Origin Return for Dainippon Screen DNS 80B Coat Develop Track

Posted on May 24, 2019 by Currentflow

Take a look at these videos of robots, computers and other track pieces in action..

A way to communicate failure symptom for DNS track is to run the Origin Return / Lot Clear operation after a boot up. We collect videos of this process for different pieces during the origin return. Take a look and if you have any interesting DNS behavior that could help other technicians isolate track failures please email us at info@comvolt.com and we will post it for everybody to see.

Look at this spin cup during an origin return..Mostly just the nozzle arms move.

How about origin return of the transport robot?

Depending on where the origin return fails, it can point you which controller is failing. Typical error codes are:

1-03-0247, 1-03-0201, 1-03-0107, 1-01-0112, 1-02-0120, 1-03-1010, 1-03-0210, 1-03-0252, 1-03-0253, 1-01-0221 , 1-03-0242, 1-03-0254, 1-01-0310, 1-03-0258, 1-03-0255, 1-02-0470, 1-00-0023, 1-03-2001, 1-03-2101, 1-05-0015, 1-01-0210, 1-02-410, 01-02-0121, 1-03-0254, 1-03-0220, 1-01-0210, 1-06-0206, 1-00-0025, 1-03-0251

2-39-45431, 2-39-51930 2-39-61074 UT3-F1AE, 2-39-51930 2-39-61074 UT3-F1AE /DSS1-A, 2-39-51930 2-39-61074 UT3-X3AE / DSS4-A, 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07, 2-VC-16217-1EEBH-0021, 2-VC-19090 EERC-0012, 2-VC-19090 EERC-0013, 80A, 80B, 80B Scrubber AU6351N60 2-39-57597, CEDB-1013 2-VC-15252, CEMP-0016 EEMP-0021X3, CERB-1016 2-VC-15254-1, CESA-804, CESB-2011 2-VC-19075, CESB-2012, CESP-0002 2-VC-42102, CESP-0017, CESP-001A F-VC-40833, CESP-002, CEYD-0015 2-VC-13743, 2-VC-28124 GEIA-001, EEBH-0011, EEDC-0011 2-VC-19089, EEJA-001A, EESA-001 AU3575N223, EESA-001 AU3575N233 2-39-48133 , EESA-001A1 AU6356N20 EESA-001 2-39-53462, EESC-0012 2-VC-19115 Spin Slave, EEUC-0013, EEUD-0013, EEUE-001, EEUE-001B, EEUE-001X1, EEW, EEYC-0011 2-VC-20626, GEIC-002 BP-0015C, GEPH-001X3, GESA-001 AU6354N40 2-VC-27621Hamamatsu,IDI, IDI/Cybor, INR-244-216, INR-244-402 2-39-45751, INR-497-001B, INR-497-P2393 Motherboard, Motor, Motor Controller, OMRON, Photolithograpy, PiBoc, Power Supply, Robot Controller, Robots Servo Amp, Servo Driver, Slave Board, Slave Board , Stage Driver, Super Vexta UDX5107, ESP-002A2, Touchscreen VGA, Vexta,

Another Sample of Failed Semiconductor Fab Electonics and Happy Endings

Posted on May 16, 2019 by Currentflow

GetSpares	CESP-002 DNS maintenance panel with SCN5	80B DNS Photolithograpy	05/02/2019	Repaired/shipped
GetSpares	TESP-002A2 DNS maintenance panel with SCN5	80B DNS Photolithograpy	05/02/2019	Custom solution/shipped
GetSpares	PCS4900/DELL Therma-Wave Single board computer	Opti-probe 2600-2690 3260-3290 Thermawave/KLA Inspection	05/02/2019	Repaired/shipped
GetSpares	CESB-1011 DNS Spin control board. Station Controller DNS	80A DNS Photolithograpy	04/17/2019	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/12/2019	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/12/2019	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/11/2019	Repaired/shipped

GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/11/2019	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	04/01/2019	Repaired/shipped
GetSpares	CESP-0002 2-VC-42102 DNS maintenance panel with SCN5	80B DNS Photolithograpy	03/28/2019	Repaired/shipped
GetSpares	CESP-0002 2-VC-42102 DNS maintenance panel with SCN5	80B DNS Photolithograpy	03/28/2019	Custom solution/shipped
GetSpares	36-0201 54-0219 Prometrix H2 Interface PCB for UV1050/UV1250	UV1050 Tencor/KLA Inspection	12/14/2018	Repaired/shipped
GetSpares	36-0294 Prometrix Turret Servo Driver 54-0294	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Custom solution/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	36-0294 Prometrix Turret Servo Driver 54-0294	UV1250-UV1280 Tencor/KLA Inspection	12/12/2018	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	10/05/2018	Repaired/shipped
GetSpares	EST0220C05WNXE1 SMC Smart Terminal	INR-497-001B SMC Water Chiller	09/10/2018	Repaired/shipped
GetSpares	PS500 2-39-55593 DNS Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	EEBH-0011X1 DNS heater control bake unit	80B DNS Photolithograpy	06/28/2018	Repaired/shipped
GetSpares	780-14091-000 KLA CD Sem Column Aligner	8100 8100XP 8100XPR 8250 8300 8450 KLA SEM	06/05/2018	Custom solution/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	Custom solution/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	02/04/2016	Repaired/shipped

More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

Posted on August 8, 2018 by Currentflow

GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/06/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	07/13/2018	Repaired/shipped
GetSpares	36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	08/01/2018	Custom solution/shipped
GetSpares	36-0287 54-0287 RevAG Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	08/01/2018	For Sale/ Stock
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/01/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/24/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/24/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/19/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	07/13/2018	Repaired/shipped
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	07/02/2018	Repaired/shipped
GetSpares	BU504XII 2-XZ-10840 OMRON Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	PS500 2-39-55593 DNS Battery backed power supply	80B DNS Photolithograpy	07/15/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/21/2018	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	07/11/2018	Repaired/shipped
GetSpares	EEBH-0011X1 DNS heater control bake unit	80B DNS Photolithograpy	06/28/2018	Repaired/shipped
GetSpares	EEBH-0011 DNS heater control bake unit	80B DNS Photolithograpy	06/19/2018	Repaired/shipped
GetSpares	2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit	80B DNS Photolithograpy	09/06/2017	Repaired/shipped
GetSpares	36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB	RS35 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	07/04/2018	Repaired/shipped
GetSpares	EEYC-001 DNS Cage for all the slave cards in front of track	80B DNS Photolithograpy	07/02/2018	Custom solution/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	07/02/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/13/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/13/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/04/2018	Repaired/shipped
GetSpares	90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC	L3510 Novellus/Gasonics RIE/Plasma	06/21/2018	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	06/19/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C	RS55 Prometrix/KLA Wafer Resistivity	06/04/2018	Repaired/shipped
GetSpares	36-0325 Prometrix controller that slides in from right horizontally.	RS75 Prometrix/KLA Wafer Resistivity	05/04/2018	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	06/06/2018	Repaired/shipped
GetSpares	95-3155 Gasonics Cluster Misc Controller With AC power detect J6	PEP3510 Novellus/Gasonics RIE/Plasma	07/28/2016	Repaired/shipped
GetSpares	567-5101 HV Supply Hitachi Hv supply for electron gun	Unknown CD SEM Hitachi SEM	05/22/2018	For Sale/ Stock
GetSpares	LSMUT_TF Comvolt Just an HV timer.	SMBUS_ASMU1 Comvolt lab tester	05/15/2018	Custom solution/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	06/01/2018	Repaired/shipped
GetSpares	001-4130-03 Brooks Brooks ACE VCE Controller	LAM and others Brooks Robots	05/23/2018	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	For Sale/ Stock
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/23/2018	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	VLT 2800 DanFoss drive water pump in chillers	ASML chiller Neslab Chiller	05/21/2018	For Sale/ Stock
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	05/15/2018	Repaired/shipped
GetSpares	810-025368-001 Lam Research Simple relay board. located in top left of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	10/21/2015	For Sale/ Stock
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/27/2018	For Sale/ Stock
GetSpares	D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver	SK200 DNS Photolithograpy	03/27/2018	Repaired/shipped
GetSpares	CESB-2012 DNS Spin Board	80A DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	04/14/2018	Repaired/shipped
GetSpares	EEJA-001A DNS 6-axis controller based on the note on this unit.	80B DNS Photolithograpy	04/06/2018	Repaired/shipped
GetSpares	EESA-001 AU3575N223 DNS servo amp	80B DNS Photolithograpy	10/25/2017	For Sale/ Stock
GetSpares	D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001	SK200 DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001	SK200 DNS Photolithograpy	04/14/2018	Repaired/shipped
GetSpares	95-0541Misc Controller Gasonics	PEP3510 Novellus/Gasonics RIE/Plasma	10/27/2016	Repaired/shipped
GetSpares	1-139-023 IDI Communications Card	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-139-022 IDI Pump Controller	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Repaired/shipped
GetSpares	1-130-020 IDI mother board	M300 IDI/Cybor Pump	02/18/2014	Custom solution/shipped
GetSpares	810-025370—1 Lam Research Large rectangular board that controls and displays status leds	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	810-025369-002 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	810-025369-002 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/10/2018	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	04/10/2018	Repaired/shipped
GetSpares	375039 Tencor Data Processing Board	AIT2 KLA Inspection	04/05/2018	Custom solution/shipped
GetSpares	810-025369-001 Lam Research Resistivity Board. located in top center of the chiller	Lam-TCU_2080 Lam Chiller	04/03/2018	Repaired/shipped
GetSpares	810-025370—1 Lam Research Large rectangular board that controls and displays status leds	Lam-TCU_2080 Lam Chiller	04/03/2018	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	04/03/2018	Repaired/shipped
GetSpares	Super Vexta UDX5107 Vexta 5 axis driver	80A DNS Photolithograpy	03/29/2018	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	03/22/2018	Repaired/shipped
GetSpares	3510N45E10 Tamagawa Tamagawa Motor AC servo	80B DNS Photolithograpy	03/19/2018	Repaired/shipped
GetSpares	373583 Tencor ANALOG BOARD	AIT2 KLA Inspection	06/22/2016	Repaired/shipped
GetSpares	SQV175-1433-2 Prometrix Power Supply	6220 KLA Inspection	02/28/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	01/29/2018	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	01/29/2018	Repaired/shipped
GetSpares	0100-02016 0100-20066 AMAT Analog Sync Detect AMAT	P5000 Applied Materials AMAT RIE/Plasma	01/04/2018	For Sale/ Stock
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	02/20/2018	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	02/15/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	02/15/2018	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	02/15/2018	Repaired/shipped

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

Posted on November 13, 2017 by Currentflow

More successful solutions from GetSpares

GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	11/08/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	11/06/2017	Repaired/shipped	DNS_Hamamatsu_L6001-01
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	10/23/2017	Repaired/shipped
GetSpares	T0351/10-1006 Tectrol Power Supply	6200 KLA Inspection	07/19/2017	For Sale/ Stock
GetSpares	GLC352-CEF Emerson Power Supply	Not Specified Not Specified Not Specified	10/30/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	10/06/2017	Repaired/shipped
GetSpares	EESA-001 AU3575N233 2-39-48133 DNS servo amp	80B DNS Photolithograpy	10/25/2017	Repaired/shipped
GetSpares	AU6351N60 2-39-57597 DNS servo amp	80B Scrubber DNS Photolithograpy	10/22/2017	For Sale/ Stock
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	10/23/2017	Repaired/shipped
GetSpares	EEUE-001 DNS EEW Control Unit	80A DNS Photolithograpy	10/03/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	09/20/2017	For Sale/ Stock
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	10/12/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	10/06/2017	Repaired/shipped
GetSpares	INR-497-P2393 A19393-01 SMC 2 channel controller board	INR-497-001B SMC Water Chiller	10/11/2017	Custom solution/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	11/10/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	10/07/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	10/05/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	10/04/2017	Repaired/shipped
GetSpares	15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	09/22/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/11/2016	Repaired/shipped
GetSpares	CESA-804 DNS Driver Motor Box Servo PK	80A DNS Photolithograpy	09/26/2017	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	09/22/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit	80B DNS Photolithograpy	09/06/2017	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	10/21/2015	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	09/08/2017	For Sale/ Stock
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/21/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	08/24/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	09/18/2014	Repaired/shipped
GetSpares	2-39-45431 DNS FRD-4	80B DNS Photolithograpy	08/09/2017	Repaired/shipped
GetSpares	2-39-45431 DNS FRD-4	80B DNS Photolithograpy	08/09/2017	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	07/21/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/31/2017	Custom solution/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/22/2016	Repaired/shipped
GetSpares	2-VC-16217-1EEBH-0021 DNS heater control bake unit	80B DNS Photolithograpy	07/17/2017	Repaired/shipped
GetSpares	CMX15 90X0054 KLA LCD Monitor	AIT2 KLA Inspection	07/17/2017	Repaired/shipped
GetSpares	52-0616 Prometrix ME Box	RS75 Prometrix/KLA Wafer Resistivity	01/19/2015	Repaired/shipped
GetSpares	CMX15 90X0054 KLA LCD Monitor	AIT2 KLA Inspection	07/06/2017	Repaired/shipped
GetSpares	903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	07/06/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/11/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	07/11/2017	Repaired/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	06/27/2017	Repaired/shipped
GetSpares	EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp	80B DNS Photolithograpy	06/23/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/23/2017	Custom solution/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/23/2017	Repaired/shipped
GetSpares	CESP-0002 2-VC-42102 DNS maintenance panel with SCN5	80B DNS Photolithograpy	02/03/2017	Custom solution/shipped
GetSpares	L6001-01 Hamamatsu L6001-01 Lamp House for EEW	80B DNS Photolithograpy	04/02/2017	Repaired/shipped
GetSpares	CESB-2011 2-VC-19075 DNS Spin control board. Station Controller	60A DNS Photolithograpy	06/06/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	06/12/2017	Repaired/shipped
GetSpares	CMX15 90X0054 KLA LCD Monitor	AIT2 KLA Inspection	06/22/2016	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	06/12/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	06/12/2017	Repaired/shipped
GetSpares	90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface	L3510 Novellus/Gasonics RIE/Plasma	06/06/2017	Repaired/shipped
GetSpares	54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB	RS35 Prometrix/KLA Wafer Resistivity	06/06/2017	For Sale/ Stock
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	04/28/2017	Repaired/shipped
GetSpares	54-0311 Prometrix UV1250/ 1050 optical array PDA	UV1050 Tencor/KLA Inspection	01/03/2017	Repaired/shipped
GetSpares	15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	06/06/2017	Repaired/shipped


GetSpares	15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	05/30/2017	Repaired/shipped
GetSpares	CESP-001A F-VC-40833 DNS maintenance panel without SCN5	80B DNS Photolithograpy	04/11/2017	For Sale/ Stock
GetSpares	2-VC-16217-1EEBH-0021 DNS heater control bake unit	80B DNS Photolithograpy	05/24/2017	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	54-0317 36-0317 KLA PCB Measurement Control Board 54-0317 36-0317	UV1250-UV1280 Tencor/KLA Inspection	03/29/2017	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	05/04/2017	Repaired/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/15/2017	Custom solution/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/15/2017	Repaired/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	05/08/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	05/09/2017	Repaired/shipped
GetSpares	36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange	RS55 Prometrix/KLA Wafer Resistivity	02/22/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	04/19/2017	Repaired/shipped
GetSpares	710-693221-000 KLA Matrox Corona Rev 6 8M Confg AIT2, Slot	8100 8100XP 8100XPR 8250 8300 8450 KLA SEM	04/17/2017	Repaired/shipped
GetSpares	356166 Matrox Corona KLA U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18	AIT2 KLA Inspection	04/17/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	04/24/2017	Repaired/shipped
GetSpares	CEMP-0016 EEMP-0021X3 DNS Main Display Panel	80A DNS Photolithograpy	04/18/2017	Repaired/shipped
GetSpares	54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB	RS35 Prometrix/KLA Wafer Resistivity	04/19/2017	Custom solution/shipped
GetSpares	903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA	L3510 Novellus/Gasonics RIE/Plasma	04/03/2017	Repaired/shipped
GetSpares	55079-763288 Prometrix PCA-DUAL Stepper Driver	RS55 Prometrix/KLA Wafer Resistivity	03/29/2017	Repaired/shipped
GetSpares	36-0201 Prometrix H2 Interface PCB for UV1050/UV1250	UV1050 Tencor/KLA Inspection	03/29/2017	Custom solution/shipped
GetSpares	36-0287 Prometrix PCB Stage Driver F2 Rev. F	UV1250-UV1280 Tencor/KLA Inspection	03/29/2017	Repaired/shipped


GetSpares	2-VC-19090 EERC-0012 DNS Transport Slave Board Repair	80B DNS Photolithograpy	04/03/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	03/13/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	04/04/2017	Repaired/shipped
GetSpares	L6599-01 Hamamatsu L6599-01 Lamp House for EEW	SK200 DNS Photolithograpy	04/02/2017	Custom solution/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	03/10/2017	Repaired/shipped
GetSpares	INR-244-402 2-39-45751 DNS Thermo Controller INR	80B DNS Photolithograpy	03/13/2017	Custom solution/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	Undefined Undefined undefined	Not Specified Not Specified Not Specified	03/07/2017	Repaired/shipped
GetSpares	CERB-1016 2-VC-15254-1 DNS Transport Station Controller	60A DNS Photolithograpy	02/04/2017	Repaired/shipped
GetSpares	2114B-30SLQST Cyonics CYONICS-UNIPHASE	6220 KLA Inspection	01/09/2017	Repaired/shipped
GetSpares	2-39-51930 2-39-61074 UT3-F1AE DNS LCD	SK200 DNS Photolithograpy	02/24/2017	Repaired/shipped
GetSpares	CEDB-1013 2-VC-15252 DNS Indexer Board	80A DNS Photolithograpy	02/04/2017	Repaired/shipped

Prometrix/KLA RS35/RS55 swapping DVM, Current Source, Analog I/O and PCA Relay board

Posted on December 28, 2016 by Currentflow

Please follow this critical step when getting a board from GetSpares.com. Please make sure you disconnect the battery connection on the analog power supply. This applies to :

KLA/Prometrix RS35, RS55, RS75, Versaprobe VP10e 54-0005

These models have the following card part numbers:

36-0014 – PCB DVM CARD
54-0014 – PCB DVM CARD
54-0005 – Current Source PCB
54-0389 – Current Source PCB
36-0042 – Analog I/O Board
54-0252 – Analog I/O Board
54-0057 – Analog Power Supply
36-0004 – Current Source PCB
54-0006 – PCA Relay Board

Simply put, the battery connection should be disconnected during install to ensure that any voltage is not force on any pin which should not recieve power when unplugging the cards and the interconnect daughther cards. Really, as long as you have This picture illustrates the key components where care must be taken:

Cards for RS35,RS55 and RS75 measurement cards

Please follow this simple step to protect the sensitive voltage supply, current source, digital voltmeter, relay matrix boards from any accidental short while plugging in the interface cards.

Thanks for looking!

Comvolt

GEPH-001/GEPH-001X3 AC Box Power Supply for DNS SK200 Coater Track

Posted on April 19, 2016 by Currentflow

Power failures in DNS SK200 coater track have been traced back to failed electronics in the AC Power Supply Box – part number GEPH-001/GEPH-001X3.

GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

If you are experiencing general power failures (or even a “dead” track) in your DNS equipment, contact GetSpares.com today for the right solution!

GEPH_001X3 AC Power Supply Box DNS SK200

Power Supply in Main Computer FC-9821Ka for DNS 80A/80B (not FC-9821Ke)

Posted on June 18, 2015 by Currentflow

The DNS 80A and 80B tracks have varying main computers depending on the serial number and configuration of the track. This article discusses the power supply for a FC-9821Ka computer, which is not the same as the FC-9821Ke. Before following the diagnostic procedure below, ensure that the computer you are inspecting is the Ka.

Front view of DNS 80 FC9821Ka main computer

Rear view of DNS 80 FC9821Ka main computer

View of an FC-9821Ke installed in the DNS 80B (very similar appearance to FC-9821Ka)

The power supply is mounted on the inside of the back wall of the computer box. Molex cables drop down to the motherboard and attach to five connectors to power the majority of the computer (a separate cable goes to the hard drive). Below is a photograph of these connections viewed from the side. An illustrated representation of these connections has also been provided (drawn from the perspective of facing forward from the rear of the computer and looking top-down onto the motherboard).

Image of power supply connections to DNS 80A/B FC2981Ka motherboard

Top-down view illustrated representation of power supply connections to DNS 80A/B FC9821Ka motherboard

The black wires are all connected to GND. Relative to GND the DC levels on the other wires are as follows (assume pin 1 is the leftmost for each connector in above illustration):

DC1:

1) EMPTY

2) RED — +5V Vcc

3) ORANGE — +12V

4) BLUE — -12V (note this is a negative supply)

5) 6) BLACK — GND

DC2:

1) 2) BLACK — GND

3) EMPTY

4) 5) 6) RED — +5V Vcc

DC3:

1) 2) 3) GREEN — +5V Vdd

4) 5) 6) BLACK — GND

DC9:

1) WHITE — +2.015V

2) 3) RED — +5V Vcc

DC10:

1) 2) 3) WHITE — these are actually unused. Note that these wires lead to an interconnect which does not involve these conductors (in other words, they are floating).

4) BLACK — GND

5) 6) RED — +5.082V *NOT Vcc – these are an isolated 5V supply*

7) WHITE — +5.049V

If your DNS 80 track is completely inoperable/dead, you may have a bad computer. And it may be as simple as a dead supply. Or the computer may need to be replaced (i.e. bad motherboard). Check the DC voltages out of the supply. If you don’t get these numbers, the supply is the culprit. If you do get these numbers, the motherboard is likely bad. In either case, contact www.GetSpares.com to seek repair or replacement.

Cyonics-Uniphase 2114B-30SLQST Laser Power Supply for KLA Surfscans 6220 and 6420

Posted on April 3, 2015 by Currentflow

If your KLA Surfscan’s laser is no longer working, it’s likely that the Cyonics-Uniphase 2114B-30SLQST power supply has failed. GetSpares.com has these supplies in fully functional Surfscan models 6100, SFS 6200, SFS 6220, SFS 6400 and SFS 6420. The tools are fully functional so you know the supply is too. Head to GetSpares.com to get your parts today!

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – front view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – rear view

2114B-30SLQST Cyonics-Uniphase Laser Power Supply – in-tool view

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