Another Sample of Failed Semiconductor Fab Electonics and Happy Endings


GetSparesCESP-002
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
05/02/2019Repaired/shipped
GetSparesTESP-002A2
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
05/02/2019Custom solution/shipped
GetSparesPCS4900/DELL
Therma-Wave
Single board computer
Opti-probe 2600-2690 3260-3290
Thermawave/KLA
Inspection
05/02/2019Repaired/shipped
GetSparesCESB-1011
DNS
Spin control board. Station Controller DNS
80A
DNS
Photolithograpy
04/17/2019Repaired/shipped
GetSpares90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/12/2019Repaired/shipped
GetSpares90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/12/2019Custom solution/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/11/2019Repaired/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/11/2019Custom solution/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/01/2019Repaired/shipped
GetSparesCESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
03/28/2019Repaired/shipped
GetSparesCESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
03/28/2019Custom solution/shipped
GetSpares36-0201 54-0219
Prometrix
H2 Interface PCB for UV1050/UV1250
UV1050
Tencor/KLA
Inspection
12/14/2018Repaired/shipped
GetSpares36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSpares36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Custom solution/shipped
GetSpares36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSpares36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSparesVLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
10/05/2018Repaired/shipped
GetSparesEST0220C05WNXE1
SMC
Smart Terminal
INR-497-001B
SMC
Water Chiller
09/10/2018Repaired/shipped
GetSparesPS500 2-39-55593
DNS
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018Repaired/shipped
GetSparesEEBH-0011X1
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/28/2018Repaired/shipped
GetSpares780-14091-000
KLA
CD Sem Column Aligner
8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM
06/05/2018Custom solution/shipped
GetSparesVLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018Custom solution/shipped
GetSpares36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/04/2016Repaired/shipped

More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/06/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
07/13/2018 Repaired/shipped
GetSpares 36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/01/2018 Custom solution/shipped
GetSpares 36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/01/2018 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/01/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/19/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
07/13/2018 Repaired/shipped
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
07/02/2018 Repaired/shipped
GetSpares BU504XII 2-XZ-10840
OMRON
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018 Repaired/shipped
GetSpares PS500 2-39-55593
DNS
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/21/2018 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
07/11/2018 Repaired/shipped
GetSpares EEBH-0011X1
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/28/2018 Repaired/shipped
GetSpares EEBH-0011
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/19/2018 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/06/2017 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares EEYC-001
DNS
Cage for all the slave cards in front of track
80B
DNS
Photolithograpy
07/02/2018 Custom solution/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/02/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/21/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
06/19/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0325
Prometrix
controller that slides in from right horizontally.
RS75
Prometrix/KLA
Wafer Resistivity
05/04/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
06/06/2018 Repaired/shipped
GetSpares 95-3155
Gasonics
Cluster Misc Controller With AC power detect J6
PEP3510
Novellus/Gasonics
RIE/Plasma
07/28/2016 Repaired/shipped
GetSpares 567-5101 HV Supply
Hitachi
Hv supply for electron gun
Unknown CD SEM
Hitachi
SEM
05/22/2018 For Sale/ Stock
GetSpares LSMUT_TF
Comvolt
Just an HV timer.
SMBUS_ASMU1
Comvolt
lab tester
05/15/2018 Custom solution/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
06/01/2018 Repaired/shipped
GetSpares 001-4130-03
Brooks
Brooks ACE VCE Controller
LAM and others
Brooks
Robots
05/23/2018 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018 For Sale/ Stock
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/21/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
05/15/2018 Repaired/shipped
GetSpares 810-025368-001
Lam Research
Simple relay board. located in top left of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/21/2015 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/27/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
03/27/2018 Repaired/shipped
GetSpares CESB-2012
DNS
Spin Board
80A
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/14/2018 Repaired/shipped
GetSpares EEJA-001A
DNS
6-axis controller based on the note on this unit.
80B
DNS
Photolithograpy
04/06/2018 Repaired/shipped
GetSpares EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/25/2017 For Sale/ Stock
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
SK200
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
SK200
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares 95-0541Misc Controller
Gasonics

PEP3510
Novellus/Gasonics
RIE/Plasma
10/27/2016 Repaired/shipped
GetSpares 1-139-023
IDI
Communications Card
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-139-022
IDI
Pump Controller
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Custom solution/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
04/10/2018 Repaired/shipped
GetSpares 375039
Tencor
Data Processing Board
AIT2
KLA
Inspection
04/05/2018 Custom solution/shipped
GetSpares 810-025369-001
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/03/2018 Repaired/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds
Lam-TCU_2080
Lam
Chiller
04/03/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
04/03/2018 Repaired/shipped
GetSpares Super Vexta UDX5107
Vexta
5 axis driver
80A
DNS
Photolithograpy
03/29/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
03/22/2018 Repaired/shipped
GetSpares 3510N45E10
Tamagawa
Tamagawa Motor AC servo
80B
DNS
Photolithograpy
03/19/2018 Repaired/shipped
GetSpares 373583
Tencor
ANALOG BOARD
AIT2
KLA
Inspection
06/22/2016 Repaired/shipped
GetSpares SQV175-1433-2
Prometrix
Power Supply
6220
KLA
Inspection
02/28/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
01/29/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
01/29/2018 Repaired/shipped
GetSpares 0100-02016 0100-20066
AMAT
Analog Sync Detect AMAT
P5000
Applied Materials AMAT
RIE/Plasma
01/04/2018 For Sale/ Stock
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
02/15/2018 Repaired/shipped

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

More successful solutions from GetSpares

 

GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
11/08/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
11/06/2017 Repaired/shipped

DNS_Hamamatsu_L6001-01

GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
10/23/2017 Repaired/shipped
GetSpares T0351/10-1006
Tectrol
Power Supply
6200
KLA
Inspection
07/19/2017 For Sale/ Stock
GetSpares GLC352-CEF
Emerson
Power Supply
Not Specified
Not Specified
Not Specified
10/30/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
10/06/2017 Repaired/shipped
GetSpares EESA-001 AU3575N233 2-39-48133
DNS
servo amp
80B
DNS
Photolithograpy
10/25/2017 Repaired/shipped
GetSpares AU6351N60 2-39-57597
DNS
servo amp
80B Scrubber
DNS
Photolithograpy
10/22/2017 For Sale/ Stock
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/23/2017 Repaired/shipped
GetSpares EEUE-001
DNS
EEW Control Unit
80A
DNS
Photolithograpy
10/03/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
09/20/2017 For Sale/ Stock
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
10/12/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
10/06/2017 Repaired/shipped
GetSpares INR-497-P2393 A19393-01
SMC
2 channel controller board
INR-497-001B
SMC
Water Chiller
10/11/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
11/10/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
10/07/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
10/05/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
09/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/11/2016 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
09/26/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
09/22/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/06/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/21/2015 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
09/08/2017 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
09/18/2014 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4
80B
DNS
Photolithograpy
08/09/2017 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4
80B
DNS
Photolithograpy
08/09/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
07/21/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/31/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/22/2016 Repaired/shipped
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
07/17/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
07/17/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
01/19/2015 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
07/06/2017 Repaired/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
07/06/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/11/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/11/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
06/27/2017 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
06/23/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/23/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/23/2017 Repaired/shipped
GetSpares CESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
02/03/2017 Custom solution/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
04/02/2017 Repaired/shipped
GetSpares CESB-2011 2-VC-19075
DNS
Spin control board. Station Controller
60A
DNS
Photolithograpy
06/06/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/12/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
06/22/2016 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
06/12/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
06/12/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
06/06/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
06/06/2017 For Sale/ Stock
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
04/28/2017 Repaired/shipped
GetSpares 54-0311
Prometrix
UV1250/ 1050 optical array PDA
UV1050
Tencor/KLA
Inspection
01/03/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
06/06/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
05/30/2017 Repaired/shipped
GetSpares CESP-001A F-VC-40833
DNS
maintenance panel without SCN5
80B
DNS
Photolithograpy
04/11/2017 For Sale/ Stock
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
05/24/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 54-0317 36-0317
KLA
PCB Measurement Control Board 54-0317 36-0317
UV1250-UV1280
Tencor/KLA
Inspection
03/29/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
05/04/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/15/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/15/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/08/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
05/09/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/19/2017 Repaired/shipped
GetSpares 710-693221-000
KLA
Matrox Corona Rev 6 8M Confg AIT2, Slot
8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM
04/17/2017 Repaired/shipped
GetSpares 356166 Matrox Corona
KLA
U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18
AIT2
KLA
Inspection
04/17/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
04/24/2017 Repaired/shipped
GetSpares CEMP-0016 EEMP-0021X3
DNS
Main Display Panel
80A
DNS
Photolithograpy
04/18/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
04/19/2017 Custom solution/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
04/03/2017 Repaired/shipped
GetSpares 55079-763288
Prometrix
PCA-DUAL Stepper Driver
RS55
Prometrix/KLA
Wafer Resistivity
03/29/2017 Repaired/shipped
GetSpares 36-0201
Prometrix
H2 Interface PCB for UV1050/UV1250
UV1050
Tencor/KLA
Inspection
03/29/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
03/29/2017 Repaired/shipped
GetSpares 2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
04/03/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
03/13/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
04/04/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
04/02/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
03/10/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
03/13/2017 Custom solution/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
03/07/2017 Repaired/shipped
GetSpares CERB-1016 2-VC-15254-1
DNS
Transport Station Controller
60A
DNS
Photolithograpy
02/04/2017 Repaired/shipped
GetSpares 2114B-30SLQST
Cyonics
CYONICS-UNIPHASE
6220
KLA
Inspection
01/09/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
02/04/2017 Repaired/shipped

GaSonics L3510 EOP Pressure Controller 903-1598

PCB 903-1598 controlls the gas pressure valves for GaSonics L3510 chamber during the End Of Process (EOP).  This board is known to fail, causing deficient to zero throttle valve control during EOP.  If you’re experiencing these or similar symptoms, contact GetSpares.com for replacement/repair solutions.  GetSpares maintains fully operational L3510 tools, which means fully operational test environments for all relevant parts.  Rest assured that the part you receive from GetSpares will be fully functional.

GaSonics L3510 EOP Pressure Controller 903-1598 PCB

GaSonics L3510 EOP Pressure Controller 903-1598 PCB

IO Boards 90-2590 and 16495 for GaSonics L3510 Plasma Ashing System

GetSpares.com has good parts for sale in a fully operational GaSonics L3510 Plasma Ashing System.

These are the part numbers for the Electronic IO Modules:

90-2590

16495

Head to GetSpares.com to order the parts you need.

IO Board 90-2590 for GaSonics L3510

IO Board 90-2590 for GaSonics L3510

GaSonics L3510

GaSonics L3510