DNS 80B Track – Removing Supply from EEYC-0011 EEYC-0111 2-VC-20626 2-VC-20627

Posted on September 17, 2018 by Currentflow

This post shows how to remove the power supply from the side of the station controller for DNS 80B coater/developer tracks. There is no need to remove the whole card cage if you are sending in a repair. It would be too bulky. The part here can go by a variety of names such as EEYC-0011, EEYC-0111, 2-VC-20626 and 2-VC-20627. Remember contact www.GetSpares.com for this or any other semiconductor tool parts that you need. Here you go…

This is a rare case where we recommend that the customer open a part to send a controller by itself

KLA Therma-Wave Opti-Probe 14-008473 REV B 14-007009 REV B1 REV G 14-007003 Backplane Connector on

Posted on September 1, 2016 by Currentflow

If you get your electronics from GetSpares.com, you know the unit will be fully functional. Why? Because they test it in the actual tool and run wafers. Once in a while, a fully functional board can get damaged due to a simple installation mishap. This post describes this exact situation on KLA / Thermawave Opti-Probe 2600,2690,3260 and 3290 series film measurement tools. Some common revs of this board have part numbers:

14-008473, 14-007009, 14-007003, 14-010064

A 2 minute card swap can turn into a disaster if the P1 power connector is installed 180 degrees rotated. Careful, this is easy to do because the connector is not keyed! Take a look at the following picture to see the correct orientation.

P1 Connector. Pin 1 location

Applies to 2600,2680,3260,3290

What happens if it rotated? More than we have time to describe! But basically, when this board fails you may see the following errors:

0x09080008 Can’t complete hardware initialization

0x0608000A Can’t Focus

0x06080011 Failed to close high mag focus loop

0x06080035 High mag focus capture failed: soft limit

0x06080050 Focus pos: 5.466 Limit: 5.465 Corr: 0.000

Don’t forget to visit GetSpares.com for this auto-focus board and many other semiconductor parts.

Hope this helps and Good luck!

AU6356N2( a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) Servo Amp Controller for DNS 80B Coat and Develop Tracks

Posted on February 23, 2015 by Currentflow

Servo amps AU6356N2 (a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) are sitting in a fully functional track, ready to be pulled and sent to you when you need it. In DNS 80B tracks, these electronic modules control the spin of a wafer in the coating and developing processes. The common failure mode is loss of LED indication on the connection panel and erratic or non existent motor control. GetSpares.com keeps these modules installed in fully operational tracks in their warehouse inventory, so you know they are working. When you order a module, it’s pulled from the track and shipped. Head to GetSpares.com and order yours today!