GetSpares.com has good parts for sale in a fully operational DNS 80B wafer spin coating track.
These are the part numbers for the manual control Maintenance Panels:
CESP-001A – Panel with pump control through PCN5
CESP-0017X2 -Panel with pump control through PCN5
CESP-0017 -Panel (No PCN5)
CESP-0018 – Panel (No PCN5)
CESP-002 – Panel (No PCN5)
CESP-0012 – Panel (No PCN5)
Head to GetSpares.com to order the parts you need.
Maintenance Panel CESP_0017 and similar. DNS 80B
DNS 80B
Servo amps AU6356N2 (a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) are sitting in a fully functional track, ready to be pulled and sent to you when you need it. In DNS 80B tracks, these electronic modules control the spin of a wafer in the coating and developing processes. The common failure mode is loss of LED indication on the connection panel and erratic or non existent motor control. GetSpares.com keeps these modules installed in fully operational tracks in their warehouse inventory, so you know they are working. When you order a module, it’s pulled from the track and shipped. Head to GetSpares.com and order yours today!
DNS80B: Wafer in coater ready for spin
DNS80B: Wafer after spin
DNS80B: Electronic Module Cabinet
DNS80B: AU3656N20 Servo Amp Controllers
When you no longer see the LEDS illuminate in the top right cutout, the module needs to be replaced.
DNS80B – Cassette, Arm, Track
Front view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR) installed in track
Top view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR)
Below are instructions to get to those easy to forget service menus on the 80B. If you need functioning parts from a functioning DNS 80B go to GetSpares.com and order yours today! There are from a working track so you can be confident they will work in your tool.
There are two easy to forget Menus on DNS 80B tracks. One is called the “Hidden Menu” and one is called the “Secret Menu” Here is how to get there:
1. Hidden Menu
Press Control P
Password: screen (lowercase)
CNTRL P for hidden menu
Your should now get this screen:
2. Secret Menu
We don’t have screen shots for this one but it is done during the power up. As soon as you turn on power, you will see the HIMEM testing and communication checks. During this time, you press the ‘HELP’ key multiple times. Do this until you are taken to the DOS prompt. That’s right, good old-fashioned DOS. Be very careful here as you can do all kinds of damage in this mode.
How this helps and if you know of any other tips and tricks for the DNS 80B, email info@comvolt.com and we will add them to this page.