These videos server as a baseline for Prometrix RS-75 tool operation and troubleshooting. These runs use the standard test resistance modules also seen on RS35, RS55 and VP10e tools. Some boards that customers have problems with are the 36-0325 and 52-0616 controller and ME box.
When communicating issues and problems with your tool timestamps of these videos can help us understand the issues you are having. Take a look or send us pictures or videos of your specific issue.
The “ME Box” (part number 52-0616) is a high precision voltmeter used in the KLA-Tencor Prometrix RS75 series Resistivity Mapping Systems, which probe wafers for production defects.
The communication circuit in the ME Box is known to fail, causing false voltage/resistance/current readings by the RS75, or no readings at all.
GetSpares.com has the ME Box in stock in a functional RS75 tool – a guarantee that the ME Box will be operational. Head to GetSpares and get yours today!
Side View: MEBox 52-0616
Top View: MEBox 52-0616
Bottom View: MEBox 52-0616