GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.
Example alarm that has been resolved:
-CODE 1-03-0247 [station 1 – unit 3 (spin) – code 0247]: Servo Controller Communication Error
If you are experiencing any communication or “rev” (RPM) errors in the spin units of your DNS equipment, contact GetSpares.com today for the right solution!
CESA-804 Servo Amp Pack for DNS 80A
Servo amps AU6356N2 (a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) are sitting in a fully functional track, ready to be pulled and sent to you when you need it. In DNS 80B tracks, these electronic modules control the spin of a wafer in the coating and developing processes. The common failure mode is loss of LED indication on the connection panel and erratic or non existent motor control. GetSpares.com keeps these modules installed in fully operational tracks in their warehouse inventory, so you know they are working. When you order a module, it’s pulled from the track and shipped. Head to GetSpares.com and order yours today!
DNS80B: Wafer in coater ready for spin
DNS80B: Wafer after spin
DNS80B: Electronic Module Cabinet
DNS80B: AU3656N20 Servo Amp Controllers
When you no longer see the LEDS illuminate in the top right cutout, the module needs to be replaced.
DNS80B – Cassette, Arm, Track
Front view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR) installed in track
Top view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR)