KLA-Tencor 8100, 8250, 8300, 8450 series Critical Dimensions – Scanning Electron Microscope (CD-SEM): imaging malfunctions result of failed Column Control Chassis II (CCC2) part number 720-06884-002

KLA-Tencor Critical Dimensions Scanning Electron Microscope (CD-SEM) models 8100, 8250, 8300, 8450 can suffer from imaging malfunctions as the result of a failed Column Control Chassis II (CCC2) unit – part number 720-06884-002.  The observed failure mechanism is usually a ripple distortion effect along one or more view axes (see below images for clear examples). GetSpares maintains fully operational KLA SEMs in their warehouse, as well as the ability to repair these critical electronics.  This means parts sent in for repair get fully tested in a functional tool before being sent out – so you can be assured of top quality service.  Contact GetSpares today for replacement/repair solutions!

Front view of KLA 8100 SEM

Front view of KLA 8100 SEM

Side view of KLA 8100 SEM

Side view of KLA 8100 SEM

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

KLA 8100 SEM imaging: malfunctioning CCCP2 720-06884-002

KLA 8100 SEM imaging
Top – electron gun image of wafer site with funcitonal CCC2.
Bottom Left/Right – same site shown when CCC2 malfunctions and causes ripple distortion in image.

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

KLA-Tencor 277266 Timing Generator for Surfscan Systems S6100, S6120, S6220, S6420

The electronic circuit board 277266 Timing Generator goes into KLA-Tencor Surfscan systems S6100, S6120, S6220, and S6420.  The board is integral to the tool, which provides high precision defect inspection for silicon wafers.  GetSpares.com maintains fully functional Surfscan systems on their warehouse floor – that means good parts for sale, or good test environments for repaired parts.  If your tool is down, contact GetSpares.com today for replacement/repair solutions.

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6120

KLA-Tencor Surfscan S6120

 

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Bottom view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

KLA-Tencor Prometrix ME Box 52-0616, DVM for RS75 Resistivity Mapping Systems

The “ME Box” (part number 52-0616) is a high precision voltmeter used in the KLA-Tencor Prometrix RS75 series Resistivity Mapping Systems, which probe wafers for production defects.

The communication circuit in the ME Box is known to fail, causing false voltage/resistance/current readings by the RS75, or no readings at all.

GetSpares.com has the ME Box in stock in a functional RS75 tool – a guarantee that the ME Box will be operational.  Head to GetSpares and get yours today!

 

Side View: MEBox 52-0616

Side View: MEBox 52-0616

Top View: MEBox 52-0616

Top View: MEBox 52-0616

Bottom View: MEBox 52-0616

Bottom View: MEBox 52-0616