GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/06/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
07/13/2018 | Repaired/shipped |
GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
08/01/2018 | Custom solution/shipped |
GetSpares | 36-0287 54-0287 RevAG Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
08/01/2018 | For Sale/ Stock |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/01/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/24/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/24/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/19/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
07/13/2018 | Repaired/shipped |
GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
07/02/2018 | Repaired/shipped |
GetSpares | BU504XII 2-XZ-10840 OMRON Battery backed power supply |
80B DNS Photolithograpy |
07/15/2018 | Repaired/shipped |
GetSpares | PS500 2-39-55593 DNS Battery backed power supply |
80B DNS Photolithograpy |
07/15/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/21/2018 | Repaired/shipped |
GetSpares | L6599-01 Hamamatsu L6599-01 Lamp House for EEW |
SK200 DNS Photolithograpy |
07/11/2018 | Repaired/shipped |
GetSpares | EEBH-0011X1 DNS heater control bake unit |
80B DNS Photolithograpy |
06/28/2018 | Repaired/shipped |
GetSpares | EEBH-0011 DNS heater control bake unit |
80B DNS Photolithograpy |
06/19/2018 | Repaired/shipped |
GetSpares | 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit |
80B DNS Photolithograpy |
09/06/2017 | Repaired/shipped |
GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | 54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB |
RS35 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
GetSpares | EEYC-001 DNS Cage for all the slave cards in front of track |
80B DNS Photolithograpy |
07/02/2018 | Custom solution/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/02/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/13/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/13/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/21/2018 | Repaired/shipped |
GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
06/19/2018 | Repaired/shipped |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
GetSpares | 36-0325 Prometrix controller that slides in from right horizontally. |
RS75 Prometrix/KLA Wafer Resistivity |
05/04/2018 | Repaired/shipped |
GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
06/06/2018 | Repaired/shipped |
GetSpares | 95-3155 Gasonics Cluster Misc Controller With AC power detect J6 |
PEP3510 Novellus/Gasonics RIE/Plasma |
07/28/2016 | Repaired/shipped |
GetSpares | 567-5101 HV Supply Hitachi Hv supply for electron gun |
Unknown CD SEM Hitachi SEM |
05/22/2018 | For Sale/ Stock |
GetSpares | LSMUT_TF Comvolt Just an HV timer. |
SMBUS_ASMU1 Comvolt lab tester |
05/15/2018 | Custom solution/shipped |
GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
06/01/2018 | Repaired/shipped |
GetSpares | 001-4130-03 Brooks Brooks ACE VCE Controller |
LAM and others Brooks Robots |
05/23/2018 | Repaired/shipped |
GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/23/2018 | For Sale/ Stock |
GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/23/2018 | Repaired/shipped |
GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped |
GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/21/2018 | For Sale/ Stock |
GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
05/15/2018 | Repaired/shipped |
GetSpares | 810-025368-001 Lam Research Simple relay board. located in top left of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
10/21/2015 | For Sale/ Stock |
GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/27/2018 | For Sale/ Stock |
GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
03/27/2018 | Repaired/shipped |
GetSpares | CESB-2012 DNS Spin Board |
80A DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
04/14/2018 | Repaired/shipped |
GetSpares | EEJA-001A DNS 6-axis controller based on the note on this unit. |
80B DNS Photolithograpy |
04/06/2018 | Repaired/shipped |
GetSpares | EESA-001 AU3575N223 DNS servo amp |
80B DNS Photolithograpy |
10/25/2017 | For Sale/ Stock |
GetSpares | D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 |
SK200 DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
GetSpares | D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 |
SK200 DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
GetSpares | 95-0541Misc Controller Gasonics |
PEP3510 Novellus/Gasonics RIE/Plasma |
10/27/2016 | Repaired/shipped |
GetSpares | 1-139-023 IDI Communications Card |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
GetSpares | 1-139-022 IDI Pump Controller |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Custom solution/shipped |
GetSpares | 810-025370—1 Lam Research Large rectangular board that controls and displays status leds |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
GetSpares | 810-025369-002 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
GetSpares | 810-025369-002 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
04/10/2018 | Repaired/shipped |
GetSpares | 375039 Tencor Data Processing Board |
AIT2 KLA Inspection |
04/05/2018 | Custom solution/shipped |
GetSpares | 810-025369-001 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/03/2018 | Repaired/shipped |
GetSpares | 810-025370—1 Lam Research Large rectangular board that controls and displays status leds |
Lam-TCU_2080 Lam Chiller |
04/03/2018 | Repaired/shipped |
GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
04/03/2018 | Repaired/shipped |
GetSpares | Super Vexta UDX5107 Vexta 5 axis driver |
80A DNS Photolithograpy |
03/29/2018 | Repaired/shipped |
GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
03/22/2018 | Repaired/shipped |
GetSpares | 3510N45E10 Tamagawa Tamagawa Motor AC servo |
80B DNS Photolithograpy |
03/19/2018 | Repaired/shipped |
GetSpares | 373583 Tencor ANALOG BOARD |
AIT2 KLA Inspection |
06/22/2016 | Repaired/shipped |
GetSpares | SQV175-1433-2 Prometrix Power Supply |
6220 KLA Inspection |
02/28/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/29/2018 | Repaired/shipped |
GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/29/2018 | Repaired/shipped |
GetSpares | 0100-02016 0100-20066 AMAT Analog Sync Detect AMAT |
P5000 Applied Materials AMAT RIE/Plasma |
01/04/2018 | For Sale/ Stock |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
02/15/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
02/15/2018 | Repaired/shipped |
GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
02/15/2018 | Repaired/shipped |
Tag Archives: 95-3155
Novellus/GaSonics PEP-3510 Cluster Misc , 95-3155, 95-0538
This is a story of two Cluster Misc Controller from a Novellus / Gasonics PEP 3510. There are other Cluster-Misc boxes, but the ones we see frequently from
are the 95-3155 and the 95-0538. They are identical and work exactly the same…WRONG!! Check your PEP-3510 to make sure which one you have. The 95-3155 has a J6 connector called AC Power/PWR Detect. The 95-0538 does not. These two boxes are almost identical except if used in place of each other, there can be status errors reported in the tool and it can cause wafers to halt or not run at all.
Common error codes due to failure for these boxes are:
“Door won’t close in a reasonable amount of time”
“CC-0520 Cluster Misc-Invalid status data in Left Cooler”
“CC-0810 Cluster Misc-Invalid status data in Right Cassette”
“CC-0710 Cluster Misc-Invalid status data in Left Cassette”
“CC-0620 Cluster Misc-Invalid status data in Right Cooler”
“CC-0616 Cluster Misc-Service error in Right Cooler”
As always, if you think your PEP 3510 or any other Semiconductor tool needs parts, contact