The GaSonics PEP3510 ashing and etching system offers two parallel process chambers, each governed by a set of three electronic modules referred to as mini-controllers.  The relevant part numbers for each mini-controller are listed below: 

Miscellaneous: 95-3978, 95-3157, 95-0541
Microwave: 95-0547, 95-3154
Gas Box: 95-0537, 95-2977

Failure of these mini-controllers is frequent and can result in an array of malfunctions including loss of communication, loss of door/lamp/wafer pin control, invalid status errors, and over-reading power output of the microwave.

GetSpares.com has these mini-controllers currently installed in a fully functional PEP3510.  They are ready to be pulled and shipped to you today.  Head to GetSpares.com for your parts needs!

Process Mini Controllers – front

Process Mini Controllers – rear

Novellus GaSonics PEP3510

Novellus GaSonics PEP3510