TEL Tokyo Electron Clean Track – INR-244-216B SMC Thermo-Con Failure

Have a INR-244-216B that failed?  Common symptoms are E800 and E820 codes on the front panel.  Fan not spinning or LED not illuminated?  Contact GetSpares.com.  There is a fully functional track with its main purpose to test your parts or supply its parts for you in case of an emergency.  Below is a list of  of error codes that go along with the the SMC Thermo-Con on a Tel Clean Track.  E800 or E820 are the common failures for this INR-244-216 box. Note that, the track can run sometimes without error even if the the SMC Thermo-Con unit does have problems.

INR-244-211C-43 with INR-244-216

Other relevant and available parts are 2TP-2B575, INR-244-244T-670 and INR-244-253-6400  Operator Panel / Keypad -C3 -D9 .  There are parts inside cabinet INR-244-211C-43.

If you isolate the problem to this, and need a replacement or repair contact GetSpares.  Where they have a fully functional track running and ready to test and supply parts for you.

Error codes for SMC unit

 

E000 ROM check error. ROM check error at power supply.
E001 RAM check error. RAM checkerror at power supply.
E002 Back up data error. EEROM data is lost.
E100 Alarm at low voltage in power supply of thermo-modules . Occurs in case of over current.
E200 High temperature alarm. Occurs when the input value of control sensor exceeds 60C degrees.
E300 Low temperature alarm. Occurs When the input value of control sensor falls below 0 C.
E400 Thermostat alarm. Occurs when the contact point of a thermostat is open.
E500 Temp. control impossible. This alarm Works if termperature does not change properly (the range varies 0.1~0.9°C) when 100% output is continued for certain period of time (varies 1~60 min.)
E600 Flow switch alarm. Occurs when flow switch is ON.
E700 Alarm of control sensor broken wire. Occurs if broken disconnected.
E800 Pump abnormality alarm. Pump has something wrong.
E810 Water leakage abnormality alarm. water leakage sensor detects abnormality.
E820 Fan alarm. Cooling fan for each switching power supply stops.
E840 Level abnormality alarm. Level sensor detects abnormality.

AU6356N2( a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) Servo Amp Controller for DNS 80B Coat and Develop Tracks

 

Servo amps AU6356N2 (a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) are sitting in a fully functional track, ready to be pulled and sent to you when you need it. In DNS 80B tracks, these electronic modules control the spin of a wafer in the coating and developing processes. The common failure mode is loss of LED indication on the connection panel and erratic or non existent motor control. GetSpares.com keeps these modules installed in fully operational tracks in their warehouse inventory, so you know they are working. When you order a module, it’s pulled from the track and shipped. Head to GetSpares.com and order yours today!

DNS80B: Wafer in coater ready for spin

DNS80B: Wafer in coater ready for spin

DNS80B: Wafer after spin

DNS80B: Wafer after spin

 

 

 

 

 

 

 

 

 

DNS80B: Electronic Module Cabinet

DNS80B: Electronic Module Cabinet

DNS80B: AU3656N20 Servo Amp Controllers

DNS80B: AU3656N20 Servo Amp Controllers

When you no longer see the LEDS illuminate in the top right cutout, the module needs to be replaced.

When you no longer see the LEDS illuminate in the top right cutout, the module needs to be replaced.

DNS80B - Cassette, Arm, Track

DNS80B – Cassette, Arm, Track

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Front view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR) installed in track

Front view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR) installed in track

Top view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR)

Top view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR)