Trouble finding the right part number for your DNS 80B part?  Look no further!  We scanned and OCR’ed the official Dainippon Screen Parts List for your convenience. Peruse the results below.  Contact www.GetSpares.com for replacement or repair solutions on the parts you need.

SERVICE ‘PARTS LIST (80B).x1s Z§_,_C_Qnj’__r_Q_I_U_n_i_t

REV.5.1 00.09
No A PARTS NAME APPLICATION TYPE PARTS No. DEL. MANUFACTURER REMARKS DIV. REV.
1 Indexer board ID-A EEDC-0011 2-VC-19089

2 Indexer board ID-A EEDC-0012 2-VC-34410 4

3 IF-B board (Type 1) IF-B EEIB-O01 2-VC-18166 1
14 IF-B board (Type 2) IF-B EEIC—OO1 2-VC*19284 1
5 IF-B board IF-B EEIC-0012 2-VC-19284-2 4
6 Transport board Transport unit EERC~O012 2-VC-19090-1 3
7 Spin board Spin EESC-0012 2-VC-19115

:3 Bake board Bake EEBC-0012 2-VC-19116

S9 Bake board Bake EEBC-0013 2-VC-34409 4
10 EEW board DEEW 2-VC-18987 1
11 EEW board DEEW EEUC-0013 2-VC-18987-4 4
12 EEW board DEEW EEUC-0014 2-VC-18987-5 4
13 EEW board DEEW EEUC-0015 2-VC-18987-6 4
14 EEW board UEEW EEEC-O02 2-VC-16147-2 1
15 Spin IFC board I Spin EESD-O01 2-VC-16027

16 EBR IFC bard Spin EESD-O11 2-VC—17102

17 Bake IFC board Bake EEBD—OO1 2-VC-16010

18 DS-LAN board *1 Main controller CEML-0014 2-VC-10751-3 3

19 DS-LAN board *1 Main controller CEML-0014 2-VC-10751-4 5
20 DS-LAN board *1 Main controller CEML~0O16 2-VC-10751-5 5
21 Parallel I/O board *1 Main controller CEMI-0011 2-VC-09977-1
22 RAS board Main controller FC-9801-06K 2-39-48605 NEC gg;380lB/2
23 Simplified RAS board Main controller PC-9821KE-E06 2~39-59409 NEC 5
24 Main controller FC-9821X/2 2-VB-25463
25 Main controller FC-9821X/2 2-VB-25463
26 HD adapter Main controller FC-9821KA-E01 2-39-59405 NEC 5
27 Hard disk drive Main controller §Cgg8fi$XA-HD1 2-39-59406 NBC 5
28 Copy board *1 Copy for main panel CEMG-O01 2-VC-20712 2
29 Copy board *1 Copy for main panel CEMG-0021 2-VC-24889 3
30 Station controller STANDARD (20 SLOTS) EEYC-0011 2-VC-20626 2
31 Station controller 28 SLOTS TYPE EEYC-O111 2-VC-20627 . 2
32 Station controller 11 SLOTS TYPE EEYC-003 2-VC-34399 5
33 GEM controller EEMZ-001 2-VC-25207-1 3
34 GEM controller EEMZ—0O11 2-VC—25207-2 5
35 1/0 unit box Main controller EEMH-001 2-VC-16705
36 Heater controller Bake unit(Max.8 HP) EEBH-0011 2-VC*162l7-1

37 Heater controller Bake unit EEBH~6011 2-VC-34885 CE TYPE 5
flmwm‘ 38 Servo amplifier Spin motor drive AU6356N20 2-39-53462 3
. 39 Servo amplifier Spin motor drive (8OB) EESA-0O1A1 2-VC-16396-2
40 AC power supply Primary AC power input/ EEPH-001 2-VC-16214
Secondary power output
UPS *l*2 Main controller back-up PS500 2-39-55593 HEIAN ELE §;fg“f$fHmJ%Ei 3.1
41 . 121368. (There is 5 UL
label on the backside
of the main body.)
42 Main panel EEMP-0013 2-VC-21746 2
43 Main panel Motor—drive EEMP-0112 2-VC-21747-1 2
44 Main panel Motor-drive EEMP-0113 2-VC-28117
45 Portable main panel EEMP-0212 2~VC-21717 2
46 ID-A panel ID-A EEDP—O01A 2-VC-14786-7 5
47 Maintenance panel ‘ *1 Spin unit CESP-0017 2-VC-10752-6 3
48 Maintenance panel UEEW EEEP-001 2-VC-17848-1 3
49 5 axis motor driver I EEKB-0011 2-VC-26961
50 8 axis motor driver ID—A/Transport Unit EEKA-001 2-VC-15485
51 8 axis motor driver ID-A/Transport Unit EEKA-0011 2-VC~23936

PORP (Incl. Printer) Edit Recipe on Portable
Personal Computer
Book type Personal comp. PC-9801NS/T40
Memory Card (8MB) RCS-8000
52 Application Software PS-98-1002-32 Ver.3.3D
Cable PORP-Printer PC-9801N-19
Printer PC-PR150N
PORP (Not incl. Printer) Edit Recipe on Portable
Personal Computer
Book type Personal comp. PC-9801NS/T40
53 Memory Card (8MB) RCS-8000
Application Software PS-98-1002-32 Ver.3.3D
Cable PORP-User’s Printer PC-9801N—19
54 EBR motor driver EBR CSD5807N-P 2-39-46547
CP power supply unit Cooling plate MR-2015 fig; 2-39~45432
‘K 56 CP controller Cooling plate FRD-4 1 2-39-45431
57 Chemical temp controller INR-244-402 2-39-45751
58 Circulator Chemical temp controller INR-244—404 (2oov) 2-39-45750
59 Circulator Chemical temp controller INR-244-406 (220V) 2-39-48373
60 Panel Chemical Temp Controller INR-244-403 2-39-48374 1
61 WCDS controller *1 For photoresist CECC~4012 2-VC-19786-1 2
62 WCDS panel *1 For photoresist CECP-001 2-VC-14144-1 2
63 Air elimination control. For photoresist PDS-1602 2-39-48738 2
*1
64 Air elimination panel *1 For photoresist PDS-1520 2-39-47429 2
65 Battery unit UPS Type BT-2-48(2Ah-4 48V) 2-39-58575
66 Fuse UPS Type (UL) TSC-8A 2-39-58576 s. 0. C
67 UPS with a Cable Main controller back-up CEMD-0012 2-VC-09974-1 HEIAN ELE
68 Video measure sensor DEEW EEUE-001B 2-VC-30392 Z4LC-CD2 TYPE 3.1
controller
Video measure sensor DEEW EEVE-001 2-VC-18989 3X2CA—PLC8 TYPE 4
69 controller
*1 Common to 80A
*2 back-up time comes to be shorter by degrees because the inside battery getting old.

Contact www.GetSpares.com for replacement or repair solutions on the parts you need.