These videos server as a baseline for Prometrix RS-75 tool operation and troubleshooting. These runs use the standard test resistance modules also seen on RS35, RS55 and VP10e tools. Some boards that customers have problems with are the 36-0325 and 52-0616 controller and ME box.
When communicating issues and problems with your tool timestamps of these videos can help us understand the issues you are having. Take a look or send us pictures or videos of your specific issue.
Before sending your Hamamatsu lamp house to GetSpares.com. Although, most arrive in great, re-buildable condition, great care must be taken so that the sensitive elliptical (also known as parabolic or ellipsoidal) mirror is not destroyed while in shipping. This applies to all Hamamatsu light sources with these spherical reflectors such as L6001-01, L6599-01 and L6299-12.
Cracked Hamamatsu Mirror. So Sad!
Some guidelines for shipping Hamamatsu Lamp Houses:
The vast majority of units arrive in good shape, but we wanted to warn customers that care must be taken. In case your curious, this particular Hamamatsu was refurbished (extra mirror was expensive !) and is shining bright and exposing edge beads daily.
The Chemical Temperature Control unit (part number INR-244-402 aka 2-39-45751) for DNS 80B photolithography track is a known failure point. Symptoms include communication errors, error code “00”, and failure to meet temperature set point.
GetSpares.com has discovered the electronic repair solutions for restoring these units to operational status. Additionally, GetSpares.com maintains functional DNS tracks on the warehouse floor, providing a conclusive test environment for any DNS parts.
Contact GetSpares.com today for your repair or replacement needs!
Front View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B
Rear View: INR-244-402 aka 2-39-45751 Chemical Temperature Control Unit for DNS 80B
The 6-axis Motor Driver, part numbers GEIA-001 or 2-VC-28124, drives the handler robots EV1 and EV2 in the Interface-B (IF-B) unit of DNS SK200 coater track. Faulty handler operation in the IF-B has been traced back to failed electronics in the 6-axis Motor Driver.
GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.
If you are experiencing handler motor drive problems in your DNS equipment, contact GetSpares.com today for the right solution!
GEIA-001 (aka 2-VC-28124) 6-axis Motor Driver for DNS SK200
Power failures in DNS SK200 coater track have been traced back to failed electronics in the AC Power Supply Box – part number GEPH-001/GEPH-001X3.
GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.
If you are experiencing general power failures (or even a “dead” track) in your DNS equipment, contact GetSpares.com today for the right solution!
GEPH_001X3 AC Power Supply Box DNS SK200
Communication and Rev errors in the spin units of DNS 80A tracks have been traced back to faulty electronics in the Servo Amplifier Pack – part number CESA-804.
GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.
Example alarm that has been resolved:
-CODE 1-03-0247 [station 1 – unit 3 (spin) – code 0247]: Servo Controller Communication Error
If you are experiencing any communication or “rev” (RPM) errors in the spin units of your DNS equipment, contact GetSpares.com today for the right solution!
CESA-804 Servo Amp Pack for DNS 80A
A number of flow errors at the Indexer module of a DNS 80A track have been traced back to failures in the Indexer Control Board – part numbers CEDB-1013, 2-VC-15252 or 2-VC-1524-1. 2-VC-15254-1 GetSpares maintains functional DNS tracks on their floor as well as the engineering capability to repair and test associated parts and electronics.
Example alarms that have been resolved include:
–CODE 1-01-0210 [station 1 – unit 1 (indexer) – code 0210]: Faulty Indexer Horizontal Axis Operation
–CODE 1-01-0220 [station 1 – unit 1 (indexer) – code 0220]: Faulty Indexer Horizontal Axis Origin Return
If you are experiencing this or similar flow alarms on your DNS equipment, contact GetSpares.com today for the right solution!
Indexer Control Board CEDB-1013 for DNS 80A
The “ME Box” (part number 52-0616) is a high precision voltmeter used in the KLA-Tencor Prometrix RS75 series Resistivity Mapping Systems, which probe wafers for production defects.
The communication circuit in the ME Box is known to fail, causing false voltage/resistance/current readings by the RS75, or no readings at all.
GetSpares.com has the ME Box in stock in a functional RS75 tool – a guarantee that the ME Box will be operational. Head to GetSpares and get yours today!
Side View: MEBox 52-0616
Top View: MEBox 52-0616
Bottom View: MEBox 52-0616
GetSpares.com has good parts for sale in a fully operational GaSonics L3510 Plasma Ashing System.
These are the part numbers for the Electronic IO Modules:
90-2590
16495
Head to GetSpares.com to order the parts you need.
IO Board 90-2590 for GaSonics L3510
GaSonics L3510
The GaSonics PEP3510 ashing and etching system offers two parallel process chambers, each governed by a set of three electronic modules referred to as mini-controllers. The relevant part numbers for each mini-controller are listed below:
Miscellaneous: 95-3978, 95-3157, 95-0541
Microwave: 95-0547, 95-3154
Gas Box: 95-0537, 95-2977
Failure of these mini-controllers is frequent and can result in an array of malfunctions including loss of communication, loss of door/lamp/wafer pin control, invalid status errors, and over-reading power output of the microwave.
GetSpares.com has these mini-controllers currently installed in a fully functional PEP3510. They are ready to be pulled and shipped to you today. Head to GetSpares.com for your parts needs!
Process Mini Controllers – front
Process Mini Controllers – rear
Novellus GaSonics PEP3510
Novellus GaSonics PEP3510