DNS 80B Track – Removing Supply from EEYC-0011 EEYC-0111 2-VC-20626 2-VC-20627

Posted on September 17, 2018 by Currentflow

This post shows how to remove the power supply from the side of the station controller for DNS 80B coater/developer tracks. There is no need to remove the whole card cage if you are sending in a repair. It would be too bulky. The part here can go by a variety of names such as EEYC-0011, EEYC-0111, 2-VC-20626 and 2-VC-20627. Remember contact www.GetSpares.com for this or any other semiconductor tool parts that you need. Here you go…

This is a rare case where we recommend that the customer open a part to send a controller by itself

INR-244-402 aka 2-39-45751 Chemical Temperature Controller for DNS 80B

Posted on July 6, 2016 by Currentflow

The Chemical Temperature Control unit (part number INR-244-402 aka 2-39-45751) for DNS 80B photolithography track is a known failure point. Symptoms include communication errors, error code “00”, and failure to meet temperature set point.

GetSpares.com has discovered the electronic repair solutions for restoring these units to operational status. Additionally, GetSpares.com maintains functional DNS tracks on the warehouse floor, providing a conclusive test environment for any DNS parts.

Contact GetSpares.com today for your repair or replacement needs!

Front View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

Rear View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

GEIA-001 (aka 2-VC-28124) 6-axis Motor Driver for DNS SK200 Interface-B Unit

Posted on April 20, 2016 by Currentflow

The 6-axis Motor Driver, part numbers GEIA-001 or 2-VC-28124, drives the handler robots EV1 and EV2 in the Interface-B (IF-B) unit of DNS SK200 coater track. Faulty handler operation in the IF-B has been traced back to failed electronics in the 6-axis Motor Driver.

GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

If you are experiencing handler motor drive problems in your DNS equipment, contact GetSpares.com today for the right solution!

GEIA-001 (aka 2-VC-28124) 6-axis Motor Driver for DNS SK200

GEPH-001/GEPH-001X3 AC Box Power Supply for DNS SK200 Coater Track

Posted on April 19, 2016 by Currentflow

Power failures in DNS SK200 coater track have been traced back to failed electronics in the AC Power Supply Box – part number GEPH-001/GEPH-001X3.

GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

If you are experiencing general power failures (or even a “dead” track) in your DNS equipment, contact GetSpares.com today for the right solution!

GEPH_001X3 AC Power Supply Box DNS SK200

DNS 60/80 A/B EEMP-0021X3, EEMP-0013 LCD Monitors – Color and Monochrome

Posted on July 22, 2015 by Currentflow

DNS part numbers EEMP-0021X3 and EEMP-0013 are LCD monitors that can be used in either the 60A, 60B, 80A, or 80B tracks, depending on the track configuration.

Monitor installed in DNS 80B

Monitor installed in DNS 80B, telescoped out

These can fail or malfunction if installed in a tool not configured for that exact part number. EEMP-0021X3 is a full color display, whereas EEMP-0013 is a monochrome display.

DNS EEMP-0013 Monochrome LCD monitor installed in 80B

DNS EEMP-0021X3 Color LCD monitor installed in 80B

A known symptom of color vs. monochrome incompatibility is loss of directional sync on the monitor. The screen image will continuously and uncontrollably “roll” like the images in a slot machine. Another failure symptom is no image at all, but this is less likely a compatibility issue as opposed to general circuit failure. In either case, GetSpares.com maintains a fully operational DNS 80B track and parts, as well as the capability to repair and test parts. If your DNS LCD monitor is failing, contact GetSpares for quality repair/replacement solutions.

Dainippon Screen -80B Schematics Lists

Posted on June 23, 2015 by Currentflow

List of schematics for DNS 80B tracks. Here is a list of schematics for control schematics.

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
ELECTRICAL CIRCUIT DIAGRAM LIST
HIGH PRESSURE GENERATION UNIT
JEHP-005
co2 BUBBLING CONTROLLER
SECO-1053
cog BUBBLING UNIT
SECV-104
MAINTENANCE PANEL [ SPIN UNIT 1
CESP-0015
STEPDOWN TRANSFORMER
9EDT-101A
STEPDOWN TRANSFORMER
9EDT-111A
STEPDOWN TRANSFORMER
9EDT-201A
STEPDOWN TRANSFORMER
9EDT-211A

2/9
STATION CONTROLLER [ INDEXER UNIT ]
EEDC-0011
STATION CONTROLLER [ TRANSPORT UNIT ]
EERC-0011
STATION CONTROLLER [ SPIN UNIT ]
EESC-0011
STATION CONTROLLER [ BAKE UNIT ]
EEBC-0012
STATION CONTROLLER [ UEEW UNIT ]
EEEC-002
STATION CONTROLLER [ IF-B UNIT ]
EEEB-001
MAIN I/0 IFC BOX
EEMH-001
MAIN EXTERNAL IFC BOX
EEMI-001
STATION CONTROLLER
EEYC-0#11
MAIN PANEL [ STANDARD TYPE ]
EEMP-001#
MAIN PANEL [ MOTORED TYPE ]
EEMP-0112
INDEXER PANEL
EEDP-001
PORTABLE PANEL IFC BOX
EEMJ-002

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
3/9
INDEXER A UNIT [ VACUUMLESS TYPE ]
EED#-001
INDEXER A UNIT [ VACUUM TYPE ]
EED#-0#1#
INTERFACE UNIT [ TYPE B ]
EEI#-####
TRANSPORT UNIT
EERM-OO1

4/9

SPIN UNIT [ COATER ]
EESM-0O1

SPIN UNIT [ POSITIVE DEVELOPER ]
EESM-O02

SPIN UNIT [ PIQ COATER ]
EESM-003

SPIN UNIT [ SCRUBBER ]
EESM-030

SPIN VACUUM SENSOR
EEFT-O01

SPIN CUP [ COATER, POSITIVE DEVELOPER ]
EESM~010

SPIN CUP [ MOTORED EBR NOZZLE ]
EES#-011

SPIN COVER
EESM-O20

RESIST PUMP CYLINDER SENSOR
EEFT-021

SPIN TWO-WAY WASTE DRAIN
EEFT-O51

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
5/9

CHEMICAL FLOW/LEVEL SENSOR
E##-0#1

SPIN CHEMICAL IFC BOX
EEFH-001

SPIN IFC BOARD
EESD-O01

EXTERNAL ALARM IFC BOARD
EEKD-O01

CHEMICAL FLOW/LEVEL SENSOR IFC BOARD
EEFD-001

D-SONIC IFC BOX
EEFI-001

EXHAUST CONTROLLER
EESW-0#1

DRAIN BOX SENSOR
EEFT-O#11

AUTO-DRAIN BOX SENSOR
EEC#-0#1

DIRECT-DRAIN SENSOR
EEFT-O71

SV IFC BOARD
EECS-O#1
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST

6/9

BAKE UNIT [ HP(HH,AH) ]
EEBM-O##
BAKE UNIT [ CP(AC) ]
EEBN-O#1
BAKE UNIT [ LPAH ]
EEBO-0#1
BAKE SV
EEBS-010
BAKE IFC BOARD
EEBD-O01
HEATER CONTROLLER
EEB#-0O1##
COMMON T0 CHEMICAL CONTROLLER
EEC#-001
CHEMICAL CONTROLLER [ SD ONLY ]
EEC#-011
CHEMICAL CONTROLLER [ SC+SD TYPE ]
EEC#-001
SwITCHINC BOTTLES SENSOR
EECN-0#1
AUTO-SUPPLY SYSTEM SENSOR
EECN-0#11

7/9

LOWER LIMIT SENSOR
EEH#-0#1
EXHAUST SOURCE PRESSURE SENSOR
EEHW-O#1
DIW SOURCE PRESSURE SENSOR [ SPIN UNIT ]
EEHW-011
SOURCE PRESSURE SENSOR
EE##”OO1
LEAKAGE SENSOR
EEHY-O11
CIRCUIT BREAKER BOX
EEPB-00#
AC POWER SUPPLY
EEP#-00#
MAIN POWER ON/OFF SWITCH BOX
EEMK-001
EMERGENCY POWER OFF SWITCH
EEPI-OO1

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST

8/9
TOWER-LAMP
EEMT-0O1

DEEW UNIT
EEUM-0O2

IMAGE SENSOR CONTROLLER
EEUE-001
DEEW POWER SUPPLY BOX
EEUB-001
HOST,AGV IFC BOX
EEMX-00#1

DRIVER UNIT POWER RELAY CABLE
EEKL-OO1

9/9
AIR CONDITIONING UNIT ALARM CABLE
EEHW-0#1

CABLE CONNECTION [ MAIN CONTROLLER ]
EEML-001

CABLE CONNECTION [ INDEXER UNIT ]
EEDL-O01

CABLE CONNECTION [ TRANSPORT UNIT ]
EERL-001

CABLE CONNECTION [ SPIN UNIT ]
EESL-O01

CABLE CONNECTION [ SPIN CHEMICAL IFC BOX ]
EEFL-OO1

CABLE CONNECTION [ BAKE UNIT ]
EEBLâ-O01

CABLE CONNECTION [ CHEMICAL CONTROLLER ]
EECLâ-O01

CABLE CONNECTION [ ALARM IFC BOX ]
EEHL-O01

CABLE CONNECTION [ INTERFACE UNIT (TYPE B) ]

CABLE CONNECTION [ UEEW UNIT ]
EEEL-0O1

CABLE CONNECTION [ DEEW UNIT ]
EEUL-O01

Maintenance Panels CESP-001A, CESP-0017, CESP-0018, CESP-002 for DNS80B track

Posted on March 20, 2015 by Currentflow

GetSpares.com has good parts for sale in a fully operational DNS 80B wafer spin coating track.

These are the part numbers for the manual control Maintenance Panels:

CESP-001A – Panel with pump control through PCN5

CESP-0017X2 -Panel with pump control through PCN5

CESP-0017 -Panel (No PCN5)

CESP-0018 – Panel (No PCN5)

CESP-002 – Panel (No PCN5)

CESP-0012 – Panel (No PCN5)

Head to GetSpares.com to order the parts you need.

Maintenance Panel CESP_0017 and similar. DNS 80B

DNS 80B

Information Repository

Comvolt

Tag Archives: COATER