More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/06/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
07/13/2018 Repaired/shipped
GetSpares 36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/01/2018 Custom solution/shipped
GetSpares 36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/01/2018 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/01/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/19/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
07/13/2018 Repaired/shipped
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
07/02/2018 Repaired/shipped
GetSpares BU504XII 2-XZ-10840
OMRON
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018 Repaired/shipped
GetSpares PS500 2-39-55593
DNS
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/21/2018 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
07/11/2018 Repaired/shipped
GetSpares EEBH-0011X1
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/28/2018 Repaired/shipped
GetSpares EEBH-0011
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/19/2018 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/06/2017 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares EEYC-001
DNS
Cage for all the slave cards in front of track
80B
DNS
Photolithograpy
07/02/2018 Custom solution/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/02/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/21/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
06/19/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0325
Prometrix
controller that slides in from right horizontally.
RS75
Prometrix/KLA
Wafer Resistivity
05/04/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
06/06/2018 Repaired/shipped
GetSpares 95-3155
Gasonics
Cluster Misc Controller With AC power detect J6
PEP3510
Novellus/Gasonics
RIE/Plasma
07/28/2016 Repaired/shipped
GetSpares 567-5101 HV Supply
Hitachi
Hv supply for electron gun
Unknown CD SEM
Hitachi
SEM
05/22/2018 For Sale/ Stock
GetSpares LSMUT_TF
Comvolt
Just an HV timer.
SMBUS_ASMU1
Comvolt
lab tester
05/15/2018 Custom solution/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
06/01/2018 Repaired/shipped
GetSpares 001-4130-03
Brooks
Brooks ACE VCE Controller
LAM and others
Brooks
Robots
05/23/2018 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018 For Sale/ Stock
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/21/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
05/15/2018 Repaired/shipped
GetSpares 810-025368-001
Lam Research
Simple relay board. located in top left of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/21/2015 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/27/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
03/27/2018 Repaired/shipped
GetSpares CESB-2012
DNS
Spin Board
80A
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/14/2018 Repaired/shipped
GetSpares EEJA-001A
DNS
6-axis controller based on the note on this unit.
80B
DNS
Photolithograpy
04/06/2018 Repaired/shipped
GetSpares EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/25/2017 For Sale/ Stock
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
SK200
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
SK200
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares 95-0541Misc Controller
Gasonics

PEP3510
Novellus/Gasonics
RIE/Plasma
10/27/2016 Repaired/shipped
GetSpares 1-139-023
IDI
Communications Card
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-139-022
IDI
Pump Controller
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Custom solution/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
04/10/2018 Repaired/shipped
GetSpares 375039
Tencor
Data Processing Board
AIT2
KLA
Inspection
04/05/2018 Custom solution/shipped
GetSpares 810-025369-001
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/03/2018 Repaired/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds
Lam-TCU_2080
Lam
Chiller
04/03/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
04/03/2018 Repaired/shipped
GetSpares Super Vexta UDX5107
Vexta
5 axis driver
80A
DNS
Photolithograpy
03/29/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
03/22/2018 Repaired/shipped
GetSpares 3510N45E10
Tamagawa
Tamagawa Motor AC servo
80B
DNS
Photolithograpy
03/19/2018 Repaired/shipped
GetSpares 373583
Tencor
ANALOG BOARD
AIT2
KLA
Inspection
06/22/2016 Repaired/shipped
GetSpares SQV175-1433-2
Prometrix
Power Supply
6220
KLA
Inspection
02/28/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
01/29/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
01/29/2018 Repaired/shipped
GetSpares 0100-02016 0100-20066
AMAT
Analog Sync Detect AMAT
P5000
Applied Materials AMAT
RIE/Plasma
01/04/2018 For Sale/ Stock
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
02/15/2018 Repaired/shipped

ETEC/ATEQ/AMAT LTS TCB Video Generator Board 8007-0011

The Video Generator (VG) board is an integral part of ETEC laser beam lithography tools. Common symptoms of a failed board include:

  • “No signal detected at PAQ AD” (Pattern Acquisition Adjust)
  • “VG not responding”
  • Tool will not pass a system restart

GetSpares.com has proven capability to restore failed VGs to full function.  Contact them today for replacement/repair solutions.

Bottom view of ETEC Video Generator board 8007-0011

Bottom view of ETEC Video Generator board 8007-0011

Top view of ETEC Video Generator board 8007-0011

Top view of ETEC Video Generator board 8007-0011

Applied Materials 0190-09379 VME V21 Synergy CPU for P5000 RIE & CVD

The 0190-09379 VME V21 Synergy card is the CPU module for Applied Materials P5000 Reactive-ion Etching (RIE) and Chemical Vapor Deposition (CVD) Tool.  These modules are reaching their life expectancy and beginning to fail.

If your P5000 is losing track of time, suffering erratic logging data, or experiencing any similar symptoms, contact GetSpares.com for replacement solutions.  GetSpares maintains a functional P5000 on the warehouse floor with which all 0190-09379 VME V21 Synergy CPUs are tested – a guarantee that the replacement module will function in your P5000.  Head to GetSpares.com today!

Applied Materials 0190-09379 VME V21 Synergy CPU

Top View: Applied Materials 0190-09379 VME V21 Synergy CPU

View of Applied Materials P5000 instrument panel with 0190-09379 VME V21 Synergy CPU card removed.

View of Applied Materials P5000 Electronic Module Cabinet with 0190-09379 VME V21 Synergy CPU card removed.

Side View of 0190-09379 VME V21 Synergy CPU card installed into Applied Materials P5000 Electronic Module Cabinet

Side View of 0190-09379 VME V21 Synergy CPU card installed into Applied Materials P5000 Electronic Module Cabinet