Before and after repair we process wafers with a variety of recipies like this one. This is a reference point for a working tool used for communicing symptoms and troubleshooting problems.

This process is used to test electronic control boards in L3510 etcher/asher.

PCB’s that apply but not limited to are:

15451-010, PCB-EOP/Pressure Control IPC SPA

Branson/IPC,

16495-01-REV.7.4 , I/O interface ,16495-01E

16498-01, Display Driver,

16495-01B, 16495-01

90-2590, 89-2572,