHL-O01

CABLE CONNECTION [ INTERFACE UNIT (TYPE B) ]

CABLE CONNECTION [ UEEW UNIT ]
EEEL-0O1

CABLE CONNECTION [ DEEW UNIT ]
EEUL-O01

Controls Parts List for DNS 80B

Posted on June 22, 2015 by Currentflow

Trouble finding the right part number for your DNS 80B part? Look no further! We scanned and OCR’ed the official Dainippon Screen Parts List for your convenience. Peruse the results below. Contact www.GetSpares.com for replacement or repair solutions on the parts you need.

DNS 80B Control Units Parts List 1/3

DNS 80B Control Units Parts List 2/3

DNS 80B Control Units Parts List 3/3

SERVICE ‘PARTS LIST (80B).x1s Z§_,_C_Qnj’__r_Q_I_U_n_i_t

REV.5.1 00.09
No A PARTS NAME APPLICATION TYPE PARTS No. DEL. MANUFACTURER REMARKS DIV. REV.
1 Indexer board ID-A EEDC-0011 2-VC-19089

2 Indexer board ID-A EEDC-0012 2-VC-34410 4

3 IF-B board (Type 1) IF-B EEIB-O01 2-VC-18166 1
14 IF-B board (Type 2) IF-B EEIC—OO1 2-VC*19284 1
5 IF-B board IF-B EEIC-0012 2-VC-19284-2 4
6 Transport board Transport unit EERC~O012 2-VC-19090-1 3
7 Spin board Spin EESC-0012 2-VC-19115

:3 Bake board Bake EEBC-0012 2-VC-19116

S9 Bake board Bake EEBC-0013 2-VC-34409 4
10 EEW board DEEW 2-VC-18987 1
11 EEW board DEEW EEUC-0013 2-VC-18987-4 4
12 EEW board DEEW EEUC-0014 2-VC-18987-5 4
13 EEW board DEEW EEUC-0015 2-VC-18987-6 4
14 EEW board UEEW EEEC-O02 2-VC-16147-2 1
15 Spin IFC board I Spin EESD-O01 2-VC-16027

16 EBR IFC bard Spin EESD-O11 2-VC—17102

17 Bake IFC board Bake EEBD—OO1 2-VC-16010

18 DS-LAN board *1 Main controller CEML-0014 2-VC-10751-3 3

19 DS-LAN board *1 Main controller CEML-0014 2-VC-10751-4 5
20 DS-LAN board *1 Main controller CEML~0O16 2-VC-10751-5 5
21 Parallel I/O board *1 Main controller CEMI-0011 2-VC-09977-1
22 RAS board Main controller FC-9801-06K 2-39-48605 NEC gg;380lB/2
23 Simplified RAS board Main controller PC-9821KE-E06 2~39-59409 NEC 5
24 Main controller FC-9821X/2 2-VB-25463
25 Main controller FC-9821X/2 2-VB-25463
26 HD adapter Main controller FC-9821KA-E01 2-39-59405 NEC 5
27 Hard disk drive Main controller §Cgg8ﬁ$XA-HD1 2-39-59406 NBC 5
28 Copy board *1 Copy for main panel CEMG-O01 2-VC-20712 2
29 Copy board *1 Copy for main panel CEMG-0021 2-VC-24889 3
30 Station controller STANDARD (20 SLOTS) EEYC-0011 2-VC-20626 2
31 Station controller 28 SLOTS TYPE EEYC-O111 2-VC-20627 . 2
32 Station controller 11 SLOTS TYPE EEYC-003 2-VC-34399 5
33 GEM controller EEMZ-001 2-VC-25207-1 3
34 GEM controller EEMZ—0O11 2-VC—25207-2 5
35 1/0 unit box Main controller EEMH-001 2-VC-16705
36 Heater controller Bake unit(Max.8 HP) EEBH-0011 2-VC*162l7-1

37 Heater controller Bake unit EEBH~6011 2-VC-34885 CE TYPE 5
ﬂmwm‘ 38 Servo amplifier Spin motor drive AU6356N20 2-39-53462 3
. 39 Servo amplifier Spin motor drive (8OB) EESA-0O1A1 2-VC-16396-2
40 AC power supply Primary AC power input/ EEPH-001 2-VC-16214
Secondary power output
UPS *l*2 Main controller back-up PS500 2-39-55593 HEIAN ELE §;fg“f$fHmJ%Ei 3.1
41 . 121368. (There is 5 UL
label on the backside
of the main body.)
42 Main panel EEMP-0013 2-VC-21746 2
43 Main panel Motor—drive EEMP-0112 2-VC-21747-1 2
44 Main panel Motor-drive EEMP-0113 2-VC-28117
45 Portable main panel EEMP-0212 2~VC-21717 2
46 ID-A panel ID-A EEDP—O01A 2-VC-14786-7 5
47 Maintenance panel ‘ *1 Spin unit CESP-0017 2-VC-10752-6 3
48 Maintenance panel UEEW EEEP-001 2-VC-17848-1 3
49 5 axis motor driver I EEKB-0011 2-VC-26961
50 8 axis motor driver ID—A/Transport Unit EEKA-001 2-VC-15485
51 8 axis motor driver ID-A/Transport Unit EEKA-0011 2-VC~23936

PORP (Incl. Printer) Edit Recipe on Portable
Personal Computer
Book type Personal comp. PC-9801NS/T40
Memory Card (8MB) RCS-8000
52 Application Software PS-98-1002-32 Ver.3.3D
Cable PORP-Printer PC-9801N-19
Printer PC-PR150N
PORP (Not incl. Printer) Edit Recipe on Portable
Personal Computer
Book type Personal comp. PC-9801NS/T40
53 Memory Card (8MB) RCS-8000
Application Software PS-98-1002-32 Ver.3.3D
Cable PORP-User’s Printer PC-9801N—19
54 EBR motor driver EBR CSD5807N-P 2-39-46547
CP power supply unit Cooling plate MR-2015 ﬁg; 2-39~45432
‘K 56 CP controller Cooling plate FRD-4 1 2-39-45431
57 Chemical temp controller INR-244-402 2-39-45751
58 Circulator Chemical temp controller INR-244—404 (2oov) 2-39-45750
59 Circulator Chemical temp controller INR-244-406 (220V) 2-39-48373
60 Panel Chemical Temp Controller INR-244-403 2-39-48374 1
61 WCDS controller *1 For photoresist CECC~4012 2-VC-19786-1 2
62 WCDS panel *1 For photoresist CECP-001 2-VC-14144-1 2
63 Air elimination control. For photoresist PDS-1602 2-39-48738 2
*1
64 Air elimination panel *1 For photoresist PDS-1520 2-39-47429 2
65 Battery unit UPS Type BT-2-48(2Ah-4 48V) 2-39-58575
66 Fuse UPS Type (UL) TSC-8A 2-39-58576 s. 0. C
67 UPS with a Cable Main controller back-up CEMD-0012 2-VC-09974-1 HEIAN ELE
68 Video measure sensor DEEW EEUE-001B 2-VC-30392 Z4LC-CD2 TYPE 3.1
controller
Video measure sensor DEEW EEVE-001 2-VC-18989 3X2CA—PLC8 TYPE 4
69 controller
*1 Common to 80A
*2 back-up time comes to be shorter by degrees because the inside battery getting old.

Contact www.GetSpares.com for replacement or repair solutions on the parts you need.

2-39-45431 Thermostatic Unit FRD-4, Cool Plate Controller for DNS 80B

Posted on June 22, 2015 by Currentflow

The FRD-4 Thermostatic Unit serves as the controller for cool plates in the DNS 80B track. This unit is known to fail and can cause communication errors in the bake/cool process.

Front view of FRD-4 for DNS 80B

Cool Plate Controller Communication Error in DNS 80B caused by faulty FRD-4

Front view of FRD-4 installed in DNS 80B. Check communication 5V power at the output connectors.

A good way to quickly check whether or not the FRD-4 communication circuit is functional is to check voltage on one of the output cables to cool plate units. The output cables connect to the right-most ports on the FRD-4. Each of them has a red wire and black wire that carry 5V DC power. Backprobe one of these connectors while it is connected to a live FRD-4 to verify the 5V power. If there is no voltage, the communication logic on-board the FRD-4 has suffered critical failure. Contact GetSpares.com for replacement or repair solutions.

Information Repository

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Tag Archives: 80B