GetSpares.com has good parts for sale in a fully operational DNS 80B wafer spin coating track.

These are the part numbers for the manual control Maintenance Panels:

CESP-001A – Panel with pump control through PCN5

CESP-0017X2 -Panel with pump control through PCN5

CESP-0017 -Panel (No PCN5)

CESP-0018 – Panel (No PCN5)

CESP-002 – Panel (No PCN5)

CESP-0012 – Panel (No PCN5)

Head to GetSpares.com to order the parts you need.

Maintenance Panel CESP_0017 and similar. DNS 80B

DNS 80B