More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/06/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
07/13/2018 Repaired/shipped
GetSpares 36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/01/2018 Custom solution/shipped
GetSpares 36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/01/2018 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/01/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/19/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
07/13/2018 Repaired/shipped
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
07/02/2018 Repaired/shipped
GetSpares BU504XII 2-XZ-10840
OMRON
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018 Repaired/shipped
GetSpares PS500 2-39-55593
DNS
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/21/2018 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
07/11/2018 Repaired/shipped
GetSpares EEBH-0011X1
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/28/2018 Repaired/shipped
GetSpares EEBH-0011
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/19/2018 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/06/2017 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares EEYC-001
DNS
Cage for all the slave cards in front of track
80B
DNS
Photolithograpy
07/02/2018 Custom solution/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/02/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/21/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
06/19/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0325
Prometrix
controller that slides in from right horizontally.
RS75
Prometrix/KLA
Wafer Resistivity
05/04/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
06/06/2018 Repaired/shipped
GetSpares 95-3155
Gasonics
Cluster Misc Controller With AC power detect J6
PEP3510
Novellus/Gasonics
RIE/Plasma
07/28/2016 Repaired/shipped
GetSpares 567-5101 HV Supply
Hitachi
Hv supply for electron gun
Unknown CD SEM
Hitachi
SEM
05/22/2018 For Sale/ Stock
GetSpares LSMUT_TF
Comvolt
Just an HV timer.
SMBUS_ASMU1
Comvolt
lab tester
05/15/2018 Custom solution/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
06/01/2018 Repaired/shipped
GetSpares 001-4130-03
Brooks
Brooks ACE VCE Controller
LAM and others
Brooks
Robots
05/23/2018 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018 For Sale/ Stock
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/21/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
05/15/2018 Repaired/shipped
GetSpares 810-025368-001
Lam Research
Simple relay board. located in top left of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/21/2015 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/27/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
03/27/2018 Repaired/shipped
GetSpares CESB-2012
DNS
Spin Board
80A
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/14/2018 Repaired/shipped
GetSpares EEJA-001A
DNS
6-axis controller based on the note on this unit.
80B
DNS
Photolithograpy
04/06/2018 Repaired/shipped
GetSpares EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/25/2017 For Sale/ Stock
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
SK200
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
SK200
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares 95-0541Misc Controller
Gasonics

PEP3510
Novellus/Gasonics
RIE/Plasma
10/27/2016 Repaired/shipped
GetSpares 1-139-023
IDI
Communications Card
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-139-022
IDI
Pump Controller
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Custom solution/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
04/10/2018 Repaired/shipped
GetSpares 375039
Tencor
Data Processing Board
AIT2
KLA
Inspection
04/05/2018 Custom solution/shipped
GetSpares 810-025369-001
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/03/2018 Repaired/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds
Lam-TCU_2080
Lam
Chiller
04/03/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
04/03/2018 Repaired/shipped
GetSpares Super Vexta UDX5107
Vexta
5 axis driver
80A
DNS
Photolithograpy
03/29/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
03/22/2018 Repaired/shipped
GetSpares 3510N45E10
Tamagawa
Tamagawa Motor AC servo
80B
DNS
Photolithograpy
03/19/2018 Repaired/shipped
GetSpares 373583
Tencor
ANALOG BOARD
AIT2
KLA
Inspection
06/22/2016 Repaired/shipped
GetSpares SQV175-1433-2
Prometrix
Power Supply
6220
KLA
Inspection
02/28/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
01/29/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
01/29/2018 Repaired/shipped
GetSpares 0100-02016 0100-20066
AMAT
Analog Sync Detect AMAT
P5000
Applied Materials AMAT
RIE/Plasma
01/04/2018 For Sale/ Stock
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
02/15/2018 Repaired/shipped

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

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GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
11/08/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
11/06/2017 Repaired/shipped

DNS_Hamamatsu_L6001-01

GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
10/23/2017 Repaired/shipped
GetSpares T0351/10-1006
Tectrol
Power Supply
6200
KLA
Inspection
07/19/2017 For Sale/ Stock
GetSpares GLC352-CEF
Emerson
Power Supply
Not Specified
Not Specified
Not Specified
10/30/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
10/06/2017 Repaired/shipped
GetSpares EESA-001 AU3575N233 2-39-48133
DNS
servo amp
80B
DNS
Photolithograpy
10/25/2017 Repaired/shipped
GetSpares AU6351N60 2-39-57597
DNS
servo amp
80B Scrubber
DNS
Photolithograpy
10/22/2017 For Sale/ Stock
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/23/2017 Repaired/shipped
GetSpares EEUE-001
DNS
EEW Control Unit
80A
DNS
Photolithograpy
10/03/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
09/20/2017 For Sale/ Stock
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
10/12/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
10/06/2017 Repaired/shipped
GetSpares INR-497-P2393 A19393-01
SMC
2 channel controller board
INR-497-001B
SMC
Water Chiller
10/11/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
11/10/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
10/07/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
10/05/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
09/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/11/2016 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
09/26/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
09/22/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/06/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/21/2015 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
09/08/2017 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
09/18/2014 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4
80B
DNS
Photolithograpy
08/09/2017 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4
80B
DNS
Photolithograpy
08/09/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
07/21/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/31/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/22/2016 Repaired/shipped
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
07/17/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
07/17/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
01/19/2015 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
07/06/2017 Repaired/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
07/06/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/11/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/11/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
06/27/2017 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
06/23/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/23/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/23/2017 Repaired/shipped
GetSpares CESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
02/03/2017 Custom solution/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
04/02/2017 Repaired/shipped
GetSpares CESB-2011 2-VC-19075
DNS
Spin control board. Station Controller
60A
DNS
Photolithograpy
06/06/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/12/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
06/22/2016 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
06/12/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
06/12/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
06/06/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
06/06/2017 For Sale/ Stock
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
04/28/2017 Repaired/shipped
GetSpares 54-0311
Prometrix
UV1250/ 1050 optical array PDA
UV1050
Tencor/KLA
Inspection
01/03/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
06/06/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
05/30/2017 Repaired/shipped
GetSpares CESP-001A F-VC-40833
DNS
maintenance panel without SCN5
80B
DNS
Photolithograpy
04/11/2017 For Sale/ Stock
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
05/24/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 54-0317 36-0317
KLA
PCB Measurement Control Board 54-0317 36-0317
UV1250-UV1280
Tencor/KLA
Inspection
03/29/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
05/04/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/15/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/15/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/08/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
05/09/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/19/2017 Repaired/shipped
GetSpares 710-693221-000
KLA
Matrox Corona Rev 6 8M Confg AIT2, Slot
8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM
04/17/2017 Repaired/shipped
GetSpares 356166 Matrox Corona
KLA
U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18
AIT2
KLA
Inspection
04/17/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
04/24/2017 Repaired/shipped
GetSpares CEMP-0016 EEMP-0021X3
DNS
Main Display Panel
80A
DNS
Photolithograpy
04/18/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
04/19/2017 Custom solution/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
04/03/2017 Repaired/shipped
GetSpares 55079-763288
Prometrix
PCA-DUAL Stepper Driver
RS55
Prometrix/KLA
Wafer Resistivity
03/29/2017 Repaired/shipped
GetSpares 36-0201
Prometrix
H2 Interface PCB for UV1050/UV1250
UV1050
Tencor/KLA
Inspection
03/29/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
03/29/2017 Repaired/shipped
GetSpares 2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
04/03/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
03/13/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
04/04/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
04/02/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
03/10/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
03/13/2017 Custom solution/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
03/07/2017 Repaired/shipped
GetSpares CERB-1016 2-VC-15254-1
DNS
Transport Station Controller
60A
DNS
Photolithograpy
02/04/2017 Repaired/shipped
GetSpares 2114B-30SLQST
Cyonics
CYONICS-UNIPHASE
6220
KLA
Inspection
01/09/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
02/04/2017 Repaired/shipped

Hamamatsu L6001-01, L6599-01, L6299-12 Fragile!

Before sending your Hamamatsu lamp house to GetSpares.com. Although, most arrive in great, re-buildable condition, great care must be taken so that the sensitive elliptical (also known as parabolic or ellipsoidal) mirror is not destroyed while in shipping.  This applies to all Hamamatsu light sources with these spherical reflectors such as L6001-01, L6599-01 and L6299-12.

Cracked Hamamatsu Mirror. So Sad!

Cracked Hamamatsu Mirror. So Sad!

Some guidelines for shipping Hamamatsu Lamp Houses:

  • Pack one per box for obvious reasons, you don’t want problems from lost or stolen packages to be magnified.  Replacement of these boxes is approximately $20,000 from the manufacturer and is not easy.
  • Use lots of protective packing.   Assume the box will be abused.
  • If the alignment posts on the mirror are already cracked or “thinned” from years of use, call GetSpares.com.  There are special instructions because standard shipping will very likely cause the remaining posts to crack and wreak havoc.
  • Remove bulb from unit.

The vast majority of units arrive in good shape, but we wanted to warn customers that care must be taken.  In case your curious, this particular Hamamatsu was refurbished  (extra mirror was expensive !) and is shining bright and exposing edge beads daily.

Removing Power Supply From Hamamatsu L6001/L6299 UV-Spot Light Source

These Hamamatsu UV-Spot Light Sources can be found on spin coat tracks such as the Dainippon Screen DNS-80, DNS-60, SK200 and others. GetSpares.com, LLC has them in stock fully tested and ready.

L6001 From DNS SK200

L6001 From DNS SK200

 

 

 

 

 

 

 

 

 

The part number for the whole exposure assembly is L6001/L6299.  One of the common failure modes is when the UV light will not ignite or has a weak output.  The obvious culprits are the 50Volt igniter and the lamp part number L6190 / DNS 2-39-51072.  Assuming that those are known to be good, the next common failure is with the AG09 50V power supply.  These power supplies units can easily be swapped out with 8 screws in less than 10 minutes.

8 Screws to remove power unit

8 Screws to remove power unit

Hamamatsu L6299 UV Light – Low or No Output Causing Underexposure

Is your Hamamatsu L6299 UV light underexposing or not turning on at all? If you have checked the lamp and igniter, it is very likely a problem with your lamp power unit. This is part number AG09.  These boards are taken from fully functional DNS tracks at GetSpares.com.  To test yourself, all you need is a high power 10 ohm resistor.  Note that any time you are working with power supply boards, there are high voltages that can be deadly.  If you are not comfortable working around voltages as high as 400V do not try any of these tests.

Check HV Tabs Loaded and Unloaded.  Also make sure input power is ok.

Check HV Tabs Loaded and Unloaded. Also make sure input power is ok.

First thing to check is that the open circuit voltage is between 50 and 55V. Open circuit means that everything is disconnected from the HV+ and HV- tabs as illustrated above. If it is not withing this voltage, there is a problem with the board and it should be repaired. If it passes this test, the next step is to load it with the 10 ohm resistor.

With 10 ohms connected to the HV+ and the HV- tabs, the voltage should be no less than 33V across the resistor. If it is lower than that, there is a problem with the board and it should be repaired.

Hamamatsu L6299 UV Light Source – Lamp Power Unit AG09 and Others

Image

This post gives information for the Hamamatsu UV Slot Light Source. L6299 series. If you are having low lamp output or none at all, check this link about the Lamp Power Unit: http://www.comvolt.com/eblog/hamamatsu-l6299-uv-light-low-or-no-output-causing-underexposure/  This failure causes erratic exposure symptoms and uniform under exposure.  Otherwise, the maintenace manual below has the parts diagrams and the parts lists for the unit to help you troubleshoot your system.  If you need functioning parts from a functioning Hamamatsu Light source go to GetSpares.com and order yours today!

DNS Electronics Technical Bulletin
LP-031506-08
Hamamatsu Maintenance Manual 6299 Series
TB Release Date:
Revision No:
Applicable Mainframes:
Applicable Unit/Module:
Issuing Division:
Originating Data:
Route To:
Attachments:
Reference Document:
03/15/06
0
D-Spin 60B/80B/200W
Edge bead exposure unit (EEW)
DNSE Technical Resources
SSI (Screen Semiconductor Information) SSI-R0318-U81E-00
LP Customer Base Referencing Above Mainframe
None.
SSI-R0318-U10E, SSI-R0318-U80E
DNS Electronics
© Copyright by DAINIPPON SCREEN MFG.CO.,LTD. . All rights reserved.
March, 2006 1/1 Information No.: SSI-R0318-U81E-00メンテナンスマニュアル
Maintenance Manual
UVスポット光源/UV SPOT LIGHT SOURCE
L6299
series
部品を交換する場合は、必ず電源スイッチを切 Whenever replacing a part, be sure to turn OFF
り、本体背面の電源入力コネクタからプラグを the power and disconnect the plug from the
抜いてから、作業を行ってください。 power connector on the rear panel of L6299 be-
fore proceeding replacement.
ランプベース上に実装されているミラーやラン
プはガラス製精密部品です。不用意に物をぶつ
けたり落としたりしますと割れる場合がありま
すので、慎重に取り扱ってください。特にラン
プには高圧ガスが封入されているので、強い衝
撃を加えた場合に破裂する危険があります。充
The mirror and lamp installed on the lamp base
are precision parts made of glass. Use special
care when handling them. If they are hit with
something or dropped carelessly, they may
break. Particularly, as the lamp is filled with high-
pressure gas and apt to explode when exposed
分に注意して取り扱ってください。 to a strong impact, handle it very carefully.
フィルターユニットは精密に調整されていま The filter unit is precision adjusted. Handle the
す。特に絞り円盤は薄くて曲がりやすいので、 diaphragm disk particularly carefully as it is thin
慎重に取り扱ってください。 and easy to bend.
各所の配線を取り外した場合は、間違いなく元 Any wire that has been disconnected must be
の端子、コネクタに接続してください。特に電 connected to the terminal or connector as it was
源ラインやランプへの配線には大電流が流れま before disconnection. Be very careful when con-
すので、接触不良を起こさないように注意して necting the power line and the wire to the lamp
ください。 through which a large amount of current flows so
that no faulty contact occurs.
各所のネジ類を外す場合は、ネジの溝をこわさ
ないように適切な工具をお使いください。また
外したネジはなくさないように保管し、組立の
際は間違いなく元の位置に戻してください。
ネジロック
(ペイント)
がされている部分のネジ
は、外さない
(分解しない)
でください。
When removing screws, use an appropriate tool
not to damage the thread groove. Keep removed
screws in a safe place and re-install them in origi-
nal positions without fall during reassembly.
Do not disassemble where thread lock paint is
applied.
本メンテナンスマニュアルは無塵紙を使用しています■ 分解手順/DISASSEMBLY PROCEDURES
1
フィルターカバー、ランプカバー、アンダーカバーの取り外し
Removal of Filter Cover, Lamp Cover and Bottom Cover
1-1. ネジ
す。
左右4本を外して、フィルターカバーを外 1-1. Remove 4 screws (on both sides) and remove the filter
cover.
1-2. ネジ 左右2本を外して、ランプカバーを外す。 左右4本を外して、アンダーカバーを外す。 1-2. Remove 2 screws (on both sides) and remove the lamp
cover.
1-3. ネジ 1-3. Remove 4 screws (on both sides) and remove the bot-
tom cover.
ランプカバー
Lamp Cover
ランプホルダー
Lamp Holder
フィルターユニット
Filter Unit
フィルターカバー
Filter Cover
アンダーカバー
Bottom Cover
2
フィルターユニットの取り外し/Removal of Filter Unit
2-1. 16Pコネクタの左右のツメを外側に開いて、コネク 2-1. Pull open hooks on both side of the 16P connector and
タを抜く。 disconnect the connector.
2-2. ネジ 2-2. Remove 4 screws
4本を外して、フィルターユニットを外す。
and remove the filter unit.
フィルターユニット
Filter Unit
16P コネクタ
16P Connector
基板
Circuit Board
ツメ
Hook
1
ツメ
Hook3
ランプベースの取り外し/Removal of Lamp Base
3-1. バナナプラグを抜く。
3-2. ネジ
3-1. Pull out the banana plug.
1本を外す。
3-2. Remove the screw
3-3. ネジ 6本を外した後、インターロックスイッチの
4Pコネクタを外して、ランプベースを外す。

『インターロックスイッチの取り外し』
参照
ミラー
Mirror
.
3-3. After removing 6 screws
and disconnecting 4P con-
nector (interlock switch), remove the lamp base.
→Refer to “Removal of Interlock Switch”.
ミラーホルダー
Mirror Holder
ファイバーホルダー
Fiber Holder
バナナプラグ
Banana Plug
ランプベース
Lamp Base
4P コネクタ
4P Connector
注 意/CAUTION
これらのネジには絶対にさわらない
(動かさない)
こと
Never touch (or move) these screws.
4
コントロール基板の取り外し/Removal of Control Board
40P コネクタ
40P Connector
4-1. ネジ 2本を外した後、コネク
タスプリング
(上下2ヶ)
を左右
から押して外す。
16P コネクタ
16P Connector
コントロール基板
Control Board
6P コネクタ
6P Connector
コネクタスプリング
Connector Spring
4-2. 各コネクタ
(5ケ所)
を外す。
40P コネクタは、左右のツメを
外側に開いて抜く。
4-3. ピンセット等でプラスチックス
ペーサーの頭をはさみ、コント
ロール基板を静かに外す。
4-1. After removing 2 screws , re-
move two connector springs (upper
and lower) by squeezing from both
sides as arrows show.
2P コネクタ
2P Connector
4-2. Disconnect 5 connectors. Pull open
hooks on both side of the 40P con-
nector and disconnect the connec-
tor.
プラスチックスペーサー
Plastic Spacer
2P コネクタ
2P Connector
コネクタスプリング
Connector Spring
2
4-3. Use a pair of needle nose pliers to
close the ends of the plastic spaver.
Gently remove the control board.5
スタータの取り外し/Removing the Starter
5-1. COM, P端子の接続コード
(赤、黒)
をランプ電源の
コネクタから外す。
5-2. ネジ
5-1. Disconnect red (COM) and black (P) connecting cords
from the lamp power unit.
4本を外して、スタータを外す。
5-2. Remove 4 screws
5-3. +HV, COM, P端子の各接続コードを外す。
(ナット
セット ×3)
and remove the starter.
5-3. Disconnect each connecting cord from +HV, COM and
P terminals. (Nut set ×3)
シリコン線
Silicon Tube
スタータ
Starter
M4 ナット
M4 Nut
スプリングワッシャー
Spring Washer
平ワッシャー
Flat Washer
赤:Red
+HV
ランプへ
to Lamp
赤:Red
COM
P
圧着端子共締め
Crimp type terminals
tightened together

Red

Black
M4 ネジ
M4 Screw
コード
(赤)
Cable (Red)
スタータ
Starter
6
ランプ電源の取り外し/Removal of Lamp Power Unit
6-1. ランプ電源のコネクタ 6-2. ネジ
(8ケ所)
を外す。
4本を外して、ランプ電源を外す。
6-1. Disconnect 8 connectors from the lamp power unit. 6-2. Remove 4 screws
and remove the lamp power unit.
ランプ電源
Lamp Power Unit
白:White
黒:Black
赤:Red
黒:Black
茶:Brown
黄:Yellow
橙:Orange
赤:Red
Push
SW.
REM
青:Blue
緑:Green
茶:Brown
7
黒:
白: Black
White
フロントパネルの取り外し
Removing the Front Panel
7-1. ネジ
8
6本を外して、フロントパネルを外す。
7-1. Remove 6 screws
電源スイッチの取り外し
Removal of Power Switch
8-1. 接続コードを外した後、ツメを押し下げながら、
表パネル側へ電源スイッチを引き抜く。
and remove the front panel.
8-1. After disconnecting connection cords, pull the power
switch in the front panel direction while pushing hooks
against the power switch.
フロントパネル
Front Panel
電源スイッチ
Power Switch
白:White
ツメを押す
Push hooks
黒:Black
前へ引き抜く
Pull forward.
白:White
黒:Black
3
ツメを押す
Push hooksパネル基板の取り外し
Removing the Panel Board
9
9-1. 40Pコネクタを外した後、ネジ
ネル基板を外す。
リアパネルの取り外し
Removing the Rear Panel
10
5本を外して、パ
10-1. ネジ
6本を外して、リアパネルを外す。
10-1. Remove 6 screws
9-1. After disconnecting the 40P connector, remove the panel
board by removing 5 screws .
and remove the rear panel.
リアパネル
Rear Panel
温度センサー
Temperature Sensor
パネル基板
Panel Board
40P コネクタ
40P Connector
11
ノイズフィルターの取り外し
Removing the Noise Filter
11-1. 接続コードを外した後、ネジ
イズフィルターを外す。
2本を外して、ノ
12-1. コネクタ
(2ケ所)
を外した後、ネジ
て、DC12V電源を外す。
11-1. After disconnecting connection cords, remove 2 screws
and then remove the noise filter.
ノイズフィルター
Noise Filter
DC12V電源の取り外し
Removal of DC12V Power Unit
12
4本を外し
12-1. After disconnecting 2 connectors, remove the DC12V
power unit by removing 4 screws .
DC12V電源
DC12V Power Unit
白:White
白:White
黒:Black
黒:Black
13
黒:Black
白:White
電源スイッチ
Power Switch
黒:Black
赤:Red
緑:Green
ファンの取り外し/Removal of Fan
14
インターロックスイッチの取り外し
Removal of Interlock Switch
13-1. コントロール基盤上の2P コネクタを外した後、ネ 14-1. コネクタを外した後(→ランプベースの取り外し)
ジセット 4本を外して、ファンを外す。 、
ネジ 2本を外してインターロックスイッチを外す。
13-1. After disconnecting the 2P connector (on the control 14-1. After disconnecting the connector (refer to “Removal
board), remove the fan by removing 4 screws . and then remove
of Lamp Base”), remove 2 screws
the interlock switch.
ファン:Fan
2P コネクタ (コントロール基板へ)
2P Connector (to Control Board)
2Pコネクタ
2P Connector
インターロック
スイッチ
Interlock Switch
フィンガード
Fin Guard
415
シャッターユニットの交換/Replacing the Shutter Unit
15-1. ネジ 2本を外し、上カバーを取り外す。
15-2. ネジ 15-1. Loosen and remove the 2 Screws 3本を外し、モーターカバーを真上に引き抜
く。 cover .
15-2. Loosen and remove the 3 Screws
straight up.
15-3. 固定ナット 2個を外し、シャッターユニット
(ソ
レノイド+シャッター台座+シャッター板)
を取り
外す。
, and remove the top
, lift the Motor Cover
15-3. Loosen and remove the 2 Nuts , and remove the Shutter
Unit (Solenoid +Shutter Mount Plate +Shutter Plate).
15-4. Attach the new Shutter Unit to the Unit Base.
15-4. 新しいシャッターユニットをユニットベースに取り
付ける。
CAUTION
注 意
Firmly tighten the fixing nuts , and apply “liq-
uid screw lock” to the nuts to hold them firmly in
place.
固定ナット は、しっかり締め付け、ネジ部にゆる
み止め
(ネジロック)
を塗布すること。
15-5. Vertically slip the Motor Cover, gently into position, and
replace the 3 Screws . Make sure that the Motor Cover
does not come in contact with the Shutter Plate.
15-5. モーターカバーを真上から静かに差し込んで、ネジ
3本で取り付ける。このとき、シャッター板に
モーターカバーを当てないように注意すること。
注 意
CAUTION
シャッター板とモーターカバーとの間に1∼2mmの間
隔があり、
作動時に接触しないことを確認すること。
15-6. ネジ
There should be a 1-2mm gap between the Shut-
ter Plate and the Motor Cover, make sure the two
do not come into contact under operation.
2本で、上カバーを取り付ける。
15-6. Replace the Top Cover with the 2 Screws
シャッターユニット:AG615
Shutter Unit:AG615
モーターカバー
Motor Cover
上カバー
Top Cover
5
.16
ボタン電池の交換/Replacing the Button Type Battery
光源には、ランプ点灯積算時間を記憶するためのバック The light source uses a backup button type battery to keep the
アップ用ボタン電池が使用されています。長期間にわた accumulated lamp ON time in memory. Use of the light source
り光源を使用した場合、バッテリーが消耗し、ランプ点 for a long time may cause the battery to deteriorate, resulting in
灯積算時間が表示されなくなることがあります。その場 a failure to display the accumulated lamp ON time. In such case,
合は電池の寿命ですので、下記規格の新しいボタン電池 as its service life of the battery is over, replace it with a new
と交換してください。 button type battery of the proper rating as follows.
・ボタン電池型名:Panasonic リチウム電池 BR2032 ・Button type battery name:
Panasonic lithium battery BR2032
・仕様:公称電圧 3V、公称容量 190 mAh
・Specification:
Nominal voltage 3V, Nominal capacity 190 mAh
【交換手順】
16-1. 電池ホルダーから、古いボタン電池を取り外す。
【Replacement procedure】
16-2. 手袋をはめ、新しいボタン電池を電池ホルダーに装
着する。このとき、プラス
(+)
表示のある面が表面
になる向きで、電池を装着すること。
16-1. Remove the existing button type battery from the battery
holder.
16-2. Put on gloves and install a new button type battery in the
buttery holder. At this time, be sure to set the battery so
that its face with a positive (+) mark facing up.
ボタン電池の取扱注意事項
(松下電池工業 取り扱い説明文引用)
・ 充電・ショート・分解・加熱・火中投入禁止。 Precautions for handling the button type battery
・ 他の金属や電池とまぜないこと。 (Quoted from Handling Description prepared by Matsushita Battery Inc.)
・ 廃棄や保存はテープなどで巻きつけて絶縁のこと。
• Do not recharge, short, disassemble, heat or
throw into fire.
・ 電池は幼児の手の届かない所に置くこと。万一飲み
込んだ場合は、医師にご相談ください。
• Do not mix with any other metal or battery.

(+)
(−)
を正しく入れる。
• Insulate the battery by winding tape or the like
around it when disposing or keeping it.
• Keep off the battery from the reach of children.
Should it be swallowed, consult a doctor.
• Be sure to set the positive (+) and negative (-)
terminals of the battery in the proper direction.
ボタン電池
Button Type Battery
こちらの面が
(+)
になるようにセットする
Set the battery so that its face with a
positive (+) mark facing up.
6■パーツリスト/PARTS LIST
●総組立/Overall Assembly
7●総組立/Overall Assembly
No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
Part No.
AG01,AG02,AG03,AG04,AG05,AG06,AG07,AG08,AG09,AG10,AG11,AG12,AG13-01,AG14,AG15,AG16,AG17
部品名
ランプベース
アンダーカバー
ランプカバー
遮光カバー
フィルターカバー
フィルターユニット
インターロックスイッチカバー
インターロックスイッチ
ランプ電源
ファン
ノイズフィルター
DC12V電源
コントロール基板(電池式)
パネル基板
電源スイッチ
スタータ
カラー足
Part Name
Lamp Base
Bottom Cover
Lamp Cover
Lamp Guard
Filter Cover
Filter Unit
Interlock Switch Cover
Interlock Switch
Lamp Power Unit
Fan
Noise Filter
DC12V Power Unit
Control Board (Battery Type)
Panel Board
Power Switch
Starter
Foot
付記/Remarks
ばね2ヶ含む/Includes 2 Springs
●ネジ類/Screws and Washers
No. Part No.
A, B, C BG01
D BG02
E, K BG03
F BG04
G BG05
H, M, Q BG06
J BG07
L, N BG08
P BG09
R BG10
S BG11
部品名
Part Name
バインドネジ
ダブルセムスネジ
ダブルセムスネジ
ダブルセムスネジ
バインドネジ
ダブルセムスネジ
ナット+平ワッシャーx2枚+スプリングワッシャー
皿ネジ
ダブルセムスネジ
バインドネジ+皿ナット
ダブルセムスネジ
Bind Head Screw
Double Sems Screw
Double Sems Screw
Double Sems Screw
Bind Screw
Double Sems Screw
Nut + Flat Washer x 2 + Spring Washer
Flat Head Screw
Double Sems Screw
Bind Head Screw + Nut
Double Sems Screw
8
付記/Remarks
M4x6
M4x15
M4x10
M3x8
M3x10
M3x6
M4
M2.6×5
M4x6
M4x12
M3x15【参考】
■ フィルターユニッ
ト全分解図/Filter Unit Overall Assembly
16
■ フィルターユニットパーツリスト/Filter Unit Parts List
No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
Part No.
AG601
AG602
AG603
AG604
AG605
AG606
AG607
AG608
AG609
AG610
AG611
AG612
AG613
AG614
AG615
AG616
部品名
フィルター円盤
絞り円盤
フィルター軸
絞り軸
モーター取付板
フィルター用モーター
絞り用モーター
上カバー
ユニットベース
センサ基板
シャッター板
シャッター台座
ソレノイド
モーターカバー
シャッターユニット
遮光円盤
(Part No.: AG06)
Part Name
Filter Disk
Diaphragm Disk
Filter Shaft
Diaphragm Shaft
Motor Plate
Filter Motor for Filter
Diaphragm Motor
Top Cover
Unit Base
Sensor Board
Shutter Plate
Shutter Mount Plate
Solenoid
Motor Cover
Shutter Unit
Mount Plate Cover
付記/Remarks
AG611 + AG612 + AG613
■ネジ類/Screws and Washers
No. Part No.
a, f, g, j BG06
b BG13
d, h BG14
e BG02
k BG12
m BG15
n BG16
部品名
Part Name
ダブルセムスネジ
六角穴付ネジ(イモネジ)
ダブルセムスネジ
ダブルセムスネジ
ナット
六角穴付ネジ+スプリングワッシャー+平ワッシャー
六角スペーサー
(M3ダブルセムスネジ+M3ネジ穴付)
9
Double Sems Screw
Hexagonal Nut
Double Sems Screw
Double Sems Screw
Nut
Hexagonal Nut+Spring Washer + Flat Washer
Hexagonal Spacer
(M3 Double Sems Screw + M3 Screw Hall)
付記/Remarks
M3x6
M3x4
M3x10
M4x15
M3
M2.6×16
L=10mm●ハーネス類/Connecting Cables
● Part No.:CG01
● Part No.:CG02
● Part No.:CG03
4P
スタータ (+HV) 側へ
To Starter (+HV)
コントロール基板へ
To Control Board
ランプ陽極へ
To Lamp Anode
ランプ陰極へ
To Lamp Cathode
スタータ (COM) 側へ
To Starter (COM)
● Part No.:CG05
● Part No.:CG04
DC12V電源へ
To DC12V Power Unit
2P
● Part No.:CG06
ノイズフィルターへ
To Noise Filter
16P
コントロール基板へ
To Control Board
40P
コントロール基板へ
To Control Board
白:White
電源スイッチへ
To Power Switch
フィルターユニット
(センサ基板)へ
パネル基板へ
To Panel Board
40P
● Part No.:CG07
ランプ電源へ
To Lamp Power Unit
● Part No.:CG08
● Part No.:CG09
スタータへ
To Starter
2P
赤:Red
2P
2P
4P
COM
ランプ電源へ
To Lamp Power Unit
P
青:Blue
+
6P
黒:Black
To Filter Unit
(Sensor Board)
16P

コントロール基板へ
To Control Board
電圧変換スイッチ
Voltage Switch
ランプ電源へ
To Lamp Power Unit
黒:Black
● Part No.:CG10
黒:Black
ランプ電源へ
To Lamp Power Unit
4P
DC12V電源へ
To DC12V Power Unit
ランプ電源へ
To Lamp Power Unit
電源スイッチへ
To Power Switch
白:White
電子管営業部 □ 〒438-0193 静岡県磐田郡豊岡村下神増 314-5
(0539)
62-5245 FAX
(0539)
62-2205
3436-0491 FAX
(03)
3433-6997
東 京 支 店 □ 〒105-0001 東京都港区虎ノ門 3-8-21
(虎ノ門33森ビル) (03)
大 阪 営 業 所 □ 〒541-0052 大阪市中央区安土町 2-3-13
(大阪国際ビル) (06)
6271-0441 FAX
(06)
6271-0450
仙 台 営 業 所 □ 〒980-0011 仙台市青葉区上杉 1-6-11
(日本生命仙台匂当台ビル) (022)
267-0121 FAX
(022)
267-0135
@ W2-0002-3
SEP. 2004. P
10