Tag Archives: KLA

KLA-Tencor 277266 Timing Generator for Surfscan Systems S6100, S6120, S6220, S6420

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The electronic circuit board 277266 Timing Generator goes into KLA-Tencor Surfscan systems S6100, S6120, S6220, and S6420.  The board is integral to the tool, which provides high precision defect inspection for silicon wafers.  GetSpares.com maintains fully functional Surfscan systems on their warehouse floor – that means good parts for sale, or good test environments for repaired parts.  If your tool is down, contact GetSpares.com today for replacement/repair solutions.

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6120

KLA-Tencor Surfscan S6120

 

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Bottom view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

KLA-Tencor Prometrix ME Box 52-0616, DVM for RS75 Resistivity Mapping Systems

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The “ME Box” (part number 52-0616) is a high precision voltmeter used in the KLA-Tencor Prometrix RS75 series Resistivity Mapping Systems, which probe wafers for production defects.

The communication circuit in the ME Box is known to fail, causing false voltage/resistance/current readings by the RS75, or no readings at all.

GetSpares.com has the ME Box in stock in a functional RS75 tool – a guarantee that the ME Box will be operational.  Head to GetSpares and get yours today!

 

Side View: MEBox 52-0616

Side View: MEBox 52-0616

Top View: MEBox 52-0616

Top View: MEBox 52-0616

Bottom View: MEBox 52-0616

Bottom View: MEBox 52-0616

Cyonics-Uniphase 2114B-30SLQST Laser Power Supply for KLA Surfscans 6220 and 6420

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If your KLA Surfscan’s laser is no longer working, it’s likely that the Cyonics-Uniphase 2114B-30SLQST power supply has failed.  GetSpares.com has these supplies in fully functional Surfscan models 6100, SFS 6200, SFS 6220, SFS 6400 and SFS 6420.  The tools are fully functional so you know the supply is too.  Head to GetSpares.com to get your parts today!

2114B-30SLQST Cyonics-Uniphase Laser Power Supply - front view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – front view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply - rear view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – rear view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply - in-tool view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – in-tool view