Common errors on the CESA-804. Model Dainippon Screnn (DNS 80A)
1-03-0258 – Servo Deviation Error
Servo Speed Deviation
1-03-0255
CESA_804_1-03-0255 Speed Deviation
– ‘3’ on LED display – Spin Servo Overvoltage
The Chemical Temperature Control unit (part number INR-244-402 aka 2-39-45751) for DNS 80B photolithography track is a known failure point. Symptoms include communication errors, error code “00”, and failure to meet temperature set point.
GetSpares.com has discovered the electronic repair solutions for restoring these units to operational status. Additionally, GetSpares.com maintains functional DNS tracks on the warehouse floor, providing a conclusive test environment for any DNS parts.
Contact GetSpares.com today for your repair or replacement needs!
Front View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B
Rear View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B
The 6-axis Motor Driver, part numbers GEIA-001 or 2-VC-28124, drives the handler robots EV1 and EV2 in the Interface-B (IF-B) unit of DNS SK200 coater track. Faulty handler operation in the IF-B has been traced back to failed electronics in the 6-axis Motor Driver.
GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.
If you are experiencing handler motor drive problems in your DNS equipment, contact GetSpares.com today for the right solution!
GEIA-001 (aka 2-VC-28124) 6-axis Motor Driver for DNS SK200
Power failures in DNS SK200 coater track have been traced back to failed electronics in the AC Power Supply Box – part number GEPH-001/GEPH-001X3.
GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.
If you are experiencing general power failures (or even a “dead” track) in your DNS equipment, contact GetSpares.com today for the right solution!
GEPH_001X3 AC Power Supply Box DNS SK200
If you are experiencing “Bake Temperature Error”, “Bake Temperature Incomplete” or other general failures with the bake units in a DNS 80A or 80B tracks, the Heater Controllers EEBH-6011 or EEBH-0011 have likely failed. Not to fear, GetSpares.com maintains DNS tracks and parts. These parts are available for sale when in stock, but can also be repaired if shipped to the GetSpares facility. If you see a error screens as pictured below, contact GetSpares today!
Code 01-XX-201: Bake Temperature Error, DNS80A
Code 01-XX-301: Bake Temperature Incomplete, DNS80A
Font view: EEBH-6011 Heater Controller, DNS80A
Top view: EEBH-6011 Heater Controller, DNS80A
Heater controller EEBH-0011 for DNS80B
Here is a cheat sheet we use to identify where and what each connection on the DNS80 spin boards are connected to. This specific unit has connections for SC2, SCN5, SCN3, SN4, SCN6, SCN8, SCN10, SCN12 and SCN13 on the EESC-0012 spin board.
| Connector | Board | Description | Where does it go ? |
| SCN2 | EESC-0012 Spin Board A | Board A Input 1-30, Output 1-8, 24V, 12V, GND | External Alarm IFC |
| SCN3 | EESC-0012 Spin Board A | Inputs 1-38. Outputs 1-7, but there are really 32 serparate outputs | Mech I/O to Spin mechanical section IFC Board |
| SCN4 | EESC-0012 Spin Board A | Inputs 1-8. 4 Inputs for M3 control. 4 outputs for M3. | SCN4A Cup Section |
| SCN5 | EESC-0012 Spin Board B | Inputs 1-32, Outputs 1-24, 24V, 12V, GND | Spin Chemical IFC |
| SCN6 | EESC-0012 Spin Board B | Only has one input and output | AC power supply interface |
| SCN8 | EESC-0012 Spin Board B | Inputs 1-12, Outputs 1-8 | Not Connected |
| SCN10 | EESC-0012 Spin Board C | TXA, RXA, RS232 | AC power supply interface |
| SCN11 | No Connector | ||
| SCN12 | EESC-0012 Spin Board C | BUS1+ , BUS1- | RS485 to Chemical Temperature Controller, AKA “Thermostatic Control Unit” |
| SCN13 | EESC-0012 Spin Board C | BUS2+ , BUS2- TXB2, RXB2 | Not Connected |
DNS part numbers EEMP-0021X3 and EEMP-0013 are LCD monitors that can be used in either the 60A, 60B, 80A, or 80B tracks, depending on the track configuration.
Monitor installed in DNS 80B
Monitor installed in DNS 80B, telescoped out
These can fail or malfunction if installed in a tool not configured for that exact part number. EEMP-0021X3 is a full color display, whereas EEMP-0013 is a monochrome display.
DNS EEMP-0013 Monochrome LCD monitor installed in 80B
DNS EEMP-0021X3 Color LCD monitor installed in 80B
A known symptom of color vs. monochrome incompatibility is loss of directional sync on the monitor. The screen image will continuously and uncontrollably “roll” like the images in a slot machine. Another failure symptom is no image at all, but this is less likely a compatibility issue as opposed to general circuit failure. In either case, GetSpares.com maintains a fully operational DNS 80B track and parts, as well as the capability to repair and test parts. If your DNS LCD monitor is failing, contact GetSpares for quality repair/replacement solutions.
List of schematics for DNS 80B tracks. Here is a list of schematics for control schematics.
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
ELECTRICAL CIRCUIT DIAGRAM LIST
HIGH PRESSURE GENERATION UNIT
JEHP-005
co2 BUBBLING CONTROLLER
SECO-1053
cog BUBBLING UNIT
SECV-104
MAINTENANCE PANEL [ SPIN UNIT 1
CESP-0015
STEPDOWN TRANSFORMER
9EDT-101A
STEPDOWN TRANSFORMER
9EDT-111A
STEPDOWN TRANSFORMER
9EDT-201A
STEPDOWN TRANSFORMER
9EDT-211A
2/9
STATION CONTROLLER [ INDEXER UNIT ]
EEDC-0011
STATION CONTROLLER [ TRANSPORT UNIT ]
EERC-0011
STATION CONTROLLER [ SPIN UNIT ]
EESC-0011
STATION CONTROLLER [ BAKE UNIT ]
EEBC-0012
STATION CONTROLLER [ UEEW UNIT ]
EEEC-002
STATION CONTROLLER [ IF-B UNIT ]
EEEB-001
MAIN I/0 IFC BOX
EEMH-001
MAIN EXTERNAL IFC BOX
EEMI-001
STATION CONTROLLER
EEYC-0#11
MAIN PANEL [ STANDARD TYPE ]
EEMP-001#
MAIN PANEL [ MOTORED TYPE ]
EEMP-0112
INDEXER PANEL
EEDP-001
PORTABLE PANEL IFC BOX
EEMJ-002
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
3/9
INDEXER A UNIT [ VACUUMLESS TYPE ]
EED#-001
INDEXER A UNIT [ VACUUM TYPE ]
EED#-0#1#
INTERFACE UNIT [ TYPE B ]
EEI#-####
TRANSPORT UNIT
EERM-OO1
4/9
SPIN UNIT [ COATER ]
EESM-0O1
SPIN UNIT [ POSITIVE DEVELOPER ]
EESM-O02
SPIN UNIT [ PIQ COATER ]
EESM-003
SPIN UNIT [ SCRUBBER ]
EESM-030
SPIN VACUUM SENSOR
EEFT-O01
SPIN CUP [ COATER, POSITIVE DEVELOPER ]
EESM~010
SPIN CUP [ MOTORED EBR NOZZLE ]
EES#-011
SPIN COVER
EESM-O20
RESIST PUMP CYLINDER SENSOR
EEFT-021
SPIN TWO-WAY WASTE DRAIN
EEFT-O51
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
5/9
CHEMICAL FLOW/LEVEL SENSOR
E##-0#1
SPIN CHEMICAL IFC BOX
EEFH-001
SPIN IFC BOARD
EESD-O01
EXTERNAL ALARM IFC BOARD
EEKD-O01
CHEMICAL FLOW/LEVEL SENSOR IFC BOARD
EEFD-001
D-SONIC IFC BOX
EEFI-001
EXHAUST CONTROLLER
EESW-0#1
DRAIN BOX SENSOR
EEFT-O#11
AUTO-DRAIN BOX SENSOR
EEC#-0#1
DIRECT-DRAIN SENSOR
EEFT-O71
SV IFC BOARD
EECS-O#1
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
6/9
BAKE UNIT [ HP(HH,AH) ]
EEBM-O##
BAKE UNIT [ CP(AC) ]
EEBN-O#1
BAKE UNIT [ LPAH ]
EEBO-0#1
BAKE SV
EEBS-010
BAKE IFC BOARD
EEBD-O01
HEATER CONTROLLER
EEB#-0O1##
COMMON T0 CHEMICAL CONTROLLER
EEC#-001
CHEMICAL CONTROLLER [ SD ONLY ]
EEC#-011
CHEMICAL CONTROLLER [ SC+SD TYPE ]
EEC#-001
SwITCHINC BOTTLES SENSOR
EECN-0#1
AUTO-SUPPLY SYSTEM SENSOR
EECN-0#11
7/9
LOWER LIMIT SENSOR
EEH#-0#1
EXHAUST SOURCE PRESSURE SENSOR
EEHW-O#1
DIW SOURCE PRESSURE SENSOR [ SPIN UNIT ]
EEHW-011
SOURCE PRESSURE SENSOR
EE##”OO1
LEAKAGE SENSOR
EEHY-O11
CIRCUIT BREAKER BOX
EEPB-00#
AC POWER SUPPLY
EEP#-00#
MAIN POWER ON/OFF SWITCH BOX
EEMK-001
EMERGENCY POWER OFF SWITCH
EEPI-OO1
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
8/9
TOWER-LAMP
EEMT-0O1
DEEW UNIT
EEUM-0O2
IMAGE SENSOR CONTROLLER
EEUE-001
DEEW POWER SUPPLY BOX
EEUB-001
HOST,AGV IFC BOX
EEMX-00#1
DRIVER UNIT POWER RELAY CABLE
EEKL-OO1
9/9
AIR CONDITIONING UNIT ALARM CABLE
EEHW-0#1
CABLE CONNECTION [ MAIN CONTROLLER ]
EEML-001
CABLE CONNECTION [ INDEXER UNIT ]
EEDL-O01
CABLE CONNECTION [ TRANSPORT UNIT ]
EERL-001
CABLE CONNECTION [ SPIN UNIT ]
EESL-O01
CABLE CONNECTION [ SPIN CHEMICAL IFC BOX ]
EEFL-OO1
CABLE CONNECTION [ BAKE UNIT ]
EEBLâ-O01
CABLE CONNECTION [ CHEMICAL CONTROLLER ]
EECLâ-O01
CABLE CONNECTION [ ALARM IFC BOX ]
EEHL-O01
CABLE CONNECTION [ INTERFACE UNIT (TYPE B) ]
CABLE CONNECTION [ UEEW UNIT ]
EEEL-0O1
CABLE CONNECTION [ DEEW UNIT ]
EEUL-O01
Trouble finding the right part number for your DNS 80B part? Look no further! We scanned and OCR’ed the official Dainippon Screen Parts List for your convenience. Peruse the results below. Contact www.GetSpares.com for replacement or repair solutions on the parts you need.
DNS 80B Control Units Parts List 1/3
DNS 80B Control Units Parts List 2/3
DNS 80B Control Units Parts List 3/3
SERVICE ‘PARTS LIST (80B).x1s Z§_,_C_Qnj’__r_Q_I_U_n_i_t
REV.5.1 00.09
No A PARTS NAME APPLICATION TYPE PARTS No. DEL. MANUFACTURER REMARKS DIV. REV.
1 Indexer board ID-A EEDC-0011 2-VC-19089
2 Indexer board ID-A EEDC-0012 2-VC-34410 4
3 IF-B board (Type 1) IF-B EEIB-O01 2-VC-18166 1
14 IF-B board (Type 2) IF-B EEIC—OO1 2-VC*19284 1
5 IF-B board IF-B EEIC-0012 2-VC-19284-2 4
6 Transport board Transport unit EERC~O012 2-VC-19090-1 3
7 Spin board Spin EESC-0012 2-VC-19115
:3 Bake board Bake EEBC-0012 2-VC-19116
S9 Bake board Bake EEBC-0013 2-VC-34409 4
10 EEW board DEEW 2-VC-18987 1
11 EEW board DEEW EEUC-0013 2-VC-18987-4 4
12 EEW board DEEW EEUC-0014 2-VC-18987-5 4
13 EEW board DEEW EEUC-0015 2-VC-18987-6 4
14 EEW board UEEW EEEC-O02 2-VC-16147-2 1
15 Spin IFC board I Spin EESD-O01 2-VC-16027
16 EBR IFC bard Spin EESD-O11 2-VC—17102
17 Bake IFC board Bake EEBD—OO1 2-VC-16010
18 DS-LAN board *1 Main controller CEML-0014 2-VC-10751-3 3
19 DS-LAN board *1 Main controller CEML-0014 2-VC-10751-4 5
20 DS-LAN board *1 Main controller CEML~0O16 2-VC-10751-5 5
21 Parallel I/O board *1 Main controller CEMI-0011 2-VC-09977-1
22 RAS board Main controller FC-9801-06K 2-39-48605 NEC gg;380lB/2
23 Simplified RAS board Main controller PC-9821KE-E06 2~39-59409 NEC 5
24 Main controller FC-9821X/2 2-VB-25463
25 Main controller FC-9821X/2 2-VB-25463
26 HD adapter Main controller FC-9821KA-E01 2-39-59405 NEC 5
27 Hard disk drive Main controller §Cgg8fi$XA-HD1 2-39-59406 NBC 5
28 Copy board *1 Copy for main panel CEMG-O01 2-VC-20712 2
29 Copy board *1 Copy for main panel CEMG-0021 2-VC-24889 3
30 Station controller STANDARD (20 SLOTS) EEYC-0011 2-VC-20626 2
31 Station controller 28 SLOTS TYPE EEYC-O111 2-VC-20627 . 2
32 Station controller 11 SLOTS TYPE EEYC-003 2-VC-34399 5
33 GEM controller EEMZ-001 2-VC-25207-1 3
34 GEM controller EEMZ—0O11 2-VC—25207-2 5
35 1/0 unit box Main controller EEMH-001 2-VC-16705
36 Heater controller Bake unit(Max.8 HP) EEBH-0011 2-VC*162l7-1
37 Heater controller Bake unit EEBH~6011 2-VC-34885 CE TYPE 5
flmwm‘ 38 Servo amplifier Spin motor drive AU6356N20 2-39-53462 3
. 39 Servo amplifier Spin motor drive (8OB) EESA-0O1A1 2-VC-16396-2
40 AC power supply Primary AC power input/ EEPH-001 2-VC-16214
Secondary power output
UPS *l*2 Main controller back-up PS500 2-39-55593 HEIAN ELE §;fg“f$fHmJ%Ei 3.1
41 . 121368. (There is 5 UL
label on the backside
of the main body.)
42 Main panel EEMP-0013 2-VC-21746 2
43 Main panel Motor—drive EEMP-0112 2-VC-21747-1 2
44 Main panel Motor-drive EEMP-0113 2-VC-28117
45 Portable main panel EEMP-0212 2~VC-21717 2
46 ID-A panel ID-A EEDP—O01A 2-VC-14786-7 5
47 Maintenance panel ‘ *1 Spin unit CESP-0017 2-VC-10752-6 3
48 Maintenance panel UEEW EEEP-001 2-VC-17848-1 3
49 5 axis motor driver I EEKB-0011 2-VC-26961
50 8 axis motor driver ID—A/Transport Unit EEKA-001 2-VC-15485
51 8 axis motor driver ID-A/Transport Unit EEKA-0011 2-VC~23936
PORP (Incl. Printer) Edit Recipe on Portable
Personal Computer
Book type Personal comp. PC-9801NS/T40
Memory Card (8MB) RCS-8000
52 Application Software PS-98-1002-32 Ver.3.3D
Cable PORP-Printer PC-9801N-19
Printer PC-PR150N
PORP (Not incl. Printer) Edit Recipe on Portable
Personal Computer
Book type Personal comp. PC-9801NS/T40
53 Memory Card (8MB) RCS-8000
Application Software PS-98-1002-32 Ver.3.3D
Cable PORP-User’s Printer PC-9801N—19
54 EBR motor driver EBR CSD5807N-P 2-39-46547
CP power supply unit Cooling plate MR-2015 fig; 2-39~45432
‘K 56 CP controller Cooling plate FRD-4 1 2-39-45431
57 Chemical temp controller INR-244-402 2-39-45751
58 Circulator Chemical temp controller INR-244—404 (2oov) 2-39-45750
59 Circulator Chemical temp controller INR-244-406 (220V) 2-39-48373
60 Panel Chemical Temp Controller INR-244-403 2-39-48374 1
61 WCDS controller *1 For photoresist CECC~4012 2-VC-19786-1 2
62 WCDS panel *1 For photoresist CECP-001 2-VC-14144-1 2
63 Air elimination control. For photoresist PDS-1602 2-39-48738 2
*1
64 Air elimination panel *1 For photoresist PDS-1520 2-39-47429 2
65 Battery unit UPS Type BT-2-48(2Ah-4 48V) 2-39-58575
66 Fuse UPS Type (UL) TSC-8A 2-39-58576 s. 0. C
67 UPS with a Cable Main controller back-up CEMD-0012 2-VC-09974-1 HEIAN ELE
68 Video measure sensor DEEW EEUE-001B 2-VC-30392 Z4LC-CD2 TYPE 3.1
controller
Video measure sensor DEEW EEVE-001 2-VC-18989 3X2CA—PLC8 TYPE 4
69 controller
*1 Common to 80A
*2 back-up time comes to be shorter by degrees because the inside battery getting old.
Contact www.GetSpares.com for replacement or repair solutions on the parts you need.
The FRD-4 Thermostatic Unit serves as the controller for cool plates in the DNS 80B track. This unit is known to fail and can cause communication errors in the bake/cool process.
Front view of FRD-4 for DNS 80B
Cool Plate Controller Communication Error in DNS 80B caused by faulty FRD-4
Front view of FRD-4 installed in DNS 80B. Check communication 5V power at the output connectors.
A good way to quickly check whether or not the FRD-4 communication circuit is functional is to check voltage on one of the output cables to cool plate units. The output cables connect to the right-most ports on the FRD-4. Each of them has a red wire and black wire that carry 5V DC power. Backprobe one of these connectors while it is connected to a live FRD-4 to verify the 5V power. If there is no voltage, the communication logic on-board the FRD-4 has suffered critical failure. Contact GetSpares.com for replacement or repair solutions.