80B maintenance panel CESP-0017X2 (Coater)
M400
Hamamatsu L6299 AG09 Lamp Power Unit
80b spin board EESC-0012
KLA/Prometrix RS-35 36-0004 Current Source
KLA/Prometrix RS-35 54-0005 Current Source
DNS 80B maintenance panel CESP-0017X2 (Coater)
DNS 80B LCD power board ZD75-0524
DNS 80B spin board EESC-0012
DNS 80B EESA-001A1 servo amp AU6356N20 and EESA-001
KLA/Prometrix RS-75 52-0616 ME Box
KLA/Prometrix RS-35 36-0042 Analog Power Supply
Novellus / Gasonics PEP3510 95-0537 gas box mini controller 95-2977
Novellus / Gasonics PEP3510 95-0541 MISC mini-controller
Novellus / Gasonics PEP3510 95-3154 95-0547 microwave min
DNS 80B EESA-001A1 servo amp AU6356N20 and EESA-001
DNS 80B maintenance panel CESP-0018 (Develop)
DNS 80B maintenance panel CESP-0002 (Coater)
DNS 80B maintenance panel CESP-001A (Coater)
Applied Materials V440 (V21) 0090-75014 Synergy CPU
KLA/Prometrix RS35 SQV175-14XX
IDI M300 mother board 1-130-020
IDI M300 pump controller card 1-139-022
IDI M300 com card 1-139-023
LAM and others Brooks ACE 001-4130-03 VCE Controller
Applied Materials V440 0190-76043 Synergy CPU 68040 Controller
L_3510 90-2590
DBA-5CENTURA/ENDURA 0010-20498 ASSY +/- 15V POWER SUPPLY GEN RACK
DNS 80B UDX5107N Vexta 5-Phase Driver Exchange
KLA 6220 6420 2114B-30SLQST CYONICS-UNIPHASE
001-3252-133
DNS 60A CEBB-1011 Station Controller Board BAKE
DNS 80B Indexer EEDC-0011
AIT 1 KLA 341444 PMT
Canon I4 LK27
Unknown Unipower Vega 650 Lambda X65223B-ACFN
Little Giant Bl1100
DNS SK-200 JZ15-30549 LCD
DNS 80B 8axis Controller 2-VC-15485 EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07
DNS SK-200 2-39-51930-2-39-61074
DNS 80B servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462
DNS 80B maintenance panel CESP-002 (Coat)
DNS SK-200 2-39-51930-2-39-61074 SN 001003BB LCD
Applied Materials P5000 0190-09379 ASSy VME CPU Synergy Upgrade
DNS 80B FRD-4 2-39-4543-1
DNS 80A Computer FC-9821Ka
DNS 80B CEML-0014 DS-LAN BOARD/2-VC-1075-1 IF01068A
DNS 80B EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07
L_3510 Gasonics 903-1598 PCB-EOP/Pressure ControlIPC SPA
Novellus / Gasonics PEP3510 Phasetronics PTR1000 120 KB 69039 Control Assembly
DNS 60B EEMP-0021X3
MRC/Eclipse 4 CVD-PVD 50-188N PCB -RMX Control Board
DNS SK-200 2-39-51930 2-39-61074 LCD
DNS SK-200 2-39-51930-2-39-61074 LCD
DNS 60B EEMP-0021X3 LCD DISPLAY
DNS SK-200 2-39-51930-2-39-61074 LCD
DNS 80B EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462
DNS 80B 2-VC-34885-GSRPR EEBH-6011 heater control bake unit
linear encoder
DNS 80A Driver Motor Box, Servo Pack CESA-804
DNS 80B EEBH-0011X1GSRPR heater control bake unit
DNS 80B EEW Hamamatsu L6299-12 PSI-DUV248
DNS 80B EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR
Novellus / Gasonics PEP3510 95-0538 Cluster Misc Controller
Gasonics/Novellus L_3500 L_3510 90-2590
Novellus / Gasonics C1 02-00149-00
KLA Laser Laser sensor
Unipower Vega 650 Lambda X65223B-ACFN
DNS 80B 2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013)
KLA/Tencor Timing Generator, PCB W/Exchange S6420 277266
IDI-400 1-39-028 Pump Controller
C1 Tylan General AC-2S06 Adaptor, Throttle Valve Controller (796-006238-002)
DNS 80B servo amp AU3575N233 and EESA-001
DNS 80B servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001
KLA8100 CD-SEM, 8100XP CD-SEM, 8100XPR CD-SEM, 8250 CD-SEM, 8300 CD-SEM, 8450 CD-SEM 780-14091-000GSRPR
Leybold UL-500
Nicolet Magna ECO 1000 410-01900 OBC Board (ECO-1000) 000-883100 050-883100
KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 14-008473-GSRPR PCB, AUTO FOCUS
DNS SK-200 2-39-51930 2-39-61074 LCD
Gasonics/Novellus L_3500 L_3510 90-2590 16495-01B Branson/IPC, I/O interface
LTS, TCB, VIDEO Generator
Applied Materials V440 (SV21) P5000 0090-76110-A-GSRPR Synergy CPU VME SBC
Applied Materials V440 (V21) P5000 0090-76110-GSRPR Synergy CPU VME SBC
Canon BG4-6582-000-GSRPR
KLA Starlight 710-058895-00-GSRPR PCB Multi Speed Interface Board
DNS 80A Driver Motor Box Servo PK CESA-804
IDI M300 communication card 1-139-023
Applied Materials P5000 0090-75014-A-GSRPR Synergy CPU VME SBC (v21)
Hamamatsu L6299 AG09
DNS 80B FRD-4 2-39-45431-GSRPR
DNS 80B 493-30-1020-GSRPR HOTPLATE POWER SUPPLY MR-2015
KLA/Prometrix RS-35 54-0006 PCA ART Relay Board W/Exchange
KLA/Prometrix RS-35 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389)
KLA/Prometrix RS-35 54-0014 36-0014 PCA-DVM, ART Voltmeter
KLA/Prometrix RS-35 36-0042 Analog Power Supply 54-0057
Gasonics Aura1000 A90-005-01-GSRPR A90-005-002
Applied Materials AMAT Centura 0190-35765-GSRPR
DNS 80A CEDB-1013 2-VC-15252 Indexer Board
KLA SP1-TB1 PCB, ASSY 375420 , 0235098 Beam Pos Control
DNS 80B EESA-001 and AU3575N223
DNS Lamphouse-EEW 80B UV-SPOT light source DNS Lamphouse,Hamamatsu L6599-01GSRPR
MRC/Eclipse 4 CVD-PVD 884-98-000-GSRPR PCB -RMX PCB
DNS 80B IPC51/293 UPIBOC-I INDUSTRIAL PC
DNS 80B IPC51/596 UPIBOC-I INDUSTRIAL PC
DNS SK-200 GEPH-001X3 Track Coater Power Supply
Canon i5 UFP-710-TA422 LCD Display
DNS SK-200 D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
AIT 1 KLA 290432-REV A-GSRPR AOD Scanner
Gasonics/Novellus L_3500 L_3510 95-0517 PCB Motherboard Intel 486DX CPU exchange program
DNS 80B Hamamatsu L6599-01 Lamp House for EEW
DNS SK-200 2-39-51930 2-39-61074 LCD UT3-F1AE
DNS 60A CEYD-0015 2-VC-13743-GSRPR
DNS EEW Control Unit EEUE-001B
DNS 80B INR-244-402-GSRPR aka 2-39-45751 Thermo Controller
DNS Lamphouse-EEW 80B UV-SPOT light source DNS Lamphouse,Hamamatsu L6001-01GSRPR
DNS EEW Power Supply EEUD-0013
DNS 80B Power supply from EEUE-001B unit
KLA Starlight SL3XX series 710-058894-00 FA Board
AIT 2 KLA 373583-GSRPR ANALOG BOARD
KLA LCD Monitor 90X0054
DNS EEW Control Unit EEUE-001X3
Thermawave 14-010064-GSRPR Analog Processor Board Optiprobe 2600 W/Exchange
Gasonics/Novellus L_3500 L_3510 16495-01-REV.7.4 Branson/IPC, I/O interface
DNS 80B EEYC-0011 EEW station controller
KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 14-007009-GSRPR Auto FOCUS Driver Board
Novellus / Gasonics PEP3510 95-3155 Cluster Misc Controller
DNS Lamphouse-EEW 80B UV-SPOT light source Hamamatsu L6599-01 Lamp House for EEW
Gasonics/Novellus L_3500 L_3510 16495-01E-GSRPR Branson/IPC, I/O interface
DNS SK-200 3L135-GSRPR
KLA/Prometrix RS-55 36-0042 Analog I/O Board 54-0252
KLA/Prometrix RS55/75 Current Source PCB (Alternate 54-0005 or 54-0389)
KLA/Prometrix RS55/RS75 54-0014 36-0014 PCB DVM CARD
TEL ACT 8 Thermo-Con Power Supply INR-244-216
TEL ACT 8 CT2939-000009-12-GSRPR Power Supply Upstair
LAM and others Brooks ACE 001-4130-03 VCE Controller No MISC-IO
Applied Materials 0100-20066-GSRPR Analog Sync Detect
DNS Tamagawa 3510N45E10 Motor AC servo
Applied Materials 0100-02016-GSRPR Analog Sync Detect
KLA UV 1250 / 1050 54-0311 E
Applied Materials P5000 / P5200 0190-76050-GSRPR R Video PCB
Gasonics/Novellus L_3500 L_3510 16495-01-GSRPR Branson/IPC, I/O interface
DNS SK-200 servo amp 2-VC-27621 AU6354N40 and GESA-001
DNS 80B / SK200 EEW Hamamatsu L6299-12
DNS 80A CERB-1016 2-VC-15254-1 Transport Station Controller
KLA 6220 6420 Argon 50 watt laser class III
KLA/Prometrix RS-35 36-0004/54-0006 PCA ART Relay Board W/Exchange
DNS SK200 SK200 - INR-244-402-GSRPR aka 2-39-45751 Thermo Controller
SVG Track 600400-01 Track Interface PDB PD 80072E
KLA Tencor/Prometrix UV1050 36-0287 PCB Stage Driver F2 Rev. F
KLA Tencor/Prometrix UV1250 36-0201 H2 Interface PCB
KLA Tencor/Prometrix RS-35 RS-55 55079-763288 PCA-DUAL Stepper Driver
DNS 80B 2-VC-19090GSRPR Transport Slave Board Repair (EERC-0012)
DNS 80B maintenance panel CESP-001A F-VC-40833
DNS 60A CEMP-0016-GSRPR Main Display Panel
AIT 2 KLA 356166 U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18
AIT 2 KLA 710-693221-000 Matrox Corona Rev 6 8M Confg AIT2, Slot 1
maintenance panel CESP-0002 (Coater)
KLA Tencor/Prometrix UV1250 - UV1280 PCB Measurement Control Board 54-0317 36-0317
DNS 80B 2-VC-16217-1-GSRPR EEBH-0021
L_3510 Gasonics 15451-010GSRPR PCB-EOP/Pressure ControlIPC SPA
DNS 80A CESB-2011 2-VC-19075 Spin control board. Station Controller
Equip ESC200 71300901 CPU Single Board Computer PCB Controller
Isolators such as PC817
Beckman Custom Modification for 7581A, 7581B, 7581C
M400
Hamamatsu L6299 AG09 Lamp Power Unit
80b spin board EESC-0012
KLA/Prometrix RS-35 36-0004 Current Source
KLA/Prometrix RS-35 54-0005 Current Source
DNS 80B maintenance panel CESP-0017X2 (Coater)
DNS 80B LCD power board ZD75-0524
DNS 80B spin board EESC-0012
DNS 80B EESA-001A1 servo amp AU6356N20 and EESA-001
KLA/Prometrix RS-75 52-0616 ME Box
KLA/Prometrix RS-35 36-0042 Analog Power Supply
Novellus / Gasonics PEP3510 95-0537 gas box mini controller 95-2977
Novellus / Gasonics PEP3510 95-0541 MISC mini-controller
Novellus / Gasonics PEP3510 95-3154 95-0547 microwave min
DNS 80B EESA-001A1 servo amp AU6356N20 and EESA-001
DNS 80B maintenance panel CESP-0018 (Develop)
DNS 80B maintenance panel CESP-0002 (Coater)
DNS 80B maintenance panel CESP-001A (Coater)
Applied Materials V440 (V21) 0090-75014 Synergy CPU
KLA/Prometrix RS35 SQV175-14XX
IDI M300 mother board 1-130-020
IDI M300 pump controller card 1-139-022
IDI M300 com card 1-139-023
LAM and others Brooks ACE 001-4130-03 VCE Controller
Applied Materials V440 0190-76043 Synergy CPU 68040 Controller
L_3510 90-2590
DBA-5CENTURA/ENDURA 0010-20498 ASSY +/- 15V POWER SUPPLY GEN RACK
DNS 80B UDX5107N Vexta 5-Phase Driver Exchange
KLA 6220 6420 2114B-30SLQST CYONICS-UNIPHASE
001-3252-133
DNS 60A CEBB-1011 Station Controller Board BAKE
DNS 80B Indexer EEDC-0011
AIT 1 KLA 341444 PMT
Canon I4 LK27
Unknown Unipower Vega 650 Lambda X65223B-ACFN
Little Giant Bl1100
DNS SK-200 JZ15-30549 LCD
DNS 80B 8axis Controller 2-VC-15485 EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07
DNS SK-200 2-39-51930-2-39-61074
DNS 80B servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462
DNS 80B maintenance panel CESP-002 (Coat)
DNS SK-200 2-39-51930-2-39-61074 SN 001003BB LCD
Applied Materials P5000 0190-09379 ASSy VME CPU Synergy Upgrade
DNS 80B FRD-4 2-39-4543-1
DNS 80A Computer FC-9821Ka
DNS 80B CEML-0014 DS-LAN BOARD/2-VC-1075-1 IF01068A
DNS 80B EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07
L_3510 Gasonics 903-1598 PCB-EOP/Pressure ControlIPC SPA
Novellus / Gasonics PEP3510 Phasetronics PTR1000 120 KB 69039 Control Assembly
DNS 60B EEMP-0021X3
MRC/Eclipse 4 CVD-PVD 50-188N PCB -RMX Control Board
DNS SK-200 2-39-51930 2-39-61074 LCD
DNS SK-200 2-39-51930-2-39-61074 LCD
DNS 60B EEMP-0021X3 LCD DISPLAY
DNS SK-200 2-39-51930-2-39-61074 LCD
DNS 80B EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462
DNS 80B 2-VC-34885-GSRPR EEBH-6011 heater control bake unit
linear encoder
DNS 80A Driver Motor Box, Servo Pack CESA-804
DNS 80B EEBH-0011X1GSRPR heater control bake unit
DNS 80B EEW Hamamatsu L6299-12 PSI-DUV248
DNS 80B EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR
Novellus / Gasonics PEP3510 95-0538 Cluster Misc Controller
Gasonics/Novellus L_3500 L_3510 90-2590
Novellus / Gasonics C1 02-00149-00
KLA Laser Laser sensor
Unipower Vega 650 Lambda X65223B-ACFN
DNS 80B 2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013)
KLA/Tencor Timing Generator, PCB W/Exchange S6420 277266
IDI-400 1-39-028 Pump Controller
C1 Tylan General AC-2S06 Adaptor, Throttle Valve Controller (796-006238-002)
DNS 80B servo amp AU3575N233 and EESA-001
DNS 80B servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001
KLA8100 CD-SEM, 8100XP CD-SEM, 8100XPR CD-SEM, 8250 CD-SEM, 8300 CD-SEM, 8450 CD-SEM 780-14091-000GSRPR
Leybold UL-500
Nicolet Magna ECO 1000 410-01900 OBC Board (ECO-1000) 000-883100 050-883100
KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 14-008473-GSRPR PCB, AUTO FOCUS
DNS SK-200 2-39-51930 2-39-61074 LCD
Gasonics/Novellus L_3500 L_3510 90-2590 16495-01B Branson/IPC, I/O interface
LTS, TCB, VIDEO Generator
Applied Materials V440 (SV21) P5000 0090-76110-A-GSRPR Synergy CPU VME SBC
Applied Materials V440 (V21) P5000 0090-76110-GSRPR Synergy CPU VME SBC
Canon BG4-6582-000-GSRPR
KLA Starlight 710-058895-00-GSRPR PCB Multi Speed Interface Board
DNS 80A Driver Motor Box Servo PK CESA-804
IDI M300 communication card 1-139-023
Applied Materials P5000 0090-75014-A-GSRPR Synergy CPU VME SBC (v21)
Hamamatsu L6299 AG09
DNS 80B FRD-4 2-39-45431-GSRPR
DNS 80B 493-30-1020-GSRPR HOTPLATE POWER SUPPLY MR-2015
KLA/Prometrix RS-35 54-0006 PCA ART Relay Board W/Exchange
KLA/Prometrix RS-35 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389)
KLA/Prometrix RS-35 54-0014 36-0014 PCA-DVM, ART Voltmeter
KLA/Prometrix RS-35 36-0042 Analog Power Supply 54-0057
Gasonics Aura1000 A90-005-01-GSRPR A90-005-002
Applied Materials AMAT Centura 0190-35765-GSRPR
DNS 80A CEDB-1013 2-VC-15252 Indexer Board
KLA SP1-TB1 PCB, ASSY 375420 , 0235098 Beam Pos Control
DNS 80B EESA-001 and AU3575N223
DNS Lamphouse-EEW 80B UV-SPOT light source DNS Lamphouse,Hamamatsu L6599-01GSRPR
MRC/Eclipse 4 CVD-PVD 884-98-000-GSRPR PCB -RMX PCB
DNS 80B IPC51/293 UPIBOC-I INDUSTRIAL PC
DNS 80B IPC51/596 UPIBOC-I INDUSTRIAL PC
DNS SK-200 GEPH-001X3 Track Coater Power Supply
Canon i5 UFP-710-TA422 LCD Display
DNS SK-200 D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001
AIT 1 KLA 290432-REV A-GSRPR AOD Scanner
Gasonics/Novellus L_3500 L_3510 95-0517 PCB Motherboard Intel 486DX CPU exchange program
DNS 80B Hamamatsu L6599-01 Lamp House for EEW
DNS SK-200 2-39-51930 2-39-61074 LCD UT3-F1AE
DNS 60A CEYD-0015 2-VC-13743-GSRPR
DNS EEW Control Unit EEUE-001B
DNS 80B INR-244-402-GSRPR aka 2-39-45751 Thermo Controller
DNS Lamphouse-EEW 80B UV-SPOT light source DNS Lamphouse,Hamamatsu L6001-01GSRPR
DNS EEW Power Supply EEUD-0013
DNS 80B Power supply from EEUE-001B unit
KLA Starlight SL3XX series 710-058894-00 FA Board
AIT 2 KLA 373583-GSRPR ANALOG BOARD
KLA LCD Monitor 90X0054
DNS EEW Control Unit EEUE-001X3
Thermawave 14-010064-GSRPR Analog Processor Board Optiprobe 2600 W/Exchange
Gasonics/Novellus L_3500 L_3510 16495-01-REV.7.4 Branson/IPC, I/O interface
DNS 80B EEYC-0011 EEW station controller
KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 14-007009-GSRPR Auto FOCUS Driver Board
Novellus / Gasonics PEP3510 95-3155 Cluster Misc Controller
DNS Lamphouse-EEW 80B UV-SPOT light source Hamamatsu L6599-01 Lamp House for EEW
Gasonics/Novellus L_3500 L_3510 16495-01E-GSRPR Branson/IPC, I/O interface
DNS SK-200 3L135-GSRPR
KLA/Prometrix RS-55 36-0042 Analog I/O Board 54-0252
KLA/Prometrix RS55/75 Current Source PCB (Alternate 54-0005 or 54-0389)
KLA/Prometrix RS55/RS75 54-0014 36-0014 PCB DVM CARD
TEL ACT 8 Thermo-Con Power Supply INR-244-216
TEL ACT 8 CT2939-000009-12-GSRPR Power Supply Upstair
LAM and others Brooks ACE 001-4130-03 VCE Controller No MISC-IO
Applied Materials 0100-20066-GSRPR Analog Sync Detect
DNS Tamagawa 3510N45E10 Motor AC servo
Applied Materials 0100-02016-GSRPR Analog Sync Detect
KLA UV 1250 / 1050 54-0311 E
Applied Materials P5000 / P5200 0190-76050-GSRPR R Video PCB
Gasonics/Novellus L_3500 L_3510 16495-01-GSRPR Branson/IPC, I/O interface
DNS SK-200 servo amp 2-VC-27621 AU6354N40 and GESA-001
DNS 80B / SK200 EEW Hamamatsu L6299-12
DNS 80A CERB-1016 2-VC-15254-1 Transport Station Controller
KLA 6220 6420 Argon 50 watt laser class III
KLA/Prometrix RS-35 36-0004/54-0006 PCA ART Relay Board W/Exchange
DNS SK200 SK200 - INR-244-402-GSRPR aka 2-39-45751 Thermo Controller
SVG Track 600400-01 Track Interface PDB PD 80072E
KLA Tencor/Prometrix UV1050 36-0287 PCB Stage Driver F2 Rev. F
KLA Tencor/Prometrix UV1250 36-0201 H2 Interface PCB
KLA Tencor/Prometrix RS-35 RS-55 55079-763288 PCA-DUAL Stepper Driver
DNS 80B 2-VC-19090GSRPR Transport Slave Board Repair (EERC-0012)
DNS 80B maintenance panel CESP-001A F-VC-40833
DNS 60A CEMP-0016-GSRPR Main Display Panel
AIT 2 KLA 356166 U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18
AIT 2 KLA 710-693221-000 Matrox Corona Rev 6 8M Confg AIT2, Slot 1
maintenance panel CESP-0002 (Coater)
KLA Tencor/Prometrix UV1250 - UV1280 PCB Measurement Control Board 54-0317 36-0317
DNS 80B 2-VC-16217-1-GSRPR EEBH-0021
L_3510 Gasonics 15451-010GSRPR PCB-EOP/Pressure ControlIPC SPA
DNS 80A CESB-2011 2-VC-19075 Spin control board. Station Controller
Equip ESC200 71300901 CPU Single Board Computer PCB Controller
Isolators such as PC817
Beckman Custom Modification for 7581A, 7581B, 7581C