Tag Archives: Track

TEL Tokyo Electron Clean Track – INR-244-216B SMC Thermo-Con Failure

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Have a INR-244-216B that failed?  Common symptoms are E800 and E820 codes on the front panel.  Fan not spinning or LED not illuminated?  Contact GetSpares.com.  There is a fully functional track with its main purpose to test your parts or supply its parts for you in case of an emergency.  Below is a list of  of error codes that go along with the the SMC Thermo-Con on a Tel Clean Track.  E800 or E820 are the common failures for this INR-244-216 box. Note that, the track can run sometimes without error even if the the SMC Thermo-Con unit does have problems.

INR-244-211C-43 with INR-244-216

Other relevant and available parts are 2TP-2B575, INR-244-244T-670 and INR-244-253-6400  Operator Panel / Keypad -C3 -D9 .  There are parts inside cabinet INR-244-211C-43.

If you isolate the problem to this, and need a replacement or repair contact GetSpares.  Where they have a fully functional track running and ready to test and supply parts for you.

Error codes for SMC unit

 

E000 ROM check error. ROM check error at power supply.
E001 RAM check error. RAM checkerror at power supply.
E002 Back up data error. EEROM data is lost.
E100 Alarm at low voltage in power supply of thermo-modules . Occurs in case of over current.
E200 High temperature alarm. Occurs when the input value of control sensor exceeds 60C degrees.
E300 Low temperature alarm. Occurs When the input value of control sensor falls below 0 C.
E400 Thermostat alarm. Occurs when the contact point of a thermostat is open.
E500 Temp. control impossible. This alarm Works if termperature does not change properly (the range varies 0.1~0.9°C) when 100% output is continued for certain period of time (varies 1~60 min.)
E600 Flow switch alarm. Occurs when flow switch is ON.
E700 Alarm of control sensor broken wire. Occurs if broken disconnected.
E800 Pump abnormality alarm. Pump has something wrong.
E810 Water leakage abnormality alarm. water leakage sensor detects abnormality.
E820 Fan alarm. Cooling fan for each switching power supply stops.
E840 Level abnormality alarm. Level sensor detects abnormality.

INR-244-402 aka 2-39-45751 Chemical Temperature Controller for DNS 80B

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The Chemical Temperature Control unit (part number INR-244-402 aka 2-39-45751) for DNS 80B photolithography track is a known failure point.  Symptoms include communication errors, error code “00”, and failure to meet temperature set point.

GetSpares.com has discovered the electronic repair solutions for restoring these units to operational status.  Additionally, GetSpares.com maintains functional DNS tracks on the warehouse floor, providing a conclusive test environment for any DNS parts.

Contact GetSpares.com today for your repair or replacement needs!

Front View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

Front View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

Rear View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

Rear View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B

GEIA-001 (aka 2-VC-28124) 6-axis Motor Driver for DNS SK200 Interface-B Unit

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The 6-axis Motor Driver, part numbers GEIA-001 or 2-VC-28124, drives the handler robots EV1 and EV2 in the Interface-B (IF-B) unit of DNS SK200 coater track.  Faulty handler operation in the IF-B has been traced back to failed electronics in the 6-axis Motor Driver.

GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

If you are experiencing handler motor drive problems in your DNS equipment, contact GetSpares.com today for the right solution!

GEIA-001 (aka 2-VC-28124) 6-axis Motor Driver for DNS SK200

GEIA-001 (aka 2-VC-28124) 6-axis Motor Driver for DNS SK200

GEPH-001/GEPH-001X3 AC Box Power Supply for DNS SK200 Coater Track

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Power failures in DNS SK200 coater track have been traced back to failed electronics in the AC Power Supply Box – part number GEPH-001/GEPH-001X3.

GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

 

If you are experiencing general power failures (or even a “dead” track) in your DNS equipment, contact GetSpares.com today for the right solution!

GEPH_001X3 AC Power Supply Box DNS SK200

GEPH_001X3 AC Power Supply Box DNS SK200

Driver Motor Box Servo Amplifier PK CESA-804 for DNS 80A Track

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Communication and Rev errors in the spin units of DNS 80A tracks have been traced back to faulty electronics in the Servo Amplifier Pack – part number CESA-804.

GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

Example alarm that has been resolved:

-CODE 1-03-0247 [station 1 – unit 3 (spin) – code 0247]:                                              Servo Controller Communication Error 

If you are experiencing any communication or “rev” (RPM) errors in the spin units of your DNS equipment, contact GetSpares.com today for the right solution!

CESA-804 Servo Amp Pack for DNS 80A

CESA-804 Servo Amp Pack for DNS 80A

Indexer Control Board CEDB-1013 aka 2-VC-15252 for DNS 80A Track

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A number of flow errors at the Indexer module of a DNS 80A track have been traced back to failures in the Indexer Control Board – part numbers CEDB-1013,  2-VC-15252 or 2-VC-1524-1. 2-VC-15254-1  GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.

Example alarms that have been resolved include:

–CODE 1-01-0210 [station 1 – unit 1 (indexer) – code 0210]:                                        Faulty Indexer Horizontal Axis Operation

–CODE 1-01-0220 [station 1 – unit 1 (indexer) – code 0220]:                                         Faulty Indexer Horizontal Axis Origin Return

If you are experiencing this or similar flow alarms on your DNS equipment, contact GetSpares.com today for the right solution!

Indexer Control Board CEDB-1013 for DNS 80A

Indexer Control Board CEDB-1013 for DNS 80A

DNS 60/80 A/B EEMP-0021X3, EEMP-0013 LCD Monitors – Color and Monochrome

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DNS part numbers EEMP-0021X3 and EEMP-0013 are LCD monitors that can be used in either the 60A, 60B, 80A, or 80B tracks, depending on the track configuration.

DNS_Monitor_60A_60B_80A_80B

Monitor installed in DNS 80B

DNS_Monitor_60A_60B_80A_80B

Monitor installed in DNS 80B, telescoped out

These can fail or malfunction if installed in a tool not configured for that exact part number.  EEMP-0021X3 is a full color display, whereas EEMP-0013 is a monochrome display.

DNS_Monitor_60A_60B_80A_80B_EEMP-0013

DNS EEMP-0013 Monochrome LCD monitor installed in 80B

DNS_Monitor_60A_60B_80A_80B_EEMP-0021X3

DNS EEMP-0021X3 Color LCD monitor installed in 80B

 

A known symptom of color vs. monochrome incompatibility is loss of directional sync on the monitor.  The screen image will continuously and uncontrollably “roll” like the images in a slot machine.  Another failure symptom is no image at all, but this is less likely a compatibility issue as opposed to general circuit failure.  In either case, GetSpares.com maintains a fully operational DNS 80B track and parts, as well as the capability to repair and test parts.  If your DNS LCD monitor is failing, contact GetSpares for quality repair/replacement solutions.

Dainippon Screen -80B Schematics Lists

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List of schematics for DNS 80B tracks.    Here is a list of schematics for control schematics.

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
ELECTRICAL CIRCUIT DIAGRAM LIST
HIGH PRESSURE GENERATION UNIT
JEHP-005
co2 BUBBLING CONTROLLER
SECO-1053
cog BUBBLING UNIT
SECV-104
MAINTENANCE PANEL [ SPIN UNIT 1
CESP-0015
STEPDOWN TRANSFORMER
9EDT-101A
STEPDOWN TRANSFORMER
9EDT-111A
STEPDOWN TRANSFORMER
9EDT-201A
STEPDOWN TRANSFORMER
9EDT-211A

2/9
STATION CONTROLLER [ INDEXER UNIT ]
EEDC-0011
STATION CONTROLLER [ TRANSPORT UNIT ]
EERC-0011
STATION CONTROLLER [ SPIN UNIT ]
EESC-0011
STATION CONTROLLER [ BAKE UNIT ]
EEBC-0012
STATION CONTROLLER [ UEEW UNIT ]
EEEC-002
STATION CONTROLLER [ IF-B UNIT ]
EEEB-001
MAIN I/0 IFC BOX
EEMH-001
MAIN EXTERNAL IFC BOX
EEMI-001
STATION CONTROLLER
EEYC-0#11
MAIN PANEL [ STANDARD TYPE ]
EEMP-001#
MAIN PANEL [ MOTORED TYPE ]
EEMP-0112
INDEXER PANEL
EEDP-001
PORTABLE PANEL IFC BOX
EEMJ-002

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
3/9
INDEXER A UNIT [ VACUUMLESS TYPE ]
EED#-001
INDEXER A UNIT [ VACUUM TYPE ]
EED#-0#1#
INTERFACE UNIT [ TYPE B ]
EEI#-####
TRANSPORT UNIT
EERM-OO1

4/9

SPIN UNIT [ COATER ]
EESM-€”0O1

SPIN UNIT [ POSITIVE DEVELOPER ]
EESM-O02

SPIN UNIT [ PIQ COATER ]
EESM-003

SPIN UNIT [ SCRUBBER ]
EESM-030

SPIN VACUUM SENSOR
EEFT-O01

SPIN CUP [ COATER, POSITIVE DEVELOPER ]
EESM~010

SPIN CUP [ MOTORED EBR NOZZLE ]
EES#-011

SPIN COVER
EESM-O20

RESIST PUMP CYLINDER SENSOR
EEFT-021

SPIN TWO-€”WAY WASTE DRAIN
EEFT-O51

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST
5/9

CHEMICAL FLOW/LEVEL SENSOR
E##-0#1

SPIN CHEMICAL IFC BOX
EEFH-001

SPIN IFC BOARD
EESD-O01

EXTERNAL ALARM IFC BOARD
EEKD-O01

CHEMICAL FLOW/LEVEL SENSOR IFC BOARD
EEFD-001

D-SONIC IFC BOX
EEFI-001

EXHAUST CONTROLLER
EESW-0#1

DRAIN BOX SENSOR
EEFT-O#11

AUTO-DRAIN BOX SENSOR
EEC#-0#1

DIRECT-€”DRAIN SENSOR
EEFT-O71

SV IFC BOARD
EECS-O#1
D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST

6/9

BAKE UNIT [ HP(HH,AH) ]
EEBM-O##
BAKE UNIT [ CP(AC) ]
EEBN-O#1
BAKE UNIT [ LPAH ]
EEBO-0#1
BAKE SV
EEBS-010
BAKE IFC BOARD
EEBD-O01
HEATER CONTROLLER
EEB#-0O1##
COMMON T0 CHEMICAL CONTROLLER
EEC#-001
CHEMICAL CONTROLLER [ SD ONLY ]
EEC#-011
CHEMICAL CONTROLLER [ SC+SD TYPE ]
EEC#-001
SwITCHINC BOTTLES SENSOR
EECN-0#1
AUTO-SUPPLY SYSTEM SENSOR
EECN-0#11

7/9

LOWER LIMIT SENSOR
EEH#-0#1
EXHAUST SOURCE PRESSURE SENSOR
EEHW-€˜O#1
DIW SOURCE PRESSURE SENSOR [ SPIN UNIT ]
EEHW-011
SOURCE PRESSURE SENSOR
EE##”OO1
LEAKAGE SENSOR
EEHY-O11
CIRCUIT BREAKER BOX
EEPB-00#
AC POWER SUPPLY
EEP#-00#
MAIN POWER ON/OFF SWITCH BOX
EEMK-001
EMERGENCY POWER OFF SWITCH
EEPI-OO1

D-SPIN 80B ELECTRICAL CIRCUIT DIAGRAM LIST

8/9
TOWER-€”LAMP
EEMT-€”0O1

DEEW UNIT
EEUM-0O2

IMAGE SENSOR CONTROLLER
EEUE-001
DEEW POWER SUPPLY BOX
EEUB-001
HOST,AGV IFC BOX
EEMX-00#1

DRIVER UNIT POWER RELAY CABLE
EEKL-OO1

9/9
AIR CONDITIONING UNIT ALARM CABLE
EEHW-€”0#1

CABLE CONNECTION [ MAIN CONTROLLER ]
EEML-001

CABLE CONNECTION [ INDEXER UNIT ]
EEDL-O01

CABLE CONNECTION [ TRANSPORT UNIT ]
EERL-001

CABLE CONNECTION [ SPIN UNIT ]
EESL-O01

CABLE CONNECTION [ SPIN CHEMICAL IFC BOX ]
EEFL-OO1

CABLE CONNECTION [ BAKE UNIT ]
EEBLâ€-O01

CABLE CONNECTION [ CHEMICAL CONTROLLER ]
EECLâ€-O01

CABLE CONNECTION [ ALARM IFC BOX ]
EEHL-O01

CABLE CONNECTION [ INTERFACE UNIT (TYPE B) ]

CABLE CONNECTION [ UEEW UNIT ]
EEEL-0O1

CABLE CONNECTION [ DEEW UNIT ]
EEUL-O01

DNS SK200 LCD Panels 2-39-51930, 2-39-61074, 001003BB, and 978009BB

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The LCD screen interface for DNS SK 200 developer track can become dim or shaky. You can get this part replaced or serviced at GetSpares.com.  Replacement parts are pulled from fully operational tools in the GetSpares warehouse, so you know the parts are good. LCD screen part numbers listed below – get yours today!

2-39-51930 or 978009BB

2-39-61074 or 001003BB

UT3-F1AE / DSS1-A

2-39-51930_front

Front View 2-39-51930

Front View 2-39-61074

Front View 2-39-61074

Rear View 2-39-51930

Rear View 2-39-51930

Rear View 2-39-61074

Rear View 2-39-61074

AU6356N2( a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) Servo Amp Controller for DNS 80B Coat and Develop Tracks

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Servo amps AU6356N2 (a.k.a EESA-001A1 / 2-VC-16396-2 / 2-39-53462) and AU3575N223 (a.k.a. EESA-001 / 2-39-48133-GSRPR) are sitting in a fully functional track, ready to be pulled and sent to you when you need it. In DNS 80B tracks, these electronic modules control the spin of a wafer in the coating and developing processes. The common failure mode is loss of LED indication on the connection panel and erratic or non existent motor control. GetSpares.com keeps these modules installed in fully operational tracks in their warehouse inventory, so you know they are working. When you order a module, it’s pulled from the track and shipped. Head to GetSpares.com and order yours today!

DNS80B: Wafer in coater ready for spin

DNS80B: Wafer in coater ready for spin

DNS80B: Wafer after spin

DNS80B: Wafer after spin

 

 

 

 

 

 

 

 

 

DNS80B: Electronic Module Cabinet

DNS80B: Electronic Module Cabinet

DNS80B: AU3656N20 Servo Amp Controllers

DNS80B: AU3656N20 Servo Amp Controllers

When you no longer see the LEDS illuminate in the top right cutout, the module needs to be replaced.

When you no longer see the LEDS illuminate in the top right cutout, the module needs to be replaced.

DNS80B - Cassette, Arm, Track

DNS80B – Cassette, Arm, Track

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Front view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR) installed in track

Front view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR) installed in track

Top view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR)

Top view of AU3575N223(a.k.a. EESA-001 / 2-39-48133-GSPR)