More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/06/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
07/13/2018 Repaired/shipped
GetSpares 36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/01/2018 Custom solution/shipped
GetSpares 36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/01/2018 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/01/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/19/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
07/13/2018 Repaired/shipped
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
07/02/2018 Repaired/shipped
GetSpares BU504XII 2-XZ-10840
OMRON
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018 Repaired/shipped
GetSpares PS500 2-39-55593
DNS
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/21/2018 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
07/11/2018 Repaired/shipped
GetSpares EEBH-0011X1
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/28/2018 Repaired/shipped
GetSpares EEBH-0011
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/19/2018 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/06/2017 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
07/04/2018 Repaired/shipped
GetSpares EEYC-001
DNS
Cage for all the slave cards in front of track
80B
DNS
Photolithograpy
07/02/2018 Custom solution/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
07/02/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
06/21/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
06/19/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C
RS55
Prometrix/KLA
Wafer Resistivity
06/04/2018 Repaired/shipped
GetSpares 36-0325
Prometrix
controller that slides in from right horizontally.
RS75
Prometrix/KLA
Wafer Resistivity
05/04/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
06/06/2018 Repaired/shipped
GetSpares 95-3155
Gasonics
Cluster Misc Controller With AC power detect J6
PEP3510
Novellus/Gasonics
RIE/Plasma
07/28/2016 Repaired/shipped
GetSpares 567-5101 HV Supply
Hitachi
Hv supply for electron gun
Unknown CD SEM
Hitachi
SEM
05/22/2018 For Sale/ Stock
GetSpares LSMUT_TF
Comvolt
Just an HV timer.
SMBUS_ASMU1
Comvolt
lab tester
05/15/2018 Custom solution/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
06/01/2018 Repaired/shipped
GetSpares 001-4130-03
Brooks
Brooks ACE VCE Controller
LAM and others
Brooks
Robots
05/23/2018 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018 For Sale/ Stock
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/21/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
05/15/2018 Repaired/shipped
GetSpares 810-025368-001
Lam Research
Simple relay board. located in top left of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/21/2015 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/27/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
03/27/2018 Repaired/shipped
GetSpares CESB-2012
DNS
Spin Board
80A
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/14/2018 Repaired/shipped
GetSpares EEJA-001A
DNS
6-axis controller based on the note on this unit.
80B
DNS
Photolithograpy
04/06/2018 Repaired/shipped
GetSpares EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/25/2017 For Sale/ Stock
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
SK200
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
SK200
DNS
Photolithograpy
04/14/2018 Repaired/shipped
GetSpares 95-0541Misc Controller
Gasonics

PEP3510
Novellus/Gasonics
RIE/Plasma
10/27/2016 Repaired/shipped
GetSpares 1-139-023
IDI
Communications Card
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-139-022
IDI
Pump Controller
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board
M300
IDI/Cybor
Pump
02/18/2014 Custom solution/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/10/2018 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
04/10/2018 Repaired/shipped
GetSpares 375039
Tencor
Data Processing Board
AIT2
KLA
Inspection
04/05/2018 Custom solution/shipped
GetSpares 810-025369-001
Lam Research
Resistivity Board. located in top center of the chiller
Lam-TCU_2080
Lam
Chiller
04/03/2018 Repaired/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds
Lam-TCU_2080
Lam
Chiller
04/03/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
04/03/2018 Repaired/shipped
GetSpares Super Vexta UDX5107
Vexta
5 axis driver
80A
DNS
Photolithograpy
03/29/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
03/22/2018 Repaired/shipped
GetSpares 3510N45E10
Tamagawa
Tamagawa Motor AC servo
80B
DNS
Photolithograpy
03/19/2018 Repaired/shipped
GetSpares 373583
Tencor
ANALOG BOARD
AIT2
KLA
Inspection
06/22/2016 Repaired/shipped
GetSpares SQV175-1433-2
Prometrix
Power Supply
6220
KLA
Inspection
02/28/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
01/29/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
01/29/2018 Repaired/shipped
GetSpares 0100-02016 0100-20066
AMAT
Analog Sync Detect AMAT
P5000
Applied Materials AMAT
RIE/Plasma
01/04/2018 For Sale/ Stock
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
02/20/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
02/15/2018 Repaired/shipped

KLA-Tencor 8100, 8250, 8300, 8450 series Critical Dimensions – Scanning Electron Microscope (CD-SEM): imaging malfunctions result of failed Column Control Chassis II (CCC2) part number 720-06884-002

KLA-Tencor Critical Dimensions Scanning Electron Microscope (CD-SEM) models 8100, 8250, 8300, 8450 can suffer from imaging malfunctions as the result of a failed Column Control Chassis II (CCC2) unit – part number 720-06884-002.  The observed failure mechanism is usually a ripple distortion effect along one or more view axes (see below images for clear examples). GetSpares maintains fully operational KLA SEMs in their warehouse, as well as the ability to repair these critical electronics.  This means parts sent in for repair get fully tested in a functional tool before being sent out – so you can be assured of top quality service.  Contact GetSpares today for replacement/repair solutions!

Front view of KLA 8100 SEM

Front view of KLA 8100 SEM

Side view of KLA 8100 SEM

Side view of KLA 8100 SEM

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM

KLA 8100 SEM imaging: malfunctioning CCCP2 720-06884-002

KLA 8100 SEM imaging
Top – electron gun image of wafer site with funcitonal CCC2.
Bottom Left/Right – same site shown when CCC2 malfunctions and causes ripple distortion in image.

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion

KLA-Tencor 277266 Timing Generator for Surfscan Systems S6100, S6120, S6220, S6420

The electronic circuit board 277266 Timing Generator goes into KLA-Tencor Surfscan systems S6100, S6120, S6220, and S6420.  The board is integral to the tool, which provides high precision defect inspection for silicon wafers.  GetSpares.com maintains fully functional Surfscan systems on their warehouse floor – that means good parts for sale, or good test environments for repaired parts.  If your tool is down, contact GetSpares.com today for replacement/repair solutions.

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6420

KLA-Tencor Surfscan S6120

KLA-Tencor Surfscan S6120

 

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Top view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

Bottom view: Timing Generator board 277266 for KLA-Tencor Surfscan S6100, S6120, S6220, and S6420

KLA-Tencor Prometrix ME Box 52-0616, DVM for RS75 Resistivity Mapping Systems

The “ME Box” (part number 52-0616) is a high precision voltmeter used in the KLA-Tencor Prometrix RS75 series Resistivity Mapping Systems, which probe wafers for production defects.

The communication circuit in the ME Box is known to fail, causing false voltage/resistance/current readings by the RS75, or no readings at all.

GetSpares.com has the ME Box in stock in a functional RS75 tool – a guarantee that the ME Box will be operational.  Head to GetSpares and get yours today!

 

Side View: MEBox 52-0616

Side View: MEBox 52-0616

Top View: MEBox 52-0616

Top View: MEBox 52-0616

Bottom View: MEBox 52-0616

Bottom View: MEBox 52-0616