TEL Tokyo Electron Clean Track – INR-244-216B SMC Thermo-Con Failure

Posted on February 1, 2017 by Currentflow

Have a INR-244-216B that failed? Common symptoms are E800 and E820 codes on the front panel. Fan not spinning or LED not illuminated? Contact GetSpares.com. There is a fully functional track with its main purpose to test your parts or supply its parts for you in case of an emergency. Below is a list of of error codes that go along with the the SMC Thermo-Con on a Tel Clean Track. E800 or E820 are the common failures for this INR-244-216 box. Note that, the track can run sometimes without error even if the the SMC Thermo-Con unit does have problems.

INR-244-211C-43 with INR-244-216

Other relevant and available parts are 2TP-2B575, INR-244-244T-670 and INR-244-253-6400 Operator Panel / Keypad -C3 -D9 . There are parts inside cabinet INR-244-211C-43.

If you isolate the problem to this, and need a replacement or repair contact GetSpares. Where they have a fully functional track running and ready to test and supply parts for you.

Error codes for SMC unit

E000 ROM check error. ROM check error at power supply.
E001 RAM check error. RAM checkerror at power supply.
E002 Back up data error. EEROM data is lost.
E100 Alarm at low voltage in power supply of thermo-modules . Occurs in case of over current.
E200 High temperature alarm. Occurs when the input value of control sensor exceeds 60C degrees.
E300 Low temperature alarm. Occurs When the input value of control sensor falls below 0 C.
E400 Thermostat alarm. Occurs when the contact point of a thermostat is open.
E500 Temp. control impossible. This alarm Works if termperature does not change properly (the range varies 0.1~0.9°C) when 100% output is continued for certain period of time (varies 1~60 min.)
E600 Flow switch alarm. Occurs when flow switch is ON.
E700 Alarm of control sensor broken wire. Occurs if broken disconnected.
E800 Pump abnormality alarm. Pump has something wrong.
E810 Water leakage abnormality alarm. water leakage sensor detects abnormality.
E820 Fan alarm. Cooling fan for each switching power supply stops.
E840 Level abnormality alarm. Level sensor detects abnormality.

INR-244-402 aka 2-39-45751 Chemical Temperature Controller for DNS 80B

Posted on July 6, 2016 by Currentflow

The Chemical Temperature Control unit (part number INR-244-402 aka 2-39-45751) for DNS 80B photolithography track is a known failure point. Symptoms include communication errors, error code “00”, and failure to meet temperature set point.

GetSpares.com has discovered the electronic repair solutions for restoring these units to operational status. Additionally, GetSpares.com maintains functional DNS tracks on the warehouse floor, providing a conclusive test environment for any DNS parts.

Contact GetSpares.com today for your repair or replacement needs!

Front View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

Rear View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

Driver Motor Box Servo Amplifier PK CESA-804 for DNS 80A Track

Posted on April 18, 2016 by Currentflow

Communication and Rev errors in the spin units of DNS 80A tracks have been traced back to faulty electronics in the Servo Amplifier Pack – part number CESA-804.

GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

Example alarm that has been resolved:

-CODE 1-03-0247 [station 1 – unit 3 (spin) – code 0247]: Servo Controller Communication Error

If you are experiencing any communication or “rev” (RPM) errors in the spin units of your DNS equipment, contact GetSpares.com today for the right solution!

CESA-804 Servo Amp Pack for DNS 80A

DNS 60/80 A/B EEMP-0021X3, EEMP-0013 LCD Monitors – Color and Monochrome

Posted on July 22, 2015 by Currentflow

DNS part numbers EEMP-0021X3 and EEMP-0013 are LCD monitors that can be used in either the 60A, 60B, 80A, or 80B tracks, depending on the track configuration.

Monitor installed in DNS 80B

Monitor installed in DNS 80B, telescoped out

These can fail or malfunction if installed in a tool not configured for that exact part number. EEMP-0021X3 is a full color display, whereas EEMP-0013 is a monochrome display.

DNS EEMP-0013 Monochrome LCD monitor installed in 80B

DNS EEMP-0021X3 Color LCD monitor installed in 80B

A known symptom of color vs. monochrome incompatibility is loss of directional sync on the monitor. The screen image will continuously and uncontrollably “roll” like the images in a slot machine. Another failure symptom is no image at all, but this is less likely a compatibility issue as opposed to general circuit failure. In either case, GetSpares.com maintains a fully operational DNS 80B track and parts, as well as the capability to repair and test parts. If your DNS LCD monitor is failing, contact GetSpares for quality repair/replacement solutions.

2-39-45431 Thermostatic Unit FRD-4, Cool Plate Controller for DNS 80B

Posted on June 22, 2015 by Currentflow

The FRD-4 Thermostatic Unit serves as the controller for cool plates in the DNS 80B track. This unit is known to fail and can cause communication errors in the bake/cool process.

Front view of FRD-4 for DNS 80B

Cool Plate Controller Communication Error in DNS 80B caused by faulty FRD-4

Front view of FRD-4 installed in DNS 80B. Check communication 5V power at the output connectors.

A good way to quickly check whether or not the FRD-4 communication circuit is functional is to check voltage on one of the output cables to cool plate units. The output cables connect to the right-most ports on the FRD-4. Each of them has a red wire and black wire that carry 5V DC power. Backprobe one of these connectors while it is connected to a live FRD-4 to verify the 5V power. If there is no voltage, the communication logic on-board the FRD-4 has suffered critical failure. Contact GetSpares.com for replacement or repair solutions.

AU6356N2( a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) Servo Amp Controller for DNS 80B Coat and Develop Tracks

Posted on February 23, 2015 by Currentflow

Servo amps AU6356N2 (a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) are sitting in a fully functional track, ready to be pulled and sent to you when you need it. In DNS 80B tracks, these electronic modules control the spin of a wafer in the coating and developing processes. The common failure mode is loss of LED indication on the connection panel and erratic or non existent motor control. GetSpares.com keeps these modules installed in fully operational tracks in their warehouse inventory, so you know they are working. When you order a module, it’s pulled from the track and shipped. Head to GetSpares.com and order yours today!